JP7504866B2 - 生産機器および表面上のナノ粒子の検出 - Google Patents

生産機器および表面上のナノ粒子の検出 Download PDF

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JP7504866B2
JP7504866B2 JP2021505906A JP2021505906A JP7504866B2 JP 7504866 B2 JP7504866 B2 JP 7504866B2 JP 2021505906 A JP2021505906 A JP 2021505906A JP 2021505906 A JP2021505906 A JP 2021505906A JP 7504866 B2 JP7504866 B2 JP 7504866B2
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particles
particle
particle counter
optical
energy
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JP2021536001A (ja
JPWO2020051131A5 (enExample
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ブライアン エー． ノレンバーグ，
ダニエル ロバート ロディエ，
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パーティクル・メージャーリング・システムズ・インコーポレーテッド
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/065—Investigating concentration of particle suspensions using condensation nuclei counters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N2001/002—Devices for supplying or distributing samples to an analysing apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N2001/028—Sampling from a surface, swabbing, vaporising
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0038—Investigating nanoparticles

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  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2021505906A 2018-09-04 2019-09-03 生産機器および表面上のナノ粒子の検出 Active JP7504866B2 (ja)

Priority Applications (1)

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JP2024028419A JP2024059885A (ja) 2018-09-04 2024-02-28 生産機器および表面上のナノ粒子の検出

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201862726851P 2018-09-04 2018-09-04
US62/726,851 2018-09-04
PCT/US2019/049328 WO2020051131A1 (en) 2018-09-04 2019-09-03 Detecting nanoparticles on production equipment and surfaces

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JP2021536001A JP2021536001A (ja) 2021-12-23
JPWO2020051131A5 JPWO2020051131A5 (enExample) 2022-06-15
JP7504866B2 true JP7504866B2 (ja) 2024-06-24

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JP2021505906A Active JP7504866B2 (ja) 2018-09-04 2019-09-03 生産機器および表面上のナノ粒子の検出
JP2024028419A Withdrawn JP2024059885A (ja) 2018-09-04 2024-02-28 生産機器および表面上のナノ粒子の検出

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US (2) US10928293B2 (enExample)
JP (2) JP7504866B2 (enExample)
KR (1) KR20210052506A (enExample)
CN (1) CN112639444A (enExample)
TW (1) TWI728453B (enExample)
WO (1) WO2020051131A1 (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2786117B1 (en) 2011-12-01 2022-12-21 Particle Measuring Systems, Inc. Detection scheme for particle size and concentration measurement
ITRM20130128U1 (it) 2013-07-23 2015-01-24 Particle Measuring Systems S R L Dispositivo per il campionamento microbico dell'aria
JP7326256B2 (ja) 2017-10-26 2023-08-15 パーティクル・メージャーリング・システムズ・インコーポレーテッド 粒子計測システム及び方法
CN112639444A (zh) 2018-09-04 2021-04-09 粒子监测系统有限公司 检测生产设备和表面上的纳米粒子
US12270748B2 (en) * 2018-09-12 2025-04-08 Lam Research Corporation Method and apparatus for measuring particles
