JP7810264B2 - 画像処理方法、画像処理装置、走査型プローブ顕微鏡、およびプログラム - Google Patents

画像処理方法、画像処理装置、走査型プローブ顕微鏡、およびプログラム

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Publication number
JP7810264B2
JP7810264B2 JP2024533572A JP2024533572A JP7810264B2 JP 7810264 B2 JP7810264 B2 JP 7810264B2 JP 2024533572 A JP2024533572 A JP 2024533572A JP 2024533572 A JP2024533572 A JP 2024533572A JP 7810264 B2 JP7810264 B2 JP 7810264B2
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JP
Japan
Prior art keywords
image
correction
data
substrate
generating
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JP2024533572A
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English (en)
Japanese (ja)
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JPWO2024014185A1 (https=
JPWO2024014185A5 (https=
Inventor
雅人 平出
賢治 山▲崎▼
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Shimadzu Corp
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Shimadzu Corp
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Publication of JPWO2024014185A5 publication Critical patent/JPWO2024014185A5/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Image Processing (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2024533572A 2022-07-11 2023-06-07 画像処理方法、画像処理装置、走査型プローブ顕微鏡、およびプログラム Active JP7810264B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022111187 2022-07-11
JP2022111187 2022-07-11
PCT/JP2023/021094 WO2024014185A1 (ja) 2022-07-11 2023-06-07 画像処理方法、画像処理装置、走査型プローブ顕微鏡、およびプログラム

Publications (3)

Publication Number Publication Date
JPWO2024014185A1 JPWO2024014185A1 (https=) 2024-01-18
JPWO2024014185A5 JPWO2024014185A5 (https=) 2025-02-19
JP7810264B2 true JP7810264B2 (ja) 2026-02-03

Family

ID=89536625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024533572A Active JP7810264B2 (ja) 2022-07-11 2023-06-07 画像処理方法、画像処理装置、走査型プローブ顕微鏡、およびプログラム

Country Status (3)

Country Link
JP (1) JP7810264B2 (https=)
CN (1) CN119522369A (https=)
WO (1) WO2024014185A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000230823A (ja) 1999-02-09 2000-08-22 Olympus Optical Co Ltd 分子測長方法
JP2010203999A (ja) 2009-03-05 2010-09-16 Shimadzu Corp 特定部位検出方法、及び該方法を用いた試料分析装置
JP2019158387A (ja) 2018-03-08 2019-09-19 株式会社島津製作所 走査型プローブ顕微鏡及び表面画像補正方法
JP2021043096A (ja) 2019-09-12 2021-03-18 株式会社日立ハイテク パターン高さ情報補正システム及びパターン高さ情報の補正方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1138019A (ja) * 1997-07-17 1999-02-12 Seiko Instr Inc 走査型プローブ顕微鏡
JPH11142416A (ja) * 1997-11-12 1999-05-28 Olympus Optical Co Ltd 走査型プローブ顕微鏡における測定データの補正方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000230823A (ja) 1999-02-09 2000-08-22 Olympus Optical Co Ltd 分子測長方法
JP2010203999A (ja) 2009-03-05 2010-09-16 Shimadzu Corp 特定部位検出方法、及び該方法を用いた試料分析装置
JP2019158387A (ja) 2018-03-08 2019-09-19 株式会社島津製作所 走査型プローブ顕微鏡及び表面画像補正方法
JP2021043096A (ja) 2019-09-12 2021-03-18 株式会社日立ハイテク パターン高さ情報補正システム及びパターン高さ情報の補正方法

Also Published As

Publication number Publication date
CN119522369A (zh) 2025-02-25
JPWO2024014185A1 (https=) 2024-01-18
WO2024014185A1 (ja) 2024-01-18

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