JP7555870B2 - 真空ポンプ装置 - Google Patents
真空ポンプ装置 Download PDFInfo
- Publication number
- JP7555870B2 JP7555870B2 JP2021054585A JP2021054585A JP7555870B2 JP 7555870 B2 JP7555870 B2 JP 7555870B2 JP 2021054585 A JP2021054585 A JP 2021054585A JP 2021054585 A JP2021054585 A JP 2021054585A JP 7555870 B2 JP7555870 B2 JP 7555870B2
- Authority
- JP
- Japan
- Prior art keywords
- wall portion
- heater
- side cover
- vacuum pump
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001816 cooling Methods 0.000 claims description 31
- 239000007789 gas Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 15
- 239000000110 cooling liquid Substances 0.000 description 8
- 239000006227 byproduct Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000002826 coolant Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 3
- 229910001018 Cast iron Inorganic materials 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005266 casting Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/084—Toothed wheels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
- F04C29/0085—Prime movers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/10—Stators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/30—Casings or housings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/60—Shafts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/12—Kind or type gaseous, i.e. compressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/10—Stators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/20—Rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/60—Shafts
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Rotary Pumps (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021054585A JP7555870B2 (ja) | 2021-03-29 | 2021-03-29 | 真空ポンプ装置 |
| CN202210304826.1A CN115143114A (zh) | 2021-03-29 | 2022-03-23 | 真空泵装置 |
| KR1020220035782A KR20220136156A (ko) | 2021-03-29 | 2022-03-23 | 진공 펌프 장치 |
| TW111110862A TW202244392A (zh) | 2021-03-29 | 2022-03-23 | 真空泵裝置 |
| EP22164110.3A EP4067658B1 (de) | 2021-03-29 | 2022-03-24 | Vakuumpumpengerät |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021054585A JP7555870B2 (ja) | 2021-03-29 | 2021-03-29 | 真空ポンプ装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022151996A JP2022151996A (ja) | 2022-10-12 |
| JP2022151996A5 JP2022151996A5 (de) | 2023-10-18 |
| JP7555870B2 true JP7555870B2 (ja) | 2024-09-25 |
Family
ID=81748387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021054585A Active JP7555870B2 (ja) | 2021-03-29 | 2021-03-29 | 真空ポンプ装置 |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP4067658B1 (de) |
| JP (1) | JP7555870B2 (de) |
| KR (1) | KR20220136156A (de) |
| CN (1) | CN115143114A (de) |
| TW (1) | TW202244392A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2630629B (en) * | 2023-06-01 | 2025-07-02 | Edwards Ltd | Vacuum pump |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004293434A (ja) | 2003-03-27 | 2004-10-21 | Aisin Seiki Co Ltd | ドライポンプ |
| JP2007262906A (ja) | 2006-03-27 | 2007-10-11 | Nabtesco Corp | 2段式真空ポンプ |
| JP2008069666A (ja) | 2006-09-12 | 2008-03-27 | Toyota Industries Corp | 真空ポンプの運転停止制御方法及び運転停止制御装置 |
| JP2009092042A (ja) | 2007-10-11 | 2009-04-30 | Nabtesco Corp | 回転ロータ式ポンプの軸受保護機構 |
| WO2020255300A1 (ja) | 2019-06-19 | 2020-12-24 | 樫山工業株式会社 | 真空ポンプ |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52121810U (de) | 1976-03-13 | 1977-09-16 | ||
| JPS5745418Y2 (de) * | 1976-12-08 | 1982-10-06 | ||
| JPS5884400U (ja) | 1981-12-04 | 1983-06-08 | 三菱重工業株式会社 | 拡散型ポンプ |
| JPH0342091U (de) | 1989-09-01 | 1991-04-22 | ||
| JP2565468Y2 (ja) * | 1993-12-20 | 1998-03-18 | オリオン機械株式会社 | 無給油式回転ベーンポンプ |