US11385161B2 (en) 2018-11-12 2022-07-12 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
WO2020102038A1 (en) 2018-11-12 2020-05-22 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
CN113015897A (zh) 2018-11-16 2021-06-22 粒子监测系统有限公司 结合块体尺寸分布的浆料监控和单颗粒检测
WO2020102032A1 (en) 2018-11-16 2020-05-22 Particle Measuring Systems, Inc. Particle sampling systems and methods for robotic controlled manufacturing barrier systems
JP7504912B2 (ja) 2019-04-25 2024-06-24 パーティクル・メージャーリング・システムズ・インコーポレーテッド 軸上粒子検出及び／又は差分検出のための粒子検出システム及び方法
US11441974B2 (en) 2019-08-01 2022-09-13 Applied Materials, Inc. Detection of surface particles on chamber components with carbon dioxide
US11268930B2 (en) 2019-08-26 2022-03-08 Particle Measuring Systems, Inc. Triggered sampling systems and methods
WO2021071793A1 (en) 2019-10-07 2021-04-15 Particle Measuring Systems, Inc. Antimicrobial particle detectors
JP7520961B2 (ja) 2019-10-07 2024-07-23 パーティクル・メージャーリング・システムズ・インコーポレーテッド 遠隔警報監視及び制御を有する粒子検出器
IT201900020248A1 (it) 2019-11-04 2021-05-04 Particle Measuring Systems S R L Dispositivo di monitoraggio mobile per aree a contaminazione controllata
WO2021102256A1 (en) 2019-11-22 2021-05-27 Particle Measuring Systems, Inc. Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions
US11892462B2 (en) 2020-01-21 2024-02-06 Pharma Integration Srl Robotic control for aseptic processing
EP4130711A4 (en) * 2020-03-24 2023-09-27 Sony Group Corporation DEVICE, METHOD AND PROGRAM FOR INFORMATION PROCESSING
TW202323792A (zh) 2021-06-15 2023-06-16 美商粒子監測系統有限公司 具有擴充基座之模組化粒子計數器
TW202319725A (zh) 2021-06-15 2023-05-16 美商粒子監測系統有限公司 緊湊型智慧氣溶膠及流體分歧管
JP2024526015A (ja) * 2021-06-15 2024-07-17 パーティクル・メージャーリング・システムズ・インコーポレーテッド 凝縮粒子計数器および使用方法
TW202346835A (zh) 2022-01-21 2023-12-01 美商粒子監測系統有限公司 增強的雙遍次及多遍次粒子偵測
EP4257948A1 (en) * 2022-04-04 2023-10-11 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Method and system for inspecting a surface
CN114965229B (zh) * 2022-04-28 2025-07-29 上海纬冉科技有限公司 进样仓测量方法、装置、计算机设备和存储介质
WO2024218516A1 (en) * 2023-04-19 2024-10-24 Smiths Detection-Watford Limited Communications adapter for detection device and communications method for a detection device
WO2025106628A1 (en) 2023-11-16 2025-05-22 Particle Measuring Systems, Inc. Systems and methods for reducing false positive particle detection events in a particle detector
US20250208018A1 (en) * 2023-12-20 2025-06-26 Kang-Ho Ahn Condensation particle counter and system including same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002525567A (ja) 1998-09-11 2002-08-13 フェムトメトリクス，インコーポレイテッド パルス空気サンプラー
US20110132108A1 (en) 2009-07-13 2011-06-09 Enertechnix, Inc Particle Interrogation Devices and Methods
WO2013080209A1 (en) 2011-12-01 2013-06-06 P.M.L. - Particles Monitoring Technologies Ltd. Detection scheme for particle size and concentration measurement
JP2014125494A (ja) 2012-12-25 2014-07-07 Toray Ind Inc エポキシ樹脂硬化物微粒子の金属酸化物含有水分散液及びその製造方法

