CN116964425A - 波前像差导出方法、机器学习模型的生成方法、透镜光学系统的制造方法、波前像差导出装置及波前像差导出程序 - Google Patents

波前像差导出方法、机器学习模型的生成方法、透镜光学系统的制造方法、波前像差导出装置及波前像差导出程序 Download PDF

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Publication number
CN116964425A
CN116964425A CN202180095463.9A CN202180095463A CN116964425A CN 116964425 A CN116964425 A CN 116964425A CN 202180095463 A CN202180095463 A CN 202180095463A CN 116964425 A CN116964425 A CN 116964425A
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wavefront aberration
machine learning
learning model
resolution performance
optical system
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Chinese (zh)
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早川洋平
西谷守
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Fujifilm Corp
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Fujifilm Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00Optical objectives specially designed for the purposes specified below
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00Machine learning

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Software Systems (AREA)
  • Theoretical Computer Science (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Data Mining & Analysis (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Mathematical Physics (AREA)
  • Artificial Intelligence (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
CN202180095463.9A 2021-03-31 2021-12-20 波前像差导出方法、机器学习模型的生成方法、透镜光学系统的制造方法、波前像差导出装置及波前像差导出程序 Pending CN116964425A (zh)

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JP2021061084 2021-03-31
JP2021-061084 2021-03-31
PCT/JP2021/047044 WO2022209056A1 (ja) 2021-03-31 2021-12-20 波面収差導出方法、機械学習モデルの生成方法、レンズ光学系の製造方法、波面収差導出装置、及び波面収差導出プログラム

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FR3134179B1 (fr) * 2022-04-01 2025-07-18 Fogale Nanotech Procédé et système de caractérisation d’un objectif optique pour la correction d’aberrations optiques introduites par ledit objectif optique dans une image.
CN118075590B (zh) * 2024-03-22 2024-11-29 四川大学 一种基于多虚拟透镜的消色差扩景深成像系统及成像方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004132858A (ja) * 2002-10-11 2004-04-30 Canon Inc 光学系の光学性能を測定する装置及び方法
US20160135678A1 (en) * 2013-06-10 2016-05-19 Essilor International (Compagnie Generale D'optique) Method For Determining Wave-Front Aberration Data Of A To-Be-Tested Optical System
US20200116589A1 (en) * 2018-10-11 2020-04-16 Canon Kabushiki Kaisha Aberration estimating method, aberration estimating apparatus, and storage medium
CN112313581A (zh) * 2018-06-25 2021-02-02 Asml荷兰有限公司 基于性能匹配的调谐扫描器的波前优化

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3342423B2 (ja) * 1998-10-09 2002-11-11 ホーヤ株式会社 眼光学系のシミュレーション装置
JP2003075295A (ja) * 2001-09-03 2003-03-12 Seiko Epson Corp レンズの評価方法およびレンズ評価装置
JP2007033168A (ja) * 2005-07-26 2007-02-08 Tochigi Nikon Corp レンズ検査方法およびレンズ検査装置
JP2012185089A (ja) * 2011-03-07 2012-09-27 Nikon Corp 計測方法、及び計測装置
JP5759232B2 (ja) * 2011-04-04 2015-08-05 キヤノン株式会社 測定装置
JP2019191121A (ja) * 2018-04-27 2019-10-31 キヤノン株式会社 計測方法、調整方法及び光学系の製造方法
JP7059406B2 (ja) * 2019-01-31 2022-04-25 富士フイルム株式会社 光学部材の位置調整支援装置、光学部材の位置調整支援方法、光学部材の位置調整支援プログラム、レンズ装置の製造方法
JP2021060353A (ja) * 2019-10-09 2021-04-15 キヤノン株式会社 光学系の内部誤差の推定方法および計測装置
JP2021196230A (ja) * 2020-06-11 2021-12-27 キヤノン株式会社 光学特性取得方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004132858A (ja) * 2002-10-11 2004-04-30 Canon Inc 光学系の光学性能を測定する装置及び方法
US20160135678A1 (en) * 2013-06-10 2016-05-19 Essilor International (Compagnie Generale D'optique) Method For Determining Wave-Front Aberration Data Of A To-Be-Tested Optical System
CN112313581A (zh) * 2018-06-25 2021-02-02 Asml荷兰有限公司 基于性能匹配的调谐扫描器的波前优化
US20200116589A1 (en) * 2018-10-11 2020-04-16 Canon Kabushiki Kaisha Aberration estimating method, aberration estimating apparatus, and storage medium

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