JP7576158B2 - 波面収差導出方法 - Google Patents

波面収差導出方法 Download PDF

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Publication number
JP7576158B2
JP7576158B2 JP2023510246A JP2023510246A JP7576158B2 JP 7576158 B2 JP7576158 B2 JP 7576158B2 JP 2023510246 A JP2023510246 A JP 2023510246A JP 2023510246 A JP2023510246 A JP 2023510246A JP 7576158 B2 JP7576158 B2 JP 7576158B2
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wavefront aberration
lens
optical system
machine learning
learning model
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JPWO2022209056A1 (https=
JPWO2022209056A5 (https=
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洋平 早川
守 西谷
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Fujifilm Corp
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Fujifilm Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Software Systems (AREA)
  • Theoretical Computer Science (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Data Mining & Analysis (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Mathematical Physics (AREA)
  • Artificial Intelligence (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP2023510246A 2021-03-31 2021-12-20 波面収差導出方法 Active JP7576158B2 (ja)

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Application Number Priority Date Filing Date Title
JP2021061084 2021-03-31
JP2021061084 2021-03-31
PCT/JP2021/047044 WO2022209056A1 (ja) 2021-03-31 2021-12-20 波面収差導出方法、機械学習モデルの生成方法、レンズ光学系の製造方法、波面収差導出装置、及び波面収差導出プログラム

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JPWO2022209056A1 JPWO2022209056A1 (https=) 2022-10-06
JPWO2022209056A5 JPWO2022209056A5 (https=) 2023-11-22
JP7576158B2 true JP7576158B2 (ja) 2024-10-30

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JP (1) JP7576158B2 (https=)
CN (1) CN116964425A (https=)
WO (1) WO2022209056A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3134179B1 (fr) * 2022-04-01 2025-07-18 Fogale Nanotech Procédé et système de caractérisation d’un objectif optique pour la correction d’aberrations optiques introduites par ledit objectif optique dans une image.
CN118075590B (zh) * 2024-03-22 2024-11-29 四川大学 一种基于多虚拟透镜的消色差扩景深成像系统及成像方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000107129A (ja) 1998-10-09 2000-04-18 Hoya Corp 眼光学系のシミュレーション方法及び装置
JP2004132858A (ja) 2002-10-11 2004-04-30 Canon Inc 光学系の光学性能を測定する装置及び方法
JP2007033168A (ja) 2005-07-26 2007-02-08 Tochigi Nikon Corp レンズ検査方法およびレンズ検査装置
JP2012185089A (ja) 2011-03-07 2012-09-27 Nikon Corp 計測方法、及び計測装置
JP2012220200A (ja) 2011-04-04 2012-11-12 Canon Inc 光学特性測定装置
JP2020060469A (ja) 2018-10-11 2020-04-16 キヤノン株式会社 収差推定方法、収差推定装置、プログラムおよび記憶媒体
WO2020158325A1 (ja) 2019-01-31 2020-08-06 富士フイルム株式会社 光学部材の位置調整支援装置、光学部材の位置調整支援方法、光学部材の位置調整支援プログラム、レンズ装置の製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003075295A (ja) * 2001-09-03 2003-03-12 Seiko Epson Corp レンズの評価方法およびレンズ評価装置
CN105283118B (zh) * 2013-06-10 2018-01-02 埃西勒国际通用光学公司 用于确定待测试光学系统的波前像差数据的方法
JP2019191121A (ja) * 2018-04-27 2019-10-31 キヤノン株式会社 計測方法、調整方法及び光学系の製造方法
WO2020002143A1 (en) * 2018-06-25 2020-01-02 Asml Netherlands B.V. Wavefront optimization for tuning scanner based on performance matching
JP2021060353A (ja) * 2019-10-09 2021-04-15 キヤノン株式会社 光学系の内部誤差の推定方法および計測装置
JP2021196230A (ja) * 2020-06-11 2021-12-27 キヤノン株式会社 光学特性取得方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000107129A (ja) 1998-10-09 2000-04-18 Hoya Corp 眼光学系のシミュレーション方法及び装置
JP2004132858A (ja) 2002-10-11 2004-04-30 Canon Inc 光学系の光学性能を測定する装置及び方法
JP2007033168A (ja) 2005-07-26 2007-02-08 Tochigi Nikon Corp レンズ検査方法およびレンズ検査装置
JP2012185089A (ja) 2011-03-07 2012-09-27 Nikon Corp 計測方法、及び計測装置
JP2012220200A (ja) 2011-04-04 2012-11-12 Canon Inc 光学特性測定装置
JP2020060469A (ja) 2018-10-11 2020-04-16 キヤノン株式会社 収差推定方法、収差推定装置、プログラムおよび記憶媒体
WO2020158325A1 (ja) 2019-01-31 2020-08-06 富士フイルム株式会社 光学部材の位置調整支援装置、光学部材の位置調整支援方法、光学部材の位置調整支援プログラム、レンズ装置の製造方法

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CN116964425A (zh) 2023-10-27
JPWO2022209056A1 (https=) 2022-10-06

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