CN115485973B - 弹性波装置 - Google Patents

弹性波装置

Info

Publication number
CN115485973B
CN115485973B CN202180028743.8A CN202180028743A CN115485973B CN 115485973 B CN115485973 B CN 115485973B CN 202180028743 A CN202180028743 A CN 202180028743A CN 115485973 B CN115485973 B CN 115485973B
Authority
CN
China
Prior art keywords
elastic wave
wave device
electrode
velocity
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202180028743.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN115485973A (zh
Inventor
谷口康政
大门克也
岩本英树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN115485973A publication Critical patent/CN115485973A/zh
Application granted granted Critical
Publication of CN115485973B publication Critical patent/CN115485973B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H03H9/14529—Distributed tap
    • H03H9/14532—Series weighting; Transverse weighting
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02637—Details concerning reflective or coupling arrays
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02842—Means for compensation or elimination of undesirable effects of reflections
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
CN202180028743.8A 2020-04-27 2021-04-23 弹性波装置 Active CN115485973B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020-078145 2020-04-27
JP2020078145 2020-04-27
PCT/JP2021/016510 WO2021220974A1 (ja) 2020-04-27 2021-04-23 弾性波装置

Publications (2)

Publication Number Publication Date
CN115485973A CN115485973A (zh) 2022-12-16
CN115485973B true CN115485973B (zh) 2026-01-23

Family

ID=78332088

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180028743.8A Active CN115485973B (zh) 2020-04-27 2021-04-23 弹性波装置

Country Status (5)

Country Link
US (1) US12425003B2 (https=)
JP (1) JP7529018B2 (https=)
KR (1) KR102823653B1 (https=)
CN (1) CN115485973B (https=)
WO (1) WO2021220974A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114731147A (zh) * 2019-12-09 2022-07-08 株式会社村田制作所 弹性波装置
WO2021220936A1 (ja) * 2020-04-27 2021-11-04 株式会社村田製作所 弾性波装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109698681A (zh) * 2017-10-20 2019-04-30 株式会社村田制作所 弹性波装置
CN109802650A (zh) * 2017-11-16 2019-05-24 株式会社村田制作所 弹性波装置、高频前端电路以及通信装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103262410B (zh) * 2010-12-24 2016-08-10 株式会社村田制作所 弹性波装置及其制造方法
WO2012086441A1 (ja) * 2010-12-24 2012-06-28 株式会社村田製作所 弾性波装置及びその製造方法
JP5697751B2 (ja) 2011-03-25 2015-04-08 スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社 高次横モード波を抑制した弾性波デバイス
US20170155373A1 (en) * 2015-11-30 2017-06-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (saw) resonator structure with dielectric material below electrode fingers
WO2017187724A1 (ja) * 2016-04-27 2017-11-02 株式会社村田製作所 弾性波装置
CN109690942B (zh) * 2016-09-13 2023-01-13 株式会社村田制作所 弹性波装置、高频前端电路以及通信装置
DE102016118124B4 (de) * 2016-09-26 2023-11-30 Snaptrack, Inc. Elektroakustischer Wandler mit verbesserter ESD Festigkeit
CN110114973B (zh) 2016-12-26 2024-04-26 株式会社村田制作所 弹性波装置
JPWO2018131360A1 (ja) 2017-01-10 2019-11-07 株式会社村田製作所 弾性波装置
JP6702438B2 (ja) 2017-06-30 2020-06-03 株式会社村田製作所 弾性波装置
CN113454911B (zh) 2019-02-18 2024-05-07 株式会社村田制作所 弹性波装置
US11705883B2 (en) * 2019-10-24 2023-07-18 Skyworks Solutions, Inc. Acoustic wave resonator with mass loading strip for suppression of transverse mode
CN115428334A (zh) * 2020-04-27 2022-12-02 株式会社村田制作所 弹性波装置
CN115296642B (zh) * 2022-10-08 2023-03-24 深圳新声半导体有限公司 声表面波谐振器结构及其形成方法、滤波器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109698681A (zh) * 2017-10-20 2019-04-30 株式会社村田制作所 弹性波装置
CN109802650A (zh) * 2017-11-16 2019-05-24 株式会社村田制作所 弹性波装置、高频前端电路以及通信装置

Also Published As

Publication number Publication date
CN115485973A (zh) 2022-12-16
US20230041470A1 (en) 2023-02-09
KR102823653B1 (ko) 2025-06-23
US12425003B2 (en) 2025-09-23
JP7529018B2 (ja) 2024-08-06
WO2021220974A1 (ja) 2021-11-04
JPWO2021220974A1 (https=) 2021-11-04
KR20220158049A (ko) 2022-11-29

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