CN118402181A - 谐振子以及谐振装置 - Google Patents

谐振子以及谐振装置 Download PDF

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Publication number
CN118402181A
CN118402181A CN202280083208.7A CN202280083208A CN118402181A CN 118402181 A CN118402181 A CN 118402181A CN 202280083208 A CN202280083208 A CN 202280083208A CN 118402181 A CN118402181 A CN 118402181A
Authority
CN
China
Prior art keywords
vibration
arm
resonator
film
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280083208.7A
Other languages
English (en)
Chinese (zh)
Inventor
河合良太
远藤史也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN118402181A publication Critical patent/CN118402181A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0595—Holders or supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN202280083208.7A 2021-12-15 2022-08-08 谐振子以及谐振装置 Pending CN118402181A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021203493 2021-12-15
JP2021-203493 2021-12-15
PCT/JP2022/030297 WO2023112380A1 (ja) 2021-12-15 2022-08-08 共振子及び共振装置

Publications (1)

Publication Number Publication Date
CN118402181A true CN118402181A (zh) 2024-07-26

Family

ID=86774220

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280083208.7A Pending CN118402181A (zh) 2021-12-15 2022-08-08 谐振子以及谐振装置

Country Status (4)

Country Link
US (1) US20240333249A1 (https=)
JP (1) JP7708213B2 (https=)
CN (1) CN118402181A (https=)
WO (1) WO2023112380A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024002471A (ja) * 2022-06-24 2024-01-11 セイコーエプソン株式会社 振動デバイス

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6245265B2 (ja) * 2013-09-20 2017-12-13 株式会社村田製作所 振動装置及びその製造方法
JP6468350B2 (ja) * 2015-04-27 2019-02-13 株式会社村田製作所 共振子及び共振装置
WO2017110126A1 (ja) * 2015-12-21 2017-06-29 株式会社村田製作所 共振子及び共振装置
WO2018123118A1 (ja) * 2016-12-27 2018-07-05 株式会社村田製作所 共振装置
CN111683896B (zh) * 2018-02-09 2023-11-10 株式会社村田制作所 Mems设备
CN112703673B (zh) * 2018-09-28 2024-04-12 株式会社村田制作所 谐振子和谐振装置
WO2020261630A1 (ja) * 2019-06-26 2020-12-30 株式会社村田製作所 共振装置

Also Published As

Publication number Publication date
JPWO2023112380A1 (https=) 2023-06-22
WO2023112380A1 (ja) 2023-06-22
JP7708213B2 (ja) 2025-07-15
US20240333249A1 (en) 2024-10-03

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