JP7834780B2 - ウェッジボンディング装置のカッター高さを決定および/または校正する方法、および関連するウェッジボンディング装置 - Google Patents

ウェッジボンディング装置のカッター高さを決定および/または校正する方法、および関連するウェッジボンディング装置

Info

Publication number
JP7834780B2
JP7834780B2 JP2023571443A JP2023571443A JP7834780B2 JP 7834780 B2 JP7834780 B2 JP 7834780B2 JP 2023571443 A JP2023571443 A JP 2023571443A JP 2023571443 A JP2023571443 A JP 2023571443A JP 7834780 B2 JP7834780 B2 JP 7834780B2
Authority
JP
Japan
Prior art keywords
cutter
wedge bonding
height
determining
height measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023571443A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022246137A5 (https=
JP2024519836A (ja
JP2024519836A5 (https=
Inventor
クラーナー、ピーター、ジュリアス
スクラントン、エリック、ティー.
バルテ、カーシック、グンダッパ
デ アルバ、ホセ、デ ヘスス ロサーノ
シャルマ、ディビッシュ
Original Assignee
クリック アンド ソッファ インダストリーズ、インク.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by クリック アンド ソッファ インダストリーズ、インク. filed Critical クリック アンド ソッファ インダストリーズ、インク.
Publication of JP2024519836A publication Critical patent/JP2024519836A/ja
Publication of JPWO2022246137A5 publication Critical patent/JPWO2022246137A5/ja
Publication of JP2024519836A5 publication Critical patent/JP2024519836A5/ja
Application granted granted Critical
Publication of JP7834780B2 publication Critical patent/JP7834780B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/26Means for mounting or adjusting the cutting member; Means for adjusting the stroke of the cutting member
    • B26D7/2628Means for adjusting the position of the cutting member
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/26Auxiliary equipment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04Apparatus for manufacture or treatment
    • H10P72/0428Apparatus for mechanical treatment or grinding or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • B23K2101/42Printed circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Wire Bonding (AREA)
  • Basic Packing Technique (AREA)
JP2023571443A 2021-05-20 2022-05-19 ウェッジボンディング装置のカッター高さを決定および/または校正する方法、および関連するウェッジボンディング装置 Active JP7834780B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163191286P 2021-05-20 2021-05-20
US63/191,286 2021-05-20
PCT/US2022/030141 WO2022246137A1 (en) 2021-05-20 2022-05-19 Methods of determining and/or calibrating a cutter height on a wedge bonding machine, and related wedge bonding machines

Publications (4)

Publication Number Publication Date
JP2024519836A JP2024519836A (ja) 2024-05-21
JPWO2022246137A5 JPWO2022246137A5 (https=) 2025-05-27
JP2024519836A5 JP2024519836A5 (https=) 2025-05-27
JP7834780B2 true JP7834780B2 (ja) 2026-03-24

Family

ID=84102624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023571443A Active JP7834780B2 (ja) 2021-05-20 2022-05-19 ウェッジボンディング装置のカッター高さを決定および/または校正する方法、および関連するウェッジボンディング装置

Country Status (5)

Country Link
US (1) US12485565B2 (https=)
EP (1) EP4341992A4 (https=)
JP (1) JP7834780B2 (https=)
CN (1) CN117337485A (https=)
WO (1) WO2022246137A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004122323A (ja) 2002-10-04 2004-04-22 Toyota Motor Corp 治具と調整方法
JP2004247693A (ja) 2003-02-17 2004-09-02 Toyota Motor Corp 調整方法と冶具
JP2005353901A (ja) 2004-06-11 2005-12-22 Ultrasonic Engineering Co Ltd ワイヤボンディング装置
US20100127045A1 (en) 2008-11-21 2010-05-27 Chi Wah Cheng Bond head for heavy wire bonder
KR20170052484A (ko) 2015-11-04 2017-05-12 쿨리케 앤드 소파 인더스트리즈, 인코포레이티드 와이어 본딩을 위한 본더 상의 돌출 다이 자동 최적화 툴 및 관련 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2584017B2 (ja) * 1988-11-04 1997-02-19 松下電器産業株式会社 ワイヤボンダのデータ処理方法
EP1625911B1 (de) * 2004-08-11 2007-10-10 F&K Delvotec Bondtechnik GmbH Drahtbonder mit einer Kamera, einer Bildverarbeitungseinrichtung, Speichermittel und Vergleichermittel und Verfahren zum Betrieb eines solchen
US7454844B1 (en) * 2005-09-12 2008-11-25 Laszlo Ruby Sheetrock punch apparatus
WO2010090778A2 (en) * 2009-01-20 2010-08-12 Orthodyne Electronics Corporation Cutting blade for a wire bonding system
JP2011218607A (ja) * 2010-04-06 2011-11-04 Sharp Corp 基板分割装置および基板分割方法
US8919632B2 (en) * 2012-11-09 2014-12-30 Asm Technology Singapore Pte. Ltd. Method of detecting wire bonding failures
TWI518816B (zh) * 2013-07-04 2016-01-21 先進科技新加坡有限公司 用於在導線鍵合過程中測量無空氣球尺寸的方法和裝置
US10596803B2 (en) * 2017-05-30 2020-03-24 General Electric Company Calibration systems for calibrating recoater devices of additive manufacturing systems and related program products
CN209150143U (zh) * 2018-11-07 2019-07-23 佛山市国星光电股份有限公司 一种led器件
US11581285B2 (en) * 2019-06-04 2023-02-14 Kulicke And Soffa Industries, Inc. Methods of detecting bonding between a bonding wire and a bonding location on a wire bonding machine

