JPWO2024014185A1 - - Google Patents
Info
- Publication number
- JPWO2024014185A1 JPWO2024014185A1 JP2024533572A JP2024533572A JPWO2024014185A1 JP WO2024014185 A1 JPWO2024014185 A1 JP WO2024014185A1 JP 2024533572 A JP2024533572 A JP 2024533572A JP 2024533572 A JP2024533572 A JP 2024533572A JP WO2024014185 A1 JPWO2024014185 A1 JP WO2024014185A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/04—Display or data processing devices
- G01Q30/06—Display or data processing devices for error compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Image Processing (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022111187 | 2022-07-11 | ||
| JP2022111187 | 2022-07-11 | ||
| PCT/JP2023/021094 WO2024014185A1 (ja) | 2022-07-11 | 2023-06-07 | 画像処理方法、画像処理装置、走査型プローブ顕微鏡、およびプログラム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2024014185A1 true JPWO2024014185A1 (https=) | 2024-01-18 |
| JPWO2024014185A5 JPWO2024014185A5 (https=) | 2025-02-19 |
| JP7810264B2 JP7810264B2 (ja) | 2026-02-03 |
Family
ID=89536625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024533572A Active JP7810264B2 (ja) | 2022-07-11 | 2023-06-07 | 画像処理方法、画像処理装置、走査型プローブ顕微鏡、およびプログラム |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7810264B2 (https=) |
| CN (1) | CN119522369A (https=) |
| WO (1) | WO2024014185A1 (https=) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1138019A (ja) * | 1997-07-17 | 1999-02-12 | Seiko Instr Inc | 走査型プローブ顕微鏡 |
| JPH11142416A (ja) * | 1997-11-12 | 1999-05-28 | Olympus Optical Co Ltd | 走査型プローブ顕微鏡における測定データの補正方法 |
| JP2000230823A (ja) * | 1999-02-09 | 2000-08-22 | Olympus Optical Co Ltd | 分子測長方法 |
| JP2010203999A (ja) * | 2009-03-05 | 2010-09-16 | Shimadzu Corp | 特定部位検出方法、及び該方法を用いた試料分析装置 |
| JP2019158387A (ja) * | 2018-03-08 | 2019-09-19 | 株式会社島津製作所 | 走査型プローブ顕微鏡及び表面画像補正方法 |
| JP2021043096A (ja) * | 2019-09-12 | 2021-03-18 | 株式会社日立ハイテク | パターン高さ情報補正システム及びパターン高さ情報の補正方法 |
-
2023
- 2023-06-07 WO PCT/JP2023/021094 patent/WO2024014185A1/ja not_active Ceased
- 2023-06-07 JP JP2024533572A patent/JP7810264B2/ja active Active
- 2023-06-07 CN CN202380052807.7A patent/CN119522369A/zh active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1138019A (ja) * | 1997-07-17 | 1999-02-12 | Seiko Instr Inc | 走査型プローブ顕微鏡 |
| JPH11142416A (ja) * | 1997-11-12 | 1999-05-28 | Olympus Optical Co Ltd | 走査型プローブ顕微鏡における測定データの補正方法 |
| JP2000230823A (ja) * | 1999-02-09 | 2000-08-22 | Olympus Optical Co Ltd | 分子測長方法 |
| JP2010203999A (ja) * | 2009-03-05 | 2010-09-16 | Shimadzu Corp | 特定部位検出方法、及び該方法を用いた試料分析装置 |
| JP2019158387A (ja) * | 2018-03-08 | 2019-09-19 | 株式会社島津製作所 | 走査型プローブ顕微鏡及び表面画像補正方法 |
| JP2021043096A (ja) * | 2019-09-12 | 2021-03-18 | 株式会社日立ハイテク | パターン高さ情報補正システム及びパターン高さ情報の補正方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN119522369A (zh) | 2025-02-25 |
| JP7810264B2 (ja) | 2026-02-03 |
| WO2024014185A1 (ja) | 2024-01-18 |
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