JP7550238B2 - 配線基板及びプローブカード - Google Patents

配線基板及びプローブカード Download PDF

Info

Publication number
JP7550238B2
JP7550238B2 JP2022565418A JP2022565418A JP7550238B2 JP 7550238 B2 JP7550238 B2 JP 7550238B2 JP 2022565418 A JP2022565418 A JP 2022565418A JP 2022565418 A JP2022565418 A JP 2022565418A JP 7550238 B2 JP7550238 B2 JP 7550238B2
Authority
JP
Japan
Prior art keywords
conductor
wiring
wiring board
wiring layer
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022565418A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022114078A1 (https=
Inventor
芳宏 戸田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Publication of JPWO2022114078A1 publication Critical patent/JPWO2022114078A1/ja
Application granted granted Critical
Publication of JP7550238B2 publication Critical patent/JP7550238B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing of the conductive pattern
    • H05K3/243Reinforcing of the conductive pattern characterised by selective plating, e.g. for finish plating of pads
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0416Connectors, terminals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889Interfaces, e.g. between probe and tester
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/111Pads for surface mounting, e.g. lay-out
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • General Engineering & Computer Science (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Structure Of Printed Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
JP2022565418A 2020-11-27 2021-11-25 配線基板及びプローブカード Active JP7550238B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020196678 2020-11-27
JP2020196678 2020-11-27
PCT/JP2021/043263 WO2022114078A1 (ja) 2020-11-27 2021-11-25 配線基板及びプローブカード

Publications (2)

Publication Number Publication Date
JPWO2022114078A1 JPWO2022114078A1 (https=) 2022-06-02
JP7550238B2 true JP7550238B2 (ja) 2024-09-12

Family

ID=81754317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022565418A Active JP7550238B2 (ja) 2020-11-27 2021-11-25 配線基板及びプローブカード

Country Status (4)

Country Link
US (1) US20240027493A1 (https=)
JP (1) JP7550238B2 (https=)
KR (1) KR20230096042A (https=)
WO (1) WO2022114078A1 (https=)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010171351A (ja) 2008-12-25 2010-08-05 Kyocera Corp 配線基板及び配線基板の製造方法並びにプローブカード
JP2010232579A (ja) 2009-03-30 2010-10-14 Oki Networks Co Ltd プリント配線板の製造方法
JP2012243836A (ja) 2011-05-17 2012-12-10 Hitachi Cable Ltd フレキシブル配線基板およびその製造方法
CN104427789A (zh) 2013-08-22 2015-03-18 富葵精密组件(深圳)有限公司 多层电路板及其制作方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249742Y2 (https=) * 1985-12-09 1990-12-27
JPS63224392A (ja) * 1987-03-13 1988-09-19 日本メクトロン株式会社 多層プリント配線板およびその加工法
NL9100103A (nl) * 1991-01-23 1992-08-17 Philips Nv Halfgeleiderdiodelaser met monitordiode.
JP3008146B2 (ja) * 1992-10-26 2000-02-14 株式会社住友金属エレクトロデバイス 半導体素子収納用セラミックパッケージとその製造方法
BE1007282A3 (nl) * 1993-07-12 1995-05-09 Philips Electronics Nv Opto-electronische halfgeleiderinrichting met een array van halfgeleiderdiodelasers en werkwijze ter vervaardiging daarvan.
JPH11163500A (ja) * 1997-11-25 1999-06-18 Sumitomo Metal Smi Electron Devices Inc セラミック配線基板の洗浄方法
FI20095110A0 (fi) * 2009-02-06 2009-02-06 Imbera Electronics Oy Elektroniikkamoduuli, jossa on EMI-suoja
WO2020218335A1 (ja) * 2019-04-22 2020-10-29 京セラ株式会社 電子部品収納用パッケージ、電子装置、および電子モジュール
CN118043959A (zh) * 2021-09-30 2024-05-14 京瓷株式会社 半导体元件安装用基板以及半导体装置
EP4391733A4 (en) * 2021-10-20 2024-12-25 Samsung Electronics Co., Ltd. PRINTED CIRCUIT BOARD HAVING INCREASED DURABILITY IN CURVED AREA AND ELECTRONIC DEVICE COMPRISING SAME
EP4352822A4 (en) * 2021-12-02 2024-10-23 Samsung Electronics Co., Ltd. INTEGRATED CIRCUIT BOARD ANTENNA FOR TRANSMITTING/RECEIVING DATA
US20250151200A1 (en) * 2022-01-28 2025-05-08 Kyocera Corporation Wiring board, electronic component mounting package using wiring board, and electronic module
KR20240021481A (ko) * 2022-08-10 2024-02-19 삼성전기주식회사 인쇄회로기판 및 그 제조방법
EP4622399A1 (en) * 2024-03-21 2025-09-24 ZF CV Systems Global GmbH Printed circuit board, electrical circuit assembly and methods of producing a printed circuit board and an electrical circuit assembly

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010171351A (ja) 2008-12-25 2010-08-05 Kyocera Corp 配線基板及び配線基板の製造方法並びにプローブカード
JP2010232579A (ja) 2009-03-30 2010-10-14 Oki Networks Co Ltd プリント配線板の製造方法
JP2012243836A (ja) 2011-05-17 2012-12-10 Hitachi Cable Ltd フレキシブル配線基板およびその製造方法
CN104427789A (zh) 2013-08-22 2015-03-18 富葵精密组件(深圳)有限公司 多层电路板及其制作方法

Also Published As

Publication number Publication date
US20240027493A1 (en) 2024-01-25
JPWO2022114078A1 (https=) 2022-06-02
WO2022114078A1 (ja) 2022-06-02
KR20230096042A (ko) 2023-06-29

Similar Documents

Publication Publication Date Title
US8138609B2 (en) Semiconductor device and method of manufacturing semiconductor device
JP6691762B2 (ja) 検査用配線基板
US9839132B2 (en) Component-embedded substrate
US7735221B2 (en) Method for manufacturing a multilayer wiring board
US20110042130A1 (en) Multilayered wiring substrate and manufacturing method thereof
JP2016051834A (ja) プリント配線基板およびその製造方法
US10340243B2 (en) Circuit substrate and method for manufacturing circuit substrate
KR101382811B1 (ko) 인쇄회로기판 및 그의 제조 방법
JP7081090B2 (ja) 配線基板、プローブカード、及び、配線基板の製造方法
JP2013172137A (ja) 配線基板およびそれを用いたプローブカード
US8188377B2 (en) Circuit board having electrically connecting structure and fabrication method thereof
JP7550238B2 (ja) 配線基板及びプローブカード
US12546803B2 (en) Probe-card multilayer wiring substrate and probe card
KR102804861B1 (ko) 회로 기판, 프로브 카드용 기판 및 프로브 카드
JP2012198190A (ja) 電子部品検査装置用配線基板およびその製造方法
TWI902299B (zh) 去耦合電容器結構及組件
JP2005079144A (ja) 多層配線基板およびプローブカード
TWI606770B (zh) 超微間距測試介面板及其製造方法
US20220359124A1 (en) Multilayer ceramic substrate and probe card including same
US12205875B2 (en) Semiconductor device and manufacturing method thereof
TW201507555A (zh) 具有複合芯層及雙增層電路之線路板
JP2008060208A (ja) 多層配線基板およびそれを用いたプローブカード
CN112566390B (zh) 多层柔性线路板及其制备方法
US20160027725A1 (en) Multilayer wiring board and method for manufacturing same
JP7373471B2 (ja) 配線基板

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230524

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240507

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240704

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240806

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240902

R150 Certificate of patent or registration of utility model

Ref document number: 7550238

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150