JP7792128B2 - 窒化皮膜形成装置及び窒化皮膜形成方法 - Google Patents

窒化皮膜形成装置及び窒化皮膜形成方法

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Publication number
JP7792128B2
JP7792128B2 JP2022002934A JP2022002934A JP7792128B2 JP 7792128 B2 JP7792128 B2 JP 7792128B2 JP 2022002934 A JP2022002934 A JP 2022002934A JP 2022002934 A JP2022002934 A JP 2022002934A JP 7792128 B2 JP7792128 B2 JP 7792128B2
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pulsed laser
laser light
nitride film
metal material
film forming
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Japanese (ja)
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JP2022108281A5 (enExample
JP2022108281A (ja
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直史 大津
公陽 三浦
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NATIONAL UNIVERSITY CORPORATION HOKKAIDO HIGHER EDUCATION AND RESEARCH SYSTEM
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NATIONAL UNIVERSITY CORPORATION HOKKAIDO HIGHER EDUCATION AND RESEARCH SYSTEM
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  • Laser Beam Processing (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP2022002934A 2021-01-12 2022-01-12 窒化皮膜形成装置及び窒化皮膜形成方法 Active JP7792128B2 (ja)

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JP2021002658 2021-01-12
JP2021002658 2021-01-12

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JP2022108281A JP2022108281A (ja) 2022-07-25
JP2022108281A5 JP2022108281A5 (enExample) 2025-01-14
JP7792128B2 true JP7792128B2 (ja) 2025-12-25

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013245378A (ja) 2012-05-25 2013-12-09 Toyota Central R&D Labs Inc 摺動部材およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1072656A (ja) * 1996-08-30 1998-03-17 Agency Of Ind Science & Technol チタン系材料の表面硬化方法
JP5682534B2 (ja) * 2011-10-21 2015-03-11 株式会社豊田中央研究所 窒化金属部材およびその製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013245378A (ja) 2012-05-25 2013-12-09 Toyota Central R&D Labs Inc 摺動部材およびその製造方法

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