JP7636369B2 - 搬送ロボットおよびロボットシステム - Google Patents

搬送ロボットおよびロボットシステム Download PDF

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Publication number
JP7636369B2
JP7636369B2 JP2022087041A JP2022087041A JP7636369B2 JP 7636369 B2 JP7636369 B2 JP 7636369B2 JP 2022087041 A JP2022087041 A JP 2022087041A JP 2022087041 A JP2022087041 A JP 2022087041A JP 7636369 B2 JP7636369 B2 JP 7636369B2
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JP
Japan
Prior art keywords
motor
hand drive
arm
hand
drive motors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022087041A
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English (en)
Japanese (ja)
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JP2023174279A (ja
Inventor
泰樹 實政
亮介 渡邉
修 原田
修 小宮路
正伸 柿原
祐規 本田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2022087041A priority Critical patent/JP7636369B2/ja
Priority to KR1020230050641A priority patent/KR102869228B1/ko
Priority to US18/199,649 priority patent/US12304067B2/en
Priority to CN202310591697.3A priority patent/CN117124355A/zh
Priority to TW114119029A priority patent/TWI906182B/zh
Priority to TW112119765A priority patent/TWI887663B/zh
Publication of JP2023174279A publication Critical patent/JP2023174279A/ja
Priority to JP2025020494A priority patent/JP2025067944A/ja
Application granted granted Critical
Publication of JP7636369B2 publication Critical patent/JP7636369B2/ja
Priority to KR1020250142594A priority patent/KR20250152037A/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • H10P72/3302—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/088—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0025—Means for supplying energy to the end effector
    • B25J19/0029—Means for supplying energy to the end effector arranged within the different robot elements
    • B25J19/0041—Means for supplying energy to the end effector arranged within the different robot elements having rotary connection means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1602—Programme controls characterised by the control system, structure, architecture
    • B25J9/161—Hardware, e.g. neural networks, fuzzy logic, interfaces, processor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1679—Programme controls characterised by the tasks executed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1679—Programme controls characterised by the tasks executed
    • B25J9/1682—Dual arm manipulator; Coordination of several manipulators
    • H10P72/7602—

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Automation & Control Theory (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • Fuzzy Systems (AREA)
  • Evolutionary Computation (AREA)
  • Artificial Intelligence (AREA)
  • Manipulator (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Die Bonding (AREA)
JP2022087041A 2022-05-27 2022-05-27 搬送ロボットおよびロボットシステム Active JP7636369B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2022087041A JP7636369B2 (ja) 2022-05-27 2022-05-27 搬送ロボットおよびロボットシステム
KR1020230050641A KR102869228B1 (ko) 2022-05-27 2023-04-18 반송 로봇 및 로봇 시스템
US18/199,649 US12304067B2 (en) 2022-05-27 2023-05-19 Transfer robot and robot system
CN202310591697.3A CN117124355A (zh) 2022-05-27 2023-05-24 搬运机器人以及机器人系统
TW114119029A TWI906182B (zh) 2022-05-27 2023-05-26 搬運機器人
TW112119765A TWI887663B (zh) 2022-05-27 2023-05-26 搬運機器人以及機器人系統
JP2025020494A JP2025067944A (ja) 2022-05-27 2025-02-12 搬送ロボットおよびロボットシステム
KR1020250142594A KR20250152037A (ko) 2022-05-27 2025-09-30 반송 로봇 및 로봇 시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022087041A JP7636369B2 (ja) 2022-05-27 2022-05-27 搬送ロボットおよびロボットシステム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025020494A Division JP2025067944A (ja) 2022-05-27 2025-02-12 搬送ロボットおよびロボットシステム

Publications (2)

Publication Number Publication Date
JP2023174279A JP2023174279A (ja) 2023-12-07
JP7636369B2 true JP7636369B2 (ja) 2025-02-26

Family

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Family Applications (2)

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JP2022087041A Active JP7636369B2 (ja) 2022-05-27 2022-05-27 搬送ロボットおよびロボットシステム
JP2025020494A Pending JP2025067944A (ja) 2022-05-27 2025-02-12 搬送ロボットおよびロボットシステム

Family Applications After (1)

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JP2025020494A Pending JP2025067944A (ja) 2022-05-27 2025-02-12 搬送ロボットおよびロボットシステム

Country Status (5)

