JP7527604B2 - 弾性波デバイス - Google Patents

弾性波デバイス Download PDF

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Publication number
JP7527604B2
JP7527604B2 JP2021537314A JP2021537314A JP7527604B2 JP 7527604 B2 JP7527604 B2 JP 7527604B2 JP 2021537314 A JP2021537314 A JP 2021537314A JP 2021537314 A JP2021537314 A JP 2021537314A JP 7527604 B2 JP7527604 B2 JP 7527604B2
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JP
Japan
Prior art keywords
piezoelectric substrate
acoustic
substrate
thickness
piezoelectric
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JP2021537314A
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English (en)
Japanese (ja)
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JPWO2021025004A5 (https=
JPWO2021025004A1 (https=
Inventor
道雄 門田
秀治 田中
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Tohoku University NUC
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Tohoku University NUC
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Publication of JPWO2021025004A5 publication Critical patent/JPWO2021025004A5/ja
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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/175—Acoustic mirrors
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2021537314A 2019-08-08 2020-08-04 弾性波デバイス Active JP7527604B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019145908 2019-08-08
JP2019145908 2019-08-08
PCT/JP2020/029759 WO2021025004A1 (ja) 2019-08-08 2020-08-04 弾性波デバイス

Publications (3)

Publication Number Publication Date
JPWO2021025004A1 JPWO2021025004A1 (https=) 2021-02-11
JPWO2021025004A5 JPWO2021025004A5 (https=) 2022-06-07
JP7527604B2 true JP7527604B2 (ja) 2024-08-05

Family

ID=74502981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021537314A Active JP7527604B2 (ja) 2019-08-08 2020-08-04 弾性波デバイス

Country Status (4)

Country Link
US (1) US20220294415A1 (https=)
JP (1) JP7527604B2 (https=)
CN (1) CN114375544A (https=)
WO (1) WO2021025004A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7829370B2 (ja) * 2022-03-17 2026-03-13 太陽誘電株式会社 弾性波デバイス、フィルタ、およびマルチプレクサ
JP2023139785A (ja) * 2022-03-22 2023-10-04 リバーエレテック株式会社 弾性波素子及びそれを用いた原子発振器
WO2025211111A1 (ja) * 2024-04-01 2025-10-09 株式会社村田製作所 弾性波フィルタ、マルチプレクサ、高周波フロントエンド回路及び通信装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005051447A (ja) 2003-07-31 2005-02-24 Tdk Corp 圧電共振器およびそれを用いたフィルタならびに電子部品
WO2013031748A1 (ja) 2011-09-01 2013-03-07 株式会社村田製作所 圧電バルク波装置及びその製造方法
JP2013528996A (ja) 2010-04-23 2013-07-11 テクノロジアン テュトキムスケスクス ヴェーテーテー 広帯域音響結合薄膜ｂａｗフィルタ
JP2013225945A (ja) 2010-01-28 2013-10-31 Murata Mfg Co Ltd チューナブルフィルタ
JP2015502065A (ja) 2011-11-11 2015-01-19 テクノロジアン テュトキムスケスクス ヴェーテーテーＴｅｋｎｏｌｏｇｉａｎ ｔｕｔｋｉｍｕｓｋｅｓｋｕｓ ＶＴＴ 向上した通過帯域特性を有する、横方向に結合されたバルク弾性波フィルタ
WO2018198654A1 (ja) 2017-04-26 2018-11-01 株式会社村田製作所 弾性波装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09162683A (ja) * 1995-12-06 1997-06-20 Matsushita Electric Ind Co Ltd 圧電共振子
US8219466B2 (en) * 2002-08-05 2012-07-10 John Yupeng Gui System and method for providing asset management and tracking capabilities
JP2005318547A (ja) * 2004-03-30 2005-11-10 Sanyo Electric Co Ltd バルク波デバイス
JP2006340007A (ja) * 2005-06-01 2006-12-14 Kyocera Corp 薄膜バルク音響波共振子およびフィルタならびに通信装置
WO2016047255A1 (ja) * 2014-09-26 2016-03-31 国立大学法人東北大学 弾性波装置
CN108028637B (zh) * 2015-10-23 2021-05-11 株式会社村田制作所 弹性波装置
US11258427B2 (en) * 2016-11-25 2022-02-22 Tohoku University Acoustic wave devices
JP6819005B2 (ja) * 2016-12-29 2021-01-27 新日本無線株式会社 バルク弾性波共振器
JP6702438B2 (ja) * 2017-06-30 2020-06-03 株式会社村田製作所 弾性波装置
JP2019102883A (ja) * 2017-11-29 2019-06-24 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
WO2021172032A1 (ja) * 2020-02-28 2021-09-02 国立大学法人東北大学 弾性波デバイス
CN115021705B (zh) * 2022-06-27 2024-04-09 中国科学院上海微系统与信息技术研究所 一种高频声波谐振器及应用其的滤波器
WO2024032882A1 (en) * 2022-08-10 2024-02-15 Huawei Technologies Co., Ltd. Bulk acoustic resonator device with enhanced power handling capabilities by double layer piezoelectric material

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005051447A (ja) 2003-07-31 2005-02-24 Tdk Corp 圧電共振器およびそれを用いたフィルタならびに電子部品
JP2013225945A (ja) 2010-01-28 2013-10-31 Murata Mfg Co Ltd チューナブルフィルタ
JP2013528996A (ja) 2010-04-23 2013-07-11 テクノロジアン テュトキムスケスクス ヴェーテーテー 広帯域音響結合薄膜ｂａｗフィルタ
WO2013031748A1 (ja) 2011-09-01 2013-03-07 株式会社村田製作所 圧電バルク波装置及びその製造方法
JP2015502065A (ja) 2011-11-11 2015-01-19 テクノロジアン テュトキムスケスクス ヴェーテーテーＴｅｋｎｏｌｏｇｉａｎ ｔｕｔｋｉｍｕｓｋｅｓｋｕｓ ＶＴＴ 向上した通過帯域特性を有する、横方向に結合されたバルク弾性波フィルタ
WO2018198654A1 (ja) 2017-04-26 2018-11-01 株式会社村田製作所 弾性波装置

Also Published As

Publication number Publication date
US20220294415A1 (en) 2022-09-15
WO2021025004A1 (ja) 2021-02-11
CN114375544A (zh) 2022-04-19
JPWO2021025004A1 (https=) 2021-02-11

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