JP7555870B2 - 真空ポンプ装置 - Google Patents

真空ポンプ装置 Download PDF

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Publication number
JP7555870B2
JP7555870B2 JP2021054585A JP2021054585A JP7555870B2 JP 7555870 B2 JP7555870 B2 JP 7555870B2 JP 2021054585 A JP2021054585 A JP 2021054585A JP 2021054585 A JP2021054585 A JP 2021054585A JP 7555870 B2 JP7555870 B2 JP 7555870B2
Authority
JP
Japan
Prior art keywords
wall portion
heater
side cover
vacuum pump
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021054585A
Other languages
English (en)
Japanese (ja)
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JP2022151996A (ja
JP2022151996A5 (de
Inventor
韋 張
一磨 伊東
一記 木本
秀夫 荒井
貴大 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2021054585A priority Critical patent/JP7555870B2/ja
Priority to CN202210304826.1A priority patent/CN115143114A/zh
Priority to KR1020220035782A priority patent/KR20220136156A/ko
Priority to TW111110862A priority patent/TW202244392A/zh
Priority to EP22164110.3A priority patent/EP4067658B1/de
Publication of JP2022151996A publication Critical patent/JP2022151996A/ja
Publication of JP2022151996A5 publication Critical patent/JP2022151996A5/ja
Application granted granted Critical
Publication of JP7555870B2 publication Critical patent/JP7555870B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082Details specially related to intermeshing engagement type pumps
    • F04C18/084Toothed wheels
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085Prime movers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/10Stators
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/20Rotors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/30Casings or housings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/40Electric motor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/60Shafts
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05BINDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00Working fluid
    • F05B2210/10Kind or type
    • F05B2210/12Kind or type gaseous, i.e. compressible
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05BINDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2240/00Components
    • F05B2240/10Stators
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05BINDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2240/00Components
    • F05B2240/20Rotors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05BINDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2240/00Components
    • F05B2240/60Shafts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
JP2021054585A 2021-03-29 2021-03-29 真空ポンプ装置 Active JP7555870B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2021054585A JP7555870B2 (ja) 2021-03-29 2021-03-29 真空ポンプ装置
CN202210304826.1A CN115143114A (zh) 2021-03-29 2022-03-23 真空泵装置
KR1020220035782A KR20220136156A (ko) 2021-03-29 2022-03-23 진공 펌프 장치
TW111110862A TW202244392A (zh) 2021-03-29 2022-03-23 真空泵裝置
EP22164110.3A EP4067658B1 (de) 2021-03-29 2022-03-24 Vakuumpumpengerät

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021054585A JP7555870B2 (ja) 2021-03-29 2021-03-29 真空ポンプ装置

Publications (3)

Publication Number Publication Date
JP2022151996A JP2022151996A (ja) 2022-10-12
JP2022151996A5 JP2022151996A5 (de) 2023-10-18
JP7555870B2 true JP7555870B2 (ja) 2024-09-25

Family

ID=81748387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021054585A Active JP7555870B2 (ja) 2021-03-29 2021-03-29 真空ポンプ装置

Country Status (5)

Country Link
EP (1) EP4067658B1 (de)
JP (1) JP7555870B2 (de)
KR (1) KR20220136156A (de)
CN (1) CN115143114A (de)
TW (1) TW202244392A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2630629B (en) * 2023-06-01 2025-07-02 Edwards Ltd Vacuum pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004293434A (ja) 2003-03-27 2004-10-21 Aisin Seiki Co Ltd ドライポンプ
JP2007262906A (ja) 2006-03-27 2007-10-11 Nabtesco Corp 2段式真空ポンプ
JP2008069666A (ja) 2006-09-12 2008-03-27 Toyota Industries Corp 真空ポンプの運転停止制御方法及び運転停止制御装置
JP2009092042A (ja) 2007-10-11 2009-04-30 Nabtesco Corp 回転ロータ式ポンプの軸受保護機構
WO2020255300A1 (ja) 2019-06-19 2020-12-24 樫山工業株式会社 真空ポンプ

