JP2022108281A5 - - Google Patents

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Publication number
JP2022108281A5
JP2022108281A5 JP2022002934A JP2022002934A JP2022108281A5 JP 2022108281 A5 JP2022108281 A5 JP 2022108281A5 JP 2022002934 A JP2022002934 A JP 2022002934A JP 2022002934 A JP2022002934 A JP 2022002934A JP 2022108281 A5 JP2022108281 A5 JP 2022108281A5
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JP
Japan
Prior art keywords
metal material
nitride film
pulsed laser
laser light
film forming
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JP2022002934A
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English (en)
Japanese (ja)
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JP2022108281A (ja
JP7792128B2 (ja
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Publication of JP2022108281A publication Critical patent/JP2022108281A/ja
Publication of JP2022108281A5 publication Critical patent/JP2022108281A5/ja
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Publication of JP7792128B2 publication Critical patent/JP7792128B2/ja
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JP2022002934A 2021-01-12 2022-01-12 窒化皮膜形成装置及び窒化皮膜形成方法 Active JP7792128B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021002658 2021-01-12
JP2021002658 2021-01-12

Publications (3)

Publication Number Publication Date
JP2022108281A JP2022108281A (ja) 2022-07-25
JP2022108281A5 true JP2022108281A5 (enExample) 2025-01-14
JP7792128B2 JP7792128B2 (ja) 2025-12-25

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JP2022002934A Active JP7792128B2 (ja) 2021-01-12 2022-01-12 窒化皮膜形成装置及び窒化皮膜形成方法

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JP (1) JP7792128B2 (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1072656A (ja) * 1996-08-30 1998-03-17 Agency Of Ind Science & Technol チタン系材料の表面硬化方法
JP5682534B2 (ja) * 2011-10-21 2015-03-11 株式会社豊田中央研究所 窒化金属部材およびその製造方法
JP6026777B2 (ja) * 2012-05-25 2016-11-16 株式会社豊田中央研究所 摺動部材およびその製造方法

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