KR102823653B1 - 탄성파 장치 - Google Patents

탄성파 장치 Download PDF

Info

Publication number
KR102823653B1
KR102823653B1 KR1020227036921A KR20227036921A KR102823653B1 KR 102823653 B1 KR102823653 B1 KR 102823653B1 KR 1020227036921 A KR1020227036921 A KR 1020227036921A KR 20227036921 A KR20227036921 A KR 20227036921A KR 102823653 B1 KR102823653 B1 KR 102823653B1
Authority
KR
South Korea
Prior art keywords
elastic wave
wave device
electrode
film
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020227036921A
Other languages
English (en)
Korean (ko)
Other versions
KR20220158049A (ko
Inventor
야스마사 타니구치
카츠야 다이몬
히데키 이와모토
Original Assignee
가부시키가이샤 무라타 세이사쿠쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 무라타 세이사쿠쇼 filed Critical 가부시키가이샤 무라타 세이사쿠쇼
Publication of KR20220158049A publication Critical patent/KR20220158049A/ko
Application granted granted Critical
Publication of KR102823653B1 publication Critical patent/KR102823653B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H03H9/14529—Distributed tap
    • H03H9/14532—Series weighting; Transverse weighting
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02842—Means for compensation or elimination of undesirable effects of reflections
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
KR1020227036921A 2020-04-27 2021-04-23 탄성파 장치 Active KR102823653B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020078145 2020-04-27
JPJP-P-2020-078145 2020-04-27
PCT/JP2021/016510 WO2021220974A1 (ja) 2020-04-27 2021-04-23 弾性波装置

Publications (2)

Publication Number Publication Date
KR20220158049A KR20220158049A (ko) 2022-11-29
KR102823653B1 true KR102823653B1 (ko) 2025-06-23

Family

ID=78332088

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227036921A Active KR102823653B1 (ko) 2020-04-27 2021-04-23 탄성파 장치

Country Status (5)

Country Link
US (1) US12425003B2 (https=)
JP (1) JP7529018B2 (https=)
KR (1) KR102823653B1 (https=)
CN (1) CN115485973B (https=)
WO (1) WO2021220974A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114731147A (zh) * 2019-12-09 2022-07-08 株式会社村田制作所 弹性波装置
WO2021220936A1 (ja) * 2020-04-27 2021-11-04 株式会社村田製作所 弾性波装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170155373A1 (en) * 2015-11-30 2017-06-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (saw) resonator structure with dielectric material below electrode fingers

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103262410B (zh) * 2010-12-24 2016-08-10 株式会社村田制作所 弹性波装置及其制造方法
WO2012086441A1 (ja) * 2010-12-24 2012-06-28 株式会社村田製作所 弾性波装置及びその製造方法
JP5697751B2 (ja) 2011-03-25 2015-04-08 スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社 高次横モード波を抑制した弾性波デバイス
WO2017187724A1 (ja) * 2016-04-27 2017-11-02 株式会社村田製作所 弾性波装置
CN109690942B (zh) * 2016-09-13 2023-01-13 株式会社村田制作所 弹性波装置、高频前端电路以及通信装置
DE102016118124B4 (de) * 2016-09-26 2023-11-30 Snaptrack, Inc. Elektroakustischer Wandler mit verbesserter ESD Festigkeit
CN110114973B (zh) 2016-12-26 2024-04-26 株式会社村田制作所 弹性波装置
JPWO2018131360A1 (ja) 2017-01-10 2019-11-07 株式会社村田製作所 弾性波装置
JP6702438B2 (ja) 2017-06-30 2020-06-03 株式会社村田製作所 弾性波装置
JP6954799B2 (ja) * 2017-10-20 2021-10-27 株式会社村田製作所 弾性波装置
JP2019092095A (ja) 2017-11-16 2019-06-13 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
CN113454911B (zh) 2019-02-18 2024-05-07 株式会社村田制作所 弹性波装置
US11705883B2 (en) * 2019-10-24 2023-07-18 Skyworks Solutions, Inc. Acoustic wave resonator with mass loading strip for suppression of transverse mode
CN115428334A (zh) * 2020-04-27 2022-12-02 株式会社村田制作所 弹性波装置
CN115296642B (zh) * 2022-10-08 2023-03-24 深圳新声半导体有限公司 声表面波谐振器结构及其形成方法、滤波器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170155373A1 (en) * 2015-11-30 2017-06-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (saw) resonator structure with dielectric material below electrode fingers

Also Published As

Publication number Publication date
CN115485973A (zh) 2022-12-16
US20230041470A1 (en) 2023-02-09
US12425003B2 (en) 2025-09-23
JP7529018B2 (ja) 2024-08-06
WO2021220974A1 (ja) 2021-11-04
CN115485973B (zh) 2026-01-23
JPWO2021220974A1 (https=) 2021-11-04
KR20220158049A (ko) 2022-11-29

Similar Documents

Publication Publication Date Title
US20240154596A1 (en) Acoustic wave device and filter device
US11611325B2 (en) Acoustic wave device
CN107112975B (zh) 弹性波装置
US11646713B2 (en) Acoustic wave device
JP6874861B2 (ja) 弾性波装置
WO2020100744A1 (ja) 弾性波装置
CN111446942A (zh) 弹性波装置
KR102893022B1 (ko) 탄성파 장치
KR102925098B1 (ko) 탄성파 장치
US20230071909A1 (en) Acoustic wave device
WO2019194140A1 (ja) 弾性波装置
CN113940000B (zh) 弹性波装置
US20240154595A1 (en) Acoustic wave device
JP7268747B2 (ja) 弾性波装置
US20230198500A1 (en) Acoustic wave device
KR102823653B1 (ko) 탄성파 장치
US20240291459A1 (en) Acoustic wave device
KR102754242B1 (ko) 탄성파 장치
KR102820039B1 (ko) 탄성파 장치
US20240364296A1 (en) Acoustic wave device
US20240364300A1 (en) Acoustic wave device
US20230155569A1 (en) Acoustic wave device
CN115777176B (zh) 弹性波装置
US20230163749A1 (en) Acoustic wave device
US12301203B2 (en) Acoustic wave device

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20221024

Patent event code: PA01051R01D

Comment text: International Patent Application

PA0201 Request for examination
PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20240620

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20250327

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20250618

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20250619

End annual number: 3

Start annual number: 1

PG1601 Publication of registration