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JPS52121810U (de) 1976-03-13 1977-09-16
JPS5745418Y2 (de) * 1976-12-08 1982-10-06
JPS5884400U (ja) 1981-12-04 1983-06-08 三菱重工業株式会社 拡散型ポンプ
JPH0342091U (de) 1989-09-01 1991-04-22
JP2565468Y2 (ja) * 1993-12-20 1998-03-18 オリオン機械株式会社 無給油式回転ベーンポンプ
DE19702456B4 (de) 1997-01-24 2006-01-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
US6164945A (en) 1998-02-13 2000-12-26 Ebara Corporation Vacuum pump rotor and method of manufacturing the same
JP3831113B2 (ja) 1998-03-31 2006-10-11 大晃機械工業株式会社 真空ポンプ
JP4017365B2 (ja) 2001-07-19 2007-12-05 株式会社荏原製作所 ドライ真空ポンプ
DE10212940A1 (de) 2002-03-22 2003-10-02 Leybold Vakuum Gmbh Exzenterpumpe und Verfahren zum Betrieb dieser Pumpe
DE20216504U1 (de) 2002-10-25 2003-03-06 Werner Rietschle GmbH + Co. KG, 79650 Schopfheim Verdrängermaschine mit gegensinnig laufenden Rotoren
EP1741931B1 (de) 2005-07-05 2008-04-16 Aerzener Maschinenfabrik GmbH Drehkolbenverdichter
JP2009052516A (ja) 2007-08-29 2009-03-12 Orion Mach Co Ltd 回転ベーンポンプ
JP5793004B2 (ja) 2011-06-02 2015-10-14 株式会社荏原製作所 真空ポンプ
JP2013253502A (ja) 2012-06-05 2013-12-19 Shimadzu Corp 真空ポンプ
DE102012213735A1 (de) 2012-08-02 2014-02-27 Robert Bosch Gmbh Pumpe, insbesondere Verdrängerpumpe
CN102852798B (zh) 2012-08-14 2015-05-20 杭州新安江工业泵有限公司 罗茨真空泵冷却系统
CN103671087B (zh) 2012-09-09 2016-06-08 王五一 带有旋移活塞结构的流体机械
CN203822629U (zh) 2014-02-28 2014-09-10 东莞市雅之雷德机电科技有限公司 一种带冷却装置的罗茨真空泵
CN204082556U (zh) 2014-09-10 2015-01-07 山东省章丘鼓风机股份有限公司 一种逆流冷却干式罗茨真空泵
JP6453070B2 (ja) 2014-12-18 2019-01-16 株式会社荏原製作所 ドライ真空ポンプ、およびドライ真空ポンプの製造方法
JP6340556B2 (ja) 2015-02-12 2018-06-13 オリオン機械株式会社 二軸回転ポンプ
KR101712962B1 (ko) 2015-09-24 2017-03-07 이인철 냉각장치를 갖춘 진공펌프
CN205478334U (zh) 2016-02-02 2016-08-17 常州市华东真空泵厂 一种液冷型罗茨真空泵
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GB201701833D0 (en) 2017-02-03 2017-03-22 Edwards Ltd Pump cooling systems
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CN107061284A (zh) 2017-04-11 2017-08-18 浙江神工真空设备制造有限公司 一种罗茨真空泵
CN110651124B (zh) 2017-08-07 2021-03-05 株式会社爱发科 真空泵
KR101915976B1 (ko) 2017-09-12 2018-11-07 한국원자력연구원 로터리 피스톤 펌프 및 그 구동 방법
CN207470428U (zh) 2017-11-27 2018-06-08 广东肯富来泵业股份有限公司 一种带有水冷隔层的罗茨泵
EP3499039B1 (de) 2017-12-15 2021-03-31 Pfeiffer Vacuum Gmbh Schraubenvakuumpumpe
JP6774106B2 (ja) 2018-10-17 2020-10-21 株式会社アンレット ルーツブロワ
JP7281388B2 (ja) * 2018-12-28 2023-05-25 株式会社荏原製作所 軸受装置および真空ポンプ装置
CN209370056U (zh) 2018-12-31 2019-09-10 浙江创为真空设备股份有限公司 一种气冷式直排罗茨泵

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004293434A (ja) 2003-03-27 2004-10-21 Aisin Seiki Co Ltd ドライポンプ
JP2007262906A (ja) 2006-03-27 2007-10-11 Nabtesco Corp 2段式真空ポンプ
JP2008069666A (ja) 2006-09-12 2008-03-27 Toyota Industries Corp 真空ポンプの運転停止制御方法及び運転停止制御装置
JP2009092042A (ja) 2007-10-11 2009-04-30 Nabtesco Corp 回転ロータ式ポンプの軸受保護機構
WO2020255300A1 (ja) 2019-06-19 2020-12-24 樫山工業株式会社 真空ポンプ

Also Published As

Publication number Publication date
EP4067658B1 (de) 2025-02-12
CN115143114A (zh) 2022-10-04
JP2022151996A (ja) 2022-10-12
TW202244392A (zh) 2022-11-16
KR20220136156A (ko) 2022-10-07
EP4067658A2 (de) 2022-10-05
EP4067658A3 (de) 2022-11-02

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