JP7569202B2 - 部分めっき用マスク、そのマスクを用いた絶縁回路基板の製造方法および部分めっき方法 - Google Patents

部分めっき用マスク、そのマスクを用いた絶縁回路基板の製造方法および部分めっき方法 Download PDF

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Publication number
JP7569202B2
JP7569202B2 JP2020184591A JP2020184591A JP7569202B2 JP 7569202 B2 JP7569202 B2 JP 7569202B2 JP 2020184591 A JP2020184591 A JP 2020184591A JP 2020184591 A JP2020184591 A JP 2020184591A JP 7569202 B2 JP7569202 B2 JP 7569202B2
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JP
Japan
Prior art keywords
plating
metal
mask
sheet member
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020184591A
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English (en)
Japanese (ja)
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JP2022074500A5 (https=
JP2022074500A (ja
Inventor
正昭 肥後
悟 井手口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dowa Metaltech Co Ltd
Original Assignee
Dowa Metaltech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dowa Metaltech Co Ltd filed Critical Dowa Metaltech Co Ltd
Priority to JP2020184591A priority Critical patent/JP7569202B2/ja
Priority to KR1020210132804A priority patent/KR20220060474A/ko
Priority to EP21205068.6A priority patent/EP3995606A1/en
Priority to US17/511,638 priority patent/US11761108B2/en
Priority to CN202111253617.0A priority patent/CN114438561A/zh
Publication of JP2022074500A publication Critical patent/JP2022074500A/ja
Publication of JP2022074500A5 publication Critical patent/JP2022074500A5/ja
Application granted granted Critical
Publication of JP7569202B2 publication Critical patent/JP7569202B2/ja
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C25D5/022—Electroplating of selected surface areas using masking means
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/12—Semiconductors
    • C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203—Cooling of mounted components
    • H05K1/0209—External configuration of printed circuit board adapted for heat dissipation, e.g. lay-out of conductors, coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/188—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by direct electroplating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing of the conductive pattern
    • H05K3/243—Reinforcing of the conductive pattern characterised by selective plating, e.g. for finish plating of pads
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0548—Masks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703—Plating
    • H05K2203/0723—Electroplating, e.g. finish plating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing of the conductive pattern
    • H05K3/241—Reinforcing of the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP2020184591A 2020-11-04 2020-11-04 部分めっき用マスク、そのマスクを用いた絶縁回路基板の製造方法および部分めっき方法 Active JP7569202B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2020184591A JP7569202B2 (ja) 2020-11-04 2020-11-04 部分めっき用マスク、そのマスクを用いた絶縁回路基板の製造方法および部分めっき方法
KR1020210132804A KR20220060474A (ko) 2020-11-04 2021-10-07 부분 도금용 마스크, 그 마스크를 사용한 절연 회로 기판의 제조 방법 및 부분 도금 방법
EP21205068.6A EP3995606A1 (en) 2020-11-04 2021-10-27 Mask for partial plating, and method for producing insulated circuit board and partial plating method using the mask
US17/511,638 US11761108B2 (en) 2020-11-04 2021-10-27 Method for producing insulated circuit board using a mask and partial plating method using the mask
CN202111253617.0A CN114438561A (zh) 2020-11-04 2021-10-27 部分镀敷用掩模、使用该掩模的绝缘电路基板的制造方法以及部分镀敷方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020184591A JP7569202B2 (ja) 2020-11-04 2020-11-04 部分めっき用マスク、そのマスクを用いた絶縁回路基板の製造方法および部分めっき方法

Publications (3)

Publication Number Publication Date
JP2022074500A JP2022074500A (ja) 2022-05-18
JP2022074500A5 JP2022074500A5 (https=) 2023-09-12
JP7569202B2 true JP7569202B2 (ja) 2024-10-17

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JP2020184591A Active JP7569202B2 (ja) 2020-11-04 2020-11-04 部分めっき用マスク、そのマスクを用いた絶縁回路基板の製造方法および部分めっき方法

Country Status (5)

Country Link
US (1) US11761108B2 (https=)
EP (1) EP3995606A1 (https=)
JP (1) JP7569202B2 (https=)
KR (1) KR20220060474A (https=)
CN (1) CN114438561A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025018659A (ja) * 2023-07-27 2025-02-06 トヨタ自動車株式会社 マスキング材およびこれを用いた金属皮膜の成膜装置
JP2025078514A (ja) * 2023-11-08 2025-05-20 トヨタ自動車株式会社 金属皮膜の成膜装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002115092A (ja) 2000-10-06 2002-04-19 Yamamoto Mekki Shikenki:Kk 電気めっき試験器の陰極カートリッジおよび陽極カートリッジ
JP2004250762A (ja) 2003-02-21 2004-09-09 Dowa Mining Co Ltd 金属セラミック複合部材に対するメッキ方法、パターン製造成方法、および湿式処理装置、並びにパワーモジュール用金属セラミックス複合部材
JP2014196540A (ja) 2013-03-29 2014-10-16 Ｄｏｗａメタルテック株式会社 電気めっき方法およびそれに用いるマスク部材
US20170253988A1 (en) 2016-03-01 2017-09-07 The Boeing Company Electromodification of Conductive Surfaces

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62243791A (ja) * 1986-04-15 1987-10-24 Matsushita Electric Ind Co Ltd 電解めつき層の選択的形成方法
JP4390491B2 (ja) * 2003-07-25 2009-12-24 株式会社フジクラ めっきレジスト用ドライフィルムおよびプリント基板の回路形成方法
JP4923224B2 (ja) * 2007-10-01 2012-04-25 Ｄｏｗａメタルテック株式会社 金属セラミック複合部材に対するメッキ方法、および金属セラミック複合部材に対するパターン製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002115092A (ja) 2000-10-06 2002-04-19 Yamamoto Mekki Shikenki:Kk 電気めっき試験器の陰極カートリッジおよび陽極カートリッジ
JP2004250762A (ja) 2003-02-21 2004-09-09 Dowa Mining Co Ltd 金属セラミック複合部材に対するメッキ方法、パターン製造成方法、および湿式処理装置、並びにパワーモジュール用金属セラミックス複合部材
JP2014196540A (ja) 2013-03-29 2014-10-16 Ｄｏｗａメタルテック株式会社 電気めっき方法およびそれに用いるマスク部材
US20170253988A1 (en) 2016-03-01 2017-09-07 The Boeing Company Electromodification of Conductive Surfaces

Also Published As

Publication number Publication date
KR20220060474A (ko) 2022-05-11
US20220136126A1 (en) 2022-05-05
JP2022074500A (ja) 2022-05-18
US11761108B2 (en) 2023-09-19
EP3995606A1 (en) 2022-05-11
CN114438561A (zh) 2022-05-06

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