JP7529018B2 - 弾性波装置 - Google Patents

弾性波装置 Download PDF

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Publication number
JP7529018B2
JP7529018B2 JP2022518026A JP2022518026A JP7529018B2 JP 7529018 B2 JP7529018 B2 JP 7529018B2 JP 2022518026 A JP2022518026 A JP 2022518026A JP 2022518026 A JP2022518026 A JP 2022518026A JP 7529018 B2 JP7529018 B2 JP 7529018B2
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Japan
Prior art keywords
electrode
acoustic
wave device
film
piezoelectric
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JP2022518026A
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English (en)
Japanese (ja)
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JPWO2021220974A5 (https=
JPWO2021220974A1 (https=
Inventor
康政 谷口
克也 大門
英樹 岩本
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication of JPWO2021220974A5 publication Critical patent/JPWO2021220974A5/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H03H9/14529—Distributed tap
    • H03H9/14532—Series weighting; Transverse weighting
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02842—Means for compensation or elimination of undesirable effects of reflections
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2022518026A 2020-04-27 2021-04-23 弾性波装置 Active JP7529018B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020078145 2020-04-27
JP2020078145 2020-04-27
PCT/JP2021/016510 WO2021220974A1 (ja) 2020-04-27 2021-04-23 弾性波装置

Publications (3)

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JPWO2021220974A1 JPWO2021220974A1 (https=) 2021-11-04
JPWO2021220974A5 JPWO2021220974A5 (https=) 2022-11-15
JP7529018B2 true JP7529018B2 (ja) 2024-08-06

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022518026A Active JP7529018B2 (ja) 2020-04-27 2021-04-23 弾性波装置

Country Status (5)

Country Link
US (1) US12425003B2 (https=)
JP (1) JP7529018B2 (https=)
KR (1) KR102823653B1 (https=)
CN (1) CN115485973B (https=)
WO (1) WO2021220974A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114731147A (zh) * 2019-12-09 2022-07-08 株式会社村田制作所 弹性波装置
WO2021220936A1 (ja) * 2020-04-27 2021-11-04 株式会社村田製作所 弾性波装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017187724A1 (ja) 2016-04-27 2017-11-02 株式会社村田製作所 弾性波装置
WO2018057956A1 (en) 2016-09-26 2018-03-29 Snaptrack, Inc. Electroacoustic transducer having improved esd resistance
WO2018123882A1 (ja) 2016-12-26 2018-07-05 株式会社村田製作所 弾性波装置
WO2019004205A1 (ja) 2017-06-30 2019-01-03 株式会社村田製作所 弾性波装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103262410B (zh) * 2010-12-24 2016-08-10 株式会社村田制作所 弹性波装置及其制造方法
WO2012086441A1 (ja) * 2010-12-24 2012-06-28 株式会社村田製作所 弾性波装置及びその製造方法
JP5697751B2 (ja) 2011-03-25 2015-04-08 スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社 高次横モード波を抑制した弾性波デバイス
US20170155373A1 (en) * 2015-11-30 2017-06-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (saw) resonator structure with dielectric material below electrode fingers
CN109690942B (zh) * 2016-09-13 2023-01-13 株式会社村田制作所 弹性波装置、高频前端电路以及通信装置
JPWO2018131360A1 (ja) 2017-01-10 2019-11-07 株式会社村田製作所 弾性波装置
JP6954799B2 (ja) * 2017-10-20 2021-10-27 株式会社村田製作所 弾性波装置
JP2019092095A (ja) 2017-11-16 2019-06-13 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
CN113454911B (zh) 2019-02-18 2024-05-07 株式会社村田制作所 弹性波装置
US11705883B2 (en) * 2019-10-24 2023-07-18 Skyworks Solutions, Inc. Acoustic wave resonator with mass loading strip for suppression of transverse mode
CN115428334A (zh) * 2020-04-27 2022-12-02 株式会社村田制作所 弹性波装置
CN115296642B (zh) * 2022-10-08 2023-03-24 深圳新声半导体有限公司 声表面波谐振器结构及其形成方法、滤波器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017187724A1 (ja) 2016-04-27 2017-11-02 株式会社村田製作所 弾性波装置
WO2018057956A1 (en) 2016-09-26 2018-03-29 Snaptrack, Inc. Electroacoustic transducer having improved esd resistance
WO2018123882A1 (ja) 2016-12-26 2018-07-05 株式会社村田製作所 弾性波装置
WO2019004205A1 (ja) 2017-06-30 2019-01-03 株式会社村田製作所 弾性波装置

Also Published As

Publication number Publication date
CN115485973A (zh) 2022-12-16
US20230041470A1 (en) 2023-02-09
KR102823653B1 (ko) 2025-06-23
US12425003B2 (en) 2025-09-23
WO2021220974A1 (ja) 2021-11-04
CN115485973B (zh) 2026-01-23
JPWO2021220974A1 (https=) 2021-11-04
KR20220158049A (ko) 2022-11-29

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