Family Cites Families (69)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4594715A (en) 1983-11-17 1986-06-10 Particle Measuring Systems, Inc. Laser with stabilized external passive cavity
US4728190A (en) 1985-10-15 1988-03-01 Particle Measuring Systems, Inc. Device and method for optically detecting particles in a fluid
US4798465B2 (en) 1986-04-14 1994-08-30 Particle Measuring Syst Particle size detection device having high sensitivity in high molecular scattering environment
US4987767A (en) * 1989-06-09 1991-01-29 Research Corporation Technologies, Inc. Exposive detection screening system
US5039349A (en) 1990-05-18 1991-08-13 Veriflo Corporation Method and apparatus for cleaning surfaces to absolute or near-absolute cleanliness
US5283199A (en) 1990-06-01 1994-02-01 Environmental Technologies Group, Inc. Chlorine dioxide monitor based on ion mobility spectrometry with selective dopant chemistry
US5282151A (en) 1991-02-28 1994-01-25 Particle Measuring Systems, Inc. Submicron diameter particle detection utilizing high density array
US5751422A (en) 1996-02-26 1998-05-12 Particle Measuring Systems, Inc. In-situ particle detection utilizing optical coupling
US5726753A (en) 1996-02-26 1998-03-10 Research Electro-Optics, Inc. Intracavity particle detection using optically pumped laser media
US5671046A (en) 1996-07-01 1997-09-23 Particle Measuring Systems, Inc. Device and method for optically detecting particles in a free liquid stream
US5805281A (en) 1997-04-21 1998-09-08 Particle Measuring Systems Noise reduction utilizing signal multiplication
US5861950A (en) 1997-07-10 1999-01-19 Particle Measuring Systems, Inc. Particle detection system utilizing an inviscid flow-producing nozzle
US5903338A (en) 1998-02-11 1999-05-11 Particle Measuring Systems, Inc. Condensation nucleus counter using mixing and cooling
US6246474B1 (en) 1998-04-29 2001-06-12 Particle Measuring Systems, Inc. Method and apparatus for measurement of particle size distribution in substantially opaque slurries
US6887710B2 (en) 1998-11-13 2005-05-03 Mesosystems Technology, Inc. Robust system for screening mail for biological agents
US6167107A (en) 1999-07-16 2000-12-26 Particle Measuring Systems, Inc. Air pump for particle sensing using regenerative fan, and associated methods
US20020029956A1 (en) * 2000-07-24 2002-03-14 Allen Susan Davis Method and apparatus for removing minute particles from a surface
US6615679B1 (en) 2000-08-15 2003-09-09 Particle Measuring Systems, Inc. Ensemble manifold, system and method for monitoring particles in clean environments
US7010991B2 (en) 2000-09-13 2006-03-14 Pentagon Technologies Group, Inc. Surface particle detector
KR100383547B1 (ko) * 2000-09-25 2003-05-12 학교법인 한양학원 초미세입자 응축핵계수기
JP2003035652A (ja) * 2001-07-23 2003-02-07 Matsushita Electric Ind Co Ltd パーティクルカウンタ
US20030015045A1 (en) * 2001-07-23 2003-01-23 Takehito Yoshida Particle counting method and particle counter
US6709311B2 (en) 2001-08-13 2004-03-23 Particle Measuring Systems, Inc. Spectroscopic measurement of the chemical constituents of a CMP slurry
US7208123B2 (en) 2002-06-24 2007-04-24 Particle Measuring Systems, Inc. Molecular contamination monitoring system and method
US6945090B2 (en) 2002-06-24 2005-09-20 Particle Measuring Systems, Inc. Method and apparatus for monitoring molecular contamination of critical surfaces using coated SAWS
US6859277B2 (en) 2002-08-27 2005-02-22 Particle Measuring Systems, Inc. Particle counter with strip laser diode
US7576857B2 (en) 2002-08-27 2009-08-18 Particle Measuring Systems, Inc. Particle counter with laser diode
US6903818B2 (en) 2002-10-28 2005-06-07 Particle Measuring Systems, Inc. Low noise intracavity laser particle counter
US7235214B2 (en) 2003-04-23 2007-06-26 Particle Measuring Systems, Inc. System and method for measuring molecular analytes in a measurement fluid
IL156856A (en) 2003-07-09 2011-11-30 Joseph Shamir Method for particle size and concentration measurement
US20050028593A1 (en) 2003-08-04 2005-02-10 Particle Measuring Systems, Inc. Method and apparatus for high sensitivity monitoring of molecular contamination
US7088446B2 (en) 2003-12-31 2006-08-08 Particle Measuring Systems, Inc. Optical measurement of the chemical constituents of an opaque slurry
US7030980B1 (en) 2004-12-29 2006-04-18 Particle Measuring Systems, Inc. Diode pumped intracavity laser particle counter with improved reliability and reduced noise
US7088447B1 (en) 2005-03-01 2006-08-08 Particle Measuring Systems, Inc. Particle counter with self-concealing aperture assembly
US7528386B2 (en) * 2005-04-21 2009-05-05 Board Of Trustees Of University Of Illinois Submicron particle removal
WO2007084175A1 (en) 2005-05-04 2007-07-26 University Of Rochester Interferometric apparatus and method for sizing nanoparticles