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004122323A (ja) 2002-10-04 2004-04-22 Toyota Motor Corp 治具と調整方法
JP2004247693A (ja) 2003-02-17 2004-09-02 Toyota Motor Corp 調整方法と冶具
JP2005353901A (ja) 2004-06-11 2005-12-22 Ultrasonic Engineering Co Ltd ワイヤボンディング装置
US20100127045A1 (en) 2008-11-21 2010-05-27 Chi Wah Cheng Bond head for heavy wire bonder
KR20170052484A (ko) 2015-11-04 2017-05-12 쿨리케 앤드 소파 인더스트리즈, 인코포레이티드 와이어 본딩을 위한 본더 상의 돌출 다이 자동 최적화 툴 및 관련 방법
JP2017092464A (ja) 2015-11-04 2017-05-25 クリック アンド ソッファ インダストリーズ、インク. ワイヤーボンディングのためのボンダー上の自動オーバーハングダイ最適化ツールと関連する方法

Also Published As

Publication number Publication date
EP4341992A4 (en) 2025-07-09
EP4341992A1 (en) 2024-03-27
WO2022246137A1 (en) 2022-11-24
US20220371215A1 (en) 2022-11-24
US12485565B2 (en) 2025-12-02
JP2024519836A (ja) 2024-05-21
WO2022246137A8 (en) 2023-01-19
CN117337485A (zh) 2024-01-02

Similar Documents

Publication Publication Date Title
EP0368533B1 (en) Quality control for wire bonding
US9620477B2 (en) Wire bonder and method of calibrating a wire bonder
EP1776716B1 (en) Test apparatus
EP3369511B1 (en) Wire electrical discharge machine and control method for wire electrical discharge machine
CN101712096A (zh) 点焊的生产线或装配线方法
EP0600614A1 (en) Hole probe apparatus and method
TWI787736B (zh) 用以在半導體產品上形成鋸切痕之鋸切裝置及方法
JP7834780B2 (ja) ウェッジボンディング装置のカッター高さを決定および/または校正する方法、および関連するウェッジボンディング装置
JP7317736B2 (ja) 絶縁抵抗測定装置と、絶縁抵抗測定方法
JP5290661B2 (ja) スポット溶接装置の電極消耗量計測方法及び電極消耗量計測装置
US11515285B2 (en) Methods of optimizing clamping of a semiconductor element against a support structure on a wire bonding machine, and related methods
JP3153087B2 (ja) 一定深さ加工装置及び加工方法
JP2002022433A (ja) ワーク形状測定センサおよびワーク形状測定装置
CN116329624A (zh) 片式标准节端面加工装置及方法
JP6267546B2 (ja) コンタクト位置制御方法
CN109909807B (zh) 数控系统中实现自动扫描测高的方法
US20250153279A1 (en) Nugget diameter estimation method
CN223077781U (zh) 基于工件上的芯片的应力测试通用工装
JP4335751B2 (ja) ワイヤボンディング装置
CN113340250B (zh) 一种采用探头测量孔径的方法
JPWO2022098697A5 (https=)
JP2001345352A (ja) 電子部品のボンディング装置およびボンディング方法
CN209986243U (zh) 车床刀塔垫板校准装置
JP6709337B2 (ja) 工具位置のセット装置及びそれを用いた工具位置のセット方法
JPH11119816A (ja) 精密溝加工装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250519

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250519

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20260127

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20260130

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20260207

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20260303

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20260311

R150 Certificate of patent or registration of utility model

Ref document number: 7834780

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150