KR102869228B1 - 반송 로봇 및 로봇 시스템 - Google Patents

반송 로봇 및 로봇 시스템

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Publication number
KR102869228B1
KR102869228B1 KR1020230050641A KR20230050641A KR102869228B1 KR 102869228 B1 KR102869228 B1 KR 102869228B1 KR 1020230050641 A KR1020230050641 A KR 1020230050641A KR 20230050641 A KR20230050641 A KR 20230050641A KR 102869228 B1 KR102869228 B1 KR 102869228B1
Authority
KR
South Korea
Prior art keywords
motor
arm
hand
hand drive
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020230050641A
Other languages
English (en)
Korean (ko)
Other versions
KR20230165698A (ko
Inventor
히로키 사네마사
료스케 와타나베
오사무 하라다
오사무 고미야지
마사노부 가키하라
유키 혼다
Original Assignee
가부시키가이샤 야스카와덴키
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 야스카와덴키 filed Critical 가부시키가이샤 야스카와덴키
Publication of KR20230165698A publication Critical patent/KR20230165698A/ko
Priority to KR1020250142594A priority Critical patent/KR20250152037A/ko
Application granted granted Critical
Publication of KR102869228B1 publication Critical patent/KR102869228B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • H10P72/3302—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/088—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0025—Means for supplying energy to the end effector
    • B25J19/0029—Means for supplying energy to the end effector arranged within the different robot elements
    • B25J19/0041—Means for supplying energy to the end effector arranged within the different robot elements having rotary connection means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • B25J9/126—Rotary actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1602—Programme controls characterised by the control system, structure, architecture
    • B25J9/161—Hardware, e.g. neural networks, fuzzy logic, interfaces, processor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1679—Programme controls characterised by the tasks executed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1679—Programme controls characterised by the tasks executed
    • B25J9/1682—Dual arm manipulator; Coordination of several manipulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • H10P72/7602—

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Automation & Control Theory (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • Fuzzy Systems (AREA)
  • Evolutionary Computation (AREA)
  • Artificial Intelligence (AREA)
  • Manipulator (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Die Bonding (AREA)
KR1020230050641A 2022-05-27 2023-04-18 반송 로봇 및 로봇 시스템 Active KR102869228B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020250142594A KR20250152037A (ko) 2022-05-27 2025-09-30 반송 로봇 및 로봇 시스템

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022087041A JP7636369B2 (ja) 2022-05-27 2022-05-27 搬送ロボットおよびロボットシステム
JPJP-P-2022-087041 2022-05-27

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020250142594A Division KR20250152037A (ko) 2022-05-27 2025-09-30 반송 로봇 및 로봇 시스템

Publications (2)

Publication Number Publication Date
KR20230165698A KR20230165698A (ko) 2023-12-05
KR102869228B1 true KR102869228B1 (ko) 2025-10-14

Family

ID=88857109

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020230050641A Active KR102869228B1 (ko) 2022-05-27 2023-04-18 반송 로봇 및 로봇 시스템
KR1020250142594A Pending KR20250152037A (ko) 2022-05-27 2025-09-30 반송 로봇 및 로봇 시스템

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020250142594A Pending KR20250152037A (ko) 2022-05-27 2025-09-30 반송 로봇 및 로봇 시스템

Country Status (5)

Country Link
US (1) US12304067B2 (enExample)
JP (2) JP7636369B2 (enExample)
KR (2) KR102869228B1 (enExample)
CN (1) CN117124355A (enExample)
TW (1) TWI887663B (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001347477A (ja) * 2000-06-08 2001-12-18 Sanyo Denki Co Ltd 搬送用ロボット
KR102166829B1 (ko) * 2019-07-24 2020-10-16 (주)이지원인터넷서비스 적층형 구동모듈

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JP2750771B2 (ja) * 1990-03-28 1998-05-13 日本真空技術株式会社 多関節搬送装置
JPH1133947A (ja) * 1997-07-23 1999-02-09 Kokusai Electric Co Ltd ２軸回転駆動装置
JP4456725B2 (ja) * 2000-05-24 2010-04-28 株式会社ダイヘン 搬送装置
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
JP4227298B2 (ja) * 1999-12-02 2009-02-18 ローツェ株式会社 搬送用ロボット
AU2002327249A1 (en) * 2001-07-13 2003-01-29 Brooks Automation, Inc. Substrate transport apparatus with multiple independent end effectors
JP2003170384A (ja) 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
JP2007016847A (ja) * 2005-07-06 2007-01-25 Ntn Corp インホイールモータの軸受装置
US8573919B2 (en) * 2005-07-11 2013-11-05 Brooks Automation, Inc. Substrate transport apparatus
US9186799B2 (en) 2011-07-13 2015-11-17 Brooks Automation, Inc. Compact direct drive spindle
US9202733B2 (en) 2011-11-07 2015-12-01 Persimmon Technologies Corporation Robot system with independent arms
JP2013158849A (ja) * 2012-02-01 2013-08-19 Yaskawa Electric Corp ロボット
JP5729319B2 (ja) * 2012-02-01 2015-06-03 株式会社安川電機 ロボット
KR101400241B1 (ko) * 2012-07-13 2014-05-28 주식회사 아모텍 고정 마그넷을 갖는 액시얼 갭형 모터
WO2014085483A1 (en) * 2012-11-30 2014-06-05 Applied Materials, Inc Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods
US10780586B2 (en) * 2013-08-09 2020-09-22 Nidec Sankyo Corporation Horizontal articulated robot with bevel gears
JP6705750B2 (ja) 2014-01-28 2020-06-03 ブルックス オートメーション インコーポレイテッド 基板搬送装置
JP6559976B2 (ja) 2015-03-03 2019-08-14 川崎重工業株式会社 基板搬送ロボットおよび基板処理システム
US10381257B2 (en) * 2015-08-31 2019-08-13 Kawasaki Jukogyo Kabushiki Kaisha Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction
US10421196B2 (en) * 2017-07-26 2019-09-24 Daihen Corporation Transfer apparatus
JP7078479B2 (ja) 2018-07-13 2022-05-31 株式会社安川電機 搬送ロボットおよびロボットシステム
US10391640B1 (en) * 2018-09-11 2019-08-27 Kawasaki Jukogyo Kabushiki Kaisha Robot
JP7202902B2 (ja) 2019-01-21 2023-01-12 東京エレクトロン株式会社 搬送装置
JP7349894B2 (ja) * 2019-12-13 2023-09-25 住友重機械工業株式会社 駆動装置
JP2021158751A (ja) 2020-03-26 2021-10-07 セイコーエプソン株式会社 ロボット及びロボットシステム
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001347477A (ja) * 2000-06-08 2001-12-18 Sanyo Denki Co Ltd 搬送用ロボット
KR102166829B1 (ko) * 2019-07-24 2020-10-16 (주)이지원인터넷서비스 적층형 구동모듈

Also Published As

Publication number Publication date
KR20230165698A (ko) 2023-12-05
US12304067B2 (en) 2025-05-20
CN117124355A (zh) 2023-11-28
US20230381948A1 (en) 2023-11-30
JP2023174279A (ja) 2023-12-07
KR20250152037A (ko) 2025-10-22
TW202346040A (zh) 2023-12-01
TW202533925A (zh) 2025-09-01
JP2025067944A (ja) 2025-04-24
JP7636369B2 (ja) 2025-02-26
TWI887663B (zh) 2025-06-21

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