| DE19702456B4 (de) | 1997-01-24 | 2006-01-19 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
| US6164945A (en) | 1998-02-13 | 2000-12-26 | Ebara Corporation | Vacuum pump rotor and method of manufacturing the same |
| JP3831113B2 (ja) | 1998-03-31 | 2006-10-11 | 大晃機械工業株式会社 | 真空ポンプ |
| JP4017365B2 (ja) | 2001-07-19 | 2007-12-05 | 株式会社荏原製作所 | ドライ真空ポンプ |
| DE10212940A1 (de) | 2002-03-22 | 2003-10-02 | Leybold Vakuum Gmbh | Exzenterpumpe und Verfahren zum Betrieb dieser Pumpe |
| DE20216504U1 (de) | 2002-10-25 | 2003-03-06 | Werner Rietschle GmbH + Co. KG, 79650 Schopfheim | Verdrängermaschine mit gegensinnig laufenden Rotoren |
| EP1741931B1 (de) | 2005-07-05 | 2008-04-16 | Aerzener Maschinenfabrik GmbH | Drehkolbenverdichter |
| JP2009052516A (ja) | 2007-08-29 | 2009-03-12 | Orion Mach Co Ltd | 回転ベーンポンプ |
| JP5793004B2 (ja) | 2011-06-02 | 2015-10-14 | 株式会社荏原製作所 | 真空ポンプ |
| JP2013253502A (ja) | 2012-06-05 | 2013-12-19 | Shimadzu Corp | 真空ポンプ |
| DE102012213735A1 (de) | 2012-08-02 | 2014-02-27 | Robert Bosch Gmbh | Pumpe, insbesondere Verdrängerpumpe |
| CN102852798B (zh) | 2012-08-14 | 2015-05-20 | 杭州新安江工业泵有限公司 | 罗茨真空泵冷却系统 |
| CN103671087B (zh) | 2012-09-09 | 2016-06-08 | 王五一 | 带有旋移活塞结构的流体机械 |
| CN203822629U (zh) | 2014-02-28 | 2014-09-10 | 东莞市雅之雷德机电科技有限公司 | 一种带冷却装置的罗茨真空泵 |
| CN204082556U (zh) | 2014-09-10 | 2015-01-07 | 山东省章丘鼓风机股份有限公司 | 一种逆流冷却干式罗茨真空泵 |
| JP6453070B2 (ja) | 2014-12-18 | 2019-01-16 | 株式会社荏原製作所 | ドライ真空ポンプ、およびドライ真空ポンプの製造方法 |
| JP6340556B2 (ja) | 2015-02-12 | 2018-06-13 | オリオン機械株式会社 | 二軸回転ポンプ |
| KR101712962B1 (ko) | 2015-09-24 | 2017-03-07 | 이인철 | 냉각장치를 갖춘 진공펌프 |
| CN205478334U (zh) | 2016-02-02 | 2016-08-17 | 常州市华东真空泵厂 | 一种液冷型罗茨真空泵 |
| CN106704176B (zh) | 2016-12-02 | 2018-11-06 | 马德宝真空设备集团有限公司 | 一种罗茨泵的冷却系统 |
| GB201701833D0 (en) | 2017-02-03 | 2017-03-22 | Edwards Ltd | Pump cooling systems |
| KR101926658B1 (ko) | 2017-03-15 | 2018-12-07 | 이인철 | 반도체 챔버용 펌프 시스템 |
| CN107061284A (zh) | 2017-04-11 | 2017-08-18 | 浙江神工真空设备制造有限公司 | 一种罗茨真空泵 |
| CN110651124B (zh) | 2017-08-07 | 2021-03-05 | 株式会社爱发科 | 真空泵 |
| KR101915976B1 (ko) | 2017-09-12 | 2018-11-07 | 한국원자력연구원 | 로터리 피스톤 펌프 및 그 구동 방법 |
| CN207470428U (zh) | 2017-11-27 | 2018-06-08 | 广东肯富来泵业股份有限公司 | 一种带有水冷隔层的罗茨泵 |
| EP3499039B1 (de) | 2017-12-15 | 2021-03-31 | Pfeiffer Vacuum Gmbh | Schraubenvakuumpumpe |
| JP6774106B2 (ja) | 2018-10-17 | 2020-10-21 | 株式会社アンレット | ルーツブロワ |
| JP7281388B2 (ja) * | 2018-12-28 | 2023-05-25 | 株式会社荏原製作所 | 軸受装置および真空ポンプ装置 |
| CN209370056U (zh) | 2018-12-31 | 2019-09-10 | 浙江创为真空设备股份有限公司 | 一种气冷式直排罗茨泵 |
-
2021
- 2021-03-29 JP JP2021054585A patent/JP7555870B2/ja active Active
-
2022
- 2022-03-23 CN CN202210304826.1A patent/CN115143114A/zh active Pending
- 2022-03-23 TW TW111110862A patent/TW202244392A/zh unknown
- 2022-03-23 KR KR1020220035782A patent/KR20220136156A/ko active Pending
- 2022-03-24 EP EP22164110.3A patent/EP4067658B1/de active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004293434A (ja) | 2003-03-27 | 2004-10-21 | Aisin Seiki Co Ltd | ドライポンプ |
| JP2007262906A (ja) | 2006-03-27 | 2007-10-11 | Nabtesco Corp | 2段式真空ポンプ |
| JP2008069666A (ja) | 2006-09-12 | 2008-03-27 | Toyota Industries Corp | 真空ポンプの運転停止制御方法及び運転停止制御装置 |
| JP2009092042A (ja) | 2007-10-11 | 2009-04-30 | Nabtesco Corp | 回転ロータ式ポンプの軸受保護機構 |
| WO2020255300A1 (ja) | 2019-06-19 | 2020-12-24 | 樫山工業株式会社 | 真空ポンプ |
Also Published As
| Publication number | Publication date |
|---|---|
| EP4067658B1 (de) | 2025-02-12 |
| CN115143114A (zh) | 2022-10-04 |
| JP2022151996A (ja) | 2022-10-12 |
| TW202244392A (zh) | 2022-11-16 |
| KR20220136156A (ko) | 2022-10-07 |
| EP4067658A2 (de) | 2022-10-05 |
| EP4067658A3 (de) | 2022-11-02 |
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