JP7708213B2 - 共振子及び共振装置 - Google Patents

共振子及び共振装置

Info

Publication number
JP7708213B2
JP7708213B2 JP2023567532A JP2023567532A JP7708213B2 JP 7708213 B2 JP7708213 B2 JP 7708213B2 JP 2023567532 A JP2023567532 A JP 2023567532A JP 2023567532 A JP2023567532 A JP 2023567532A JP 7708213 B2 JP7708213 B2 JP 7708213B2
Authority
JP
Japan
Prior art keywords
resonator
vibration
arm
support arm
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023567532A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023112380A1 (https=
JPWO2023112380A5 (https=
Inventor
良太 河合
史也 遠藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2023112380A1 publication Critical patent/JPWO2023112380A1/ja
Publication of JPWO2023112380A5 publication Critical patent/JPWO2023112380A5/ja
Application granted granted Critical
Publication of JP7708213B2 publication Critical patent/JP7708213B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2023567532A 2021-12-15 2022-08-08 共振子及び共振装置 Active JP7708213B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021203493 2021-12-15
JP2021203493 2021-12-15
PCT/JP2022/030297 WO2023112380A1 (ja) 2021-12-15 2022-08-08 共振子及び共振装置

Publications (3)

Publication Number Publication Date
JPWO2023112380A1 JPWO2023112380A1 (https=) 2023-06-22
JPWO2023112380A5 JPWO2023112380A5 (https=) 2024-08-23
JP7708213B2 true JP7708213B2 (ja) 2025-07-15

Family

ID=86774220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023567532A Active JP7708213B2 (ja) 2021-12-15 2022-08-08 共振子及び共振装置

Country Status (4)

Country Link
US (1) US20240333249A1 (https=)
JP (1) JP7708213B2 (https=)
CN (1) CN118402181A (https=)
WO (1) WO2023112380A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024002471A (ja) * 2022-06-24 2024-01-11 セイコーエプソン株式会社 振動デバイス

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015041152A1 (ja) 2013-09-20 2015-03-26 株式会社村田製作所 振動装置及びその製造方法
WO2016174789A1 (ja) 2015-04-27 2016-11-03 株式会社村田製作所 共振子及び共振装置
WO2017110126A1 (ja) 2015-12-21 2017-06-29 株式会社村田製作所 共振子及び共振装置
WO2018123118A1 (ja) 2016-12-27 2018-07-05 株式会社村田製作所 共振装置
WO2019155663A1 (ja) 2018-02-09 2019-08-15 株式会社村田製作所 Ｍｅｍｓデバイス
WO2020067484A1 (ja) 2018-09-28 2020-04-02 株式会社村田製作所 共振子及び共振装置
WO2020261630A1 (ja) 2019-06-26 2020-12-30 株式会社村田製作所 共振装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015041152A1 (ja) 2013-09-20 2015-03-26 株式会社村田製作所 振動装置及びその製造方法
WO2016174789A1 (ja) 2015-04-27 2016-11-03 株式会社村田製作所 共振子及び共振装置
WO2017110126A1 (ja) 2015-12-21 2017-06-29 株式会社村田製作所 共振子及び共振装置
WO2018123118A1 (ja) 2016-12-27 2018-07-05 株式会社村田製作所 共振装置
WO2019155663A1 (ja) 2018-02-09 2019-08-15 株式会社村田製作所 Ｍｅｍｓデバイス
WO2020067484A1 (ja) 2018-09-28 2020-04-02 株式会社村田製作所 共振子及び共振装置
WO2020261630A1 (ja) 2019-06-26 2020-12-30 株式会社村田製作所 共振装置

Also Published As

Publication number Publication date
JPWO2023112380A1 (https=) 2023-06-22
CN118402181A (zh) 2024-07-26
WO2023112380A1 (ja) 2023-06-22
US20240333249A1 (en) 2024-10-03

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