US7456960B2 (en) 2005-06-06 2008-11-25 Particle Measuring Systems, Inc. Particle counter with improved image sensor array
GB0513358D0 (en) 2005-06-29 2005-08-03 Gorbounon Boris Portable nanoparticle size classifier
US20090323061A1 (en) 2006-02-28 2009-12-31 Lukas Novotny Multi-color hetereodyne interferometric apparatus and method for sizing nanoparticles
US7667839B2 (en) 2006-03-30 2010-02-23 Particle Measuring Systems, Inc. Aerosol particle sensor with axial fan
JP2010522333A (ja) 2007-03-23 2010-07-01 パーティクル・メージャーリング・システムズ・インコーポレーテッド 排出冷却式光源を備えた光学式パーティクルセンサ
WO2009018305A1 (en) 2007-07-30 2009-02-05 Particle Measuring Systems, Inc. Detection of analytes using ion mobility spectrometry
WO2009073259A2 (en) * 2007-09-14 2009-06-11 University Of Rochester Common-path interferometer rendering amplitude and phase of scattered light
EP2220629B1 (en) 2007-11-16 2020-04-22 Particle Measuring Systems, Inc. System and method for calibration verification of an optical particle counter
WO2009073652A1 (en) 2007-12-04 2009-06-11 Particle Measuring Systems, Inc. Two-dimensional optical imaging methods and systems for particle detection
GB0808385D0 (en) 2008-05-08 2008-06-18 Naneum Ltd A condensation apparatus
US8800383B2 (en) 2009-08-24 2014-08-12 Particle Measuring Systems, Inc. Flow monitored particle sensor
GB201310355D0 (en) 2013-06-11 2013-07-24 Particle Measuring System Inc Apparatus for charging or adjusting the charge of aerosol apparatus
GB2515285A (en) 2013-06-17 2014-12-24 Particle Measuring System Inc A method for obtaining aerosol particle size distributions
GB201311097D0 (en) 2013-06-21 2013-08-07 Particle Measuring Syst A method and apparatus for dilution of aerosols
ITRM20130128U1 (it) 2013-07-23 2015-01-24 Particle Measuring Systems S R L Dispositivo per il campionamento microbico dell'aria
US9631222B2 (en) 2014-03-14 2017-04-25 Particle Measuring Systems, Inc. Filter and blower geometry for particle sampler
US11416123B2 (en) 2014-03-14 2022-08-16 Particle Measuring Systems, Inc. Firmware design for facility navigation, and area and location data management of particle sampling and analysis instruments
WO2015138677A1 (en) 2014-03-14 2015-09-17 Particle Measuring Systems, Inc. Particle impactor with selective height adjustment
WO2015138681A1 (en) 2014-03-14 2015-09-17 Particle Measuring Systems, Inc. Firmware design for biological air sampling method
WO2015148148A1 (en) 2014-03-14 2015-10-01 Particle Measuring Systems, Inc. Pressure-based airflow sensing in particle impactor systems
US9682345B2 (en) 2014-07-08 2017-06-20 Particle Measuring Systems, Inc. Method of treating a cleanroom enclosure
EP3278082B1 (en) * 2015-04-02 2020-03-25 Particle Measuring Systems, Inc. Laser noise detection and mitigation in particle counting instruments
KR102406782B1 (ko) 2016-05-20 2022-06-08 파티클 머슈어링 시스템즈, 인크. 유동 및 버블 검출 시스템을 가지는 자동 전력 제어 액체 입자 계수기
JP6880439B2 (ja) 2016-06-03 2021-06-02 パーティクル・メージャーリング・システムズ・インコーポレーテッド 凝縮粒子計数器内の凝縮物を分離するためのシステム及び方法
US10725061B2 (en) * 2017-02-03 2020-07-28 Pentagon Technologies Group, Inc. Modulated air surface particle detector
US10712355B2 (en) * 2017-06-20 2020-07-14 Pentagon Technologies Group, Inc. High resolution surface particle detector
JP7326256B2 (ja) 2017-10-26 2023-08-15 パーティクル・メージャーリング・システムズ・インコーポレーテッド 粒子計測システム及び方法
JP2021535999A (ja) 2018-08-31 2021-12-23 パーティクル・メージャーリング・システムズ・インコーポレーテッド 流体屈折率最適化粒子計数器
CN112639444A (zh) 2018-09-04 2021-04-09 粒子监测系统有限公司 检测生产设备和表面上的纳米粒子
WO2020102038A1 (en) 2018-11-12 2020-05-22 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
CN113015897A (zh) 2018-11-16 2021-06-22 粒子监测系统有限公司 结合块体尺寸分布的浆料监控和单颗粒检测
WO2020102032A1 (en) 2018-11-16 2020-05-22 Particle Measuring Systems, Inc. Particle sampling systems and methods for robotic controlled manufacturing barrier systems
JP7504912B2 (ja) 2019-04-25 2024-06-24 パーティクル・メージャーリング・システムズ・インコーポレーテッド 軸上粒子検出及び／又は差分検出のための粒子検出システム及び方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002525567A (ja) 1998-09-11 2002-08-13 フェムトメトリクス，インコーポレイテッド パルス空気サンプラー
US20110132108A1 (en) 2009-07-13 2011-06-09 Enertechnix, Inc Particle Interrogation Devices and Methods
WO2013080209A1 (en) 2011-12-01 2013-06-06 P.M.L. - Particles Monitoring Technologies Ltd. Detection scheme for particle size and concentration measurement
JP2014125494A (ja) 2012-12-25 2014-07-07 Toray Ind Inc エポキシ樹脂硬化物微粒子の金属酸化物含有水分散液及びその製造方法

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JP2021536001A (ja) 2021-12-23
US20210140867A1 (en) 2021-05-13
US20200072724A1 (en) 2020-03-05
CN112639444A (zh) 2021-04-09
US10928293B2 (en) 2021-02-23
TW202028715A (zh) 2020-08-01
JP2024059885A (ja) 2024-05-01
WO2020051131A1 (en) 2020-03-12
TWI728453B (zh) 2021-05-21
US11428619B2 (en) 2022-08-30
KR20210052506A (ko) 2021-05-10

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