Country Link
US (1) US12304067B2 (enExample)
JP (2) JP7636369B2 (enExample)
KR (2) KR102869228B1 (enExample)
CN (1) CN117124355A (enExample)
TW (1) TWI887663B (enExample)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001347477A (ja) 2000-06-08 2001-12-18 Sanyo Denki Co Ltd 搬送用ロボット
JP2003170384A (ja) 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
JP2014520681A (ja) 2011-07-13 2014-08-25 ブルックス オートメーション インコーポレイテッド 小型ダイレクトドライブ式スピンドル
JP2016162936A (ja) 2015-03-03 2016-09-05 川崎重工業株式会社 基板搬送ロボットおよび基板処理システム
JP2017505994A (ja) 2014-01-28 2017-02-23 ブルックス オートメーション インコーポレイテッド 基板搬送装置
US20200230819A1 (en) 2019-01-21 2020-07-23 Tokyo Electron Limited Transfer apparatus
KR102166829B1 (ko) 2019-07-24 2020-10-16 (주)이지원인터넷서비스 적층형 구동모듈

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JP2750771B2 (ja) * 1990-03-28 1998-05-13 日本真空技術株式会社 多関節搬送装置
JPH1133947A (ja) * 1997-07-23 1999-02-09 Kokusai Electric Co Ltd ２軸回転駆動装置
JP4456725B2 (ja) * 2000-05-24 2010-04-28 株式会社ダイヘン 搬送装置
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
JP4227298B2 (ja) * 1999-12-02 2009-02-18 ローツェ株式会社 搬送用ロボット
AU2002327249A1 (en) * 2001-07-13 2003-01-29 Brooks Automation, Inc. Substrate transport apparatus with multiple independent end effectors
JP2007016847A (ja) * 2005-07-06 2007-01-25 Ntn Corp インホイールモータの軸受装置
US8573919B2 (en) * 2005-07-11 2013-11-05 Brooks Automation, Inc. Substrate transport apparatus
US9202733B2 (en) 2011-11-07 2015-12-01 Persimmon Technologies Corporation Robot system with independent arms
JP2013158849A (ja) * 2012-02-01 2013-08-19 Yaskawa Electric Corp ロボット
JP5729319B2 (ja) * 2012-02-01 2015-06-03 株式会社安川電機 ロボット
KR101400241B1 (ko) * 2012-07-13 2014-05-28 주식회사 아모텍 고정 마그넷을 갖는 액시얼 갭형 모터
WO2014085483A1 (en) * 2012-11-30 2014-06-05 Applied Materials, Inc Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods
US10780586B2 (en) * 2013-08-09 2020-09-22 Nidec Sankyo Corporation Horizontal articulated robot with bevel gears
US10381257B2 (en) * 2015-08-31 2019-08-13 Kawasaki Jukogyo Kabushiki Kaisha Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction
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JP7078479B2 (ja) 2018-07-13 2022-05-31 株式会社安川電機 搬送ロボットおよびロボットシステム
US10391640B1 (en) * 2018-09-11 2019-08-27 Kawasaki Jukogyo Kabushiki Kaisha Robot
JP7349894B2 (ja) * 2019-12-13 2023-09-25 住友重機械工業株式会社 駆動装置
JP2021158751A (ja) 2020-03-26 2021-10-07 セイコーエプソン株式会社 ロボット及びロボットシステム
JP2022069822A (ja) * 2020-10-26 2022-05-12 セイコーエプソン株式会社 モーター及びロボット

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001347477A (ja) 2000-06-08 2001-12-18 Sanyo Denki Co Ltd 搬送用ロボット
JP2003170384A (ja) 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
JP2014520681A (ja) 2011-07-13 2014-08-25 ブルックス オートメーション インコーポレイテッド 小型ダイレクトドライブ式スピンドル
JP2017505994A (ja) 2014-01-28 2017-02-23 ブルックス オートメーション インコーポレイテッド 基板搬送装置
JP2016162936A (ja) 2015-03-03 2016-09-05 川崎重工業株式会社 基板搬送ロボットおよび基板処理システム
US20200230819A1 (en) 2019-01-21 2020-07-23 Tokyo Electron Limited Transfer apparatus
KR102166829B1 (ko) 2019-07-24 2020-10-16 (주)이지원인터넷서비스 적층형 구동모듈

Also Published As

Publication number Publication date
KR20230165698A (ko) 2023-12-05
US12304067B2 (en) 2025-05-20
CN117124355A (zh) 2023-11-28
US20230381948A1 (en) 2023-11-30
JP2023174279A (ja) 2023-12-07
KR102869228B1 (ko) 2025-10-14
KR20250152037A (ko) 2025-10-22
TW202346040A (zh) 2023-12-01
TW202533925A (zh) 2025-09-01
JP2025067944A (ja) 2025-04-24
TWI887663B (zh) 2025-06-21

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