TWI728453B - 在生產儀器及表面上偵測奈米粒子 - Google Patents
在生產儀器及表面上偵測奈米粒子 Download PDFInfo
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- TWI728453B TWI728453B TW108131754A TW108131754A TWI728453B TW I728453 B TWI728453 B TW I728453B TW 108131754 A TW108131754 A TW 108131754A TW 108131754 A TW108131754 A TW 108131754A TW I728453 B TWI728453 B TW I728453B
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- Prior art keywords
- particles
- particle
- particle counter
- optical
- nanoparticles
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/065—Investigating concentration of particle suspensions using condensation nuclei counters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/05—Flow-through cuvettes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N2001/002—Devices for supplying or distributing samples to an analysing apparatus
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N2001/028—Sampling from a surface, swabbing, vaporising
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N2015/0038—Investigating nanoparticles
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- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Dispersion Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862726851P | 2018-09-04 | 2018-09-04 | |
| US62/726,851 | 2018-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202028715A TW202028715A (zh) | 2020-08-01 |
| TWI728453B true TWI728453B (zh) | 2021-05-21 |
Family
ID=69640603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW108131754A TWI728453B (zh) | 2018-09-04 | 2019-09-03 | 在生產儀器及表面上偵測奈米粒子 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US10928293B2 (enExample) |
| JP (2) | JP7504866B2 (enExample) |
| KR (1) | KR20210052506A (enExample) |
| CN (1) | CN112639444A (enExample) |
| TW (1) | TWI728453B (enExample) |
| WO (1) | WO2020051131A1 (enExample) |
Families Citing this family (26)
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|---|---|---|---|---|
| KR102104987B1 (ko) | 2011-12-01 | 2020-04-28 | 파티클 머슈어링 시스템즈, 인크. | 입자 크기 및 농도 측정을 위한 검출 스킴 |
| ITRM20130128U1 (it) | 2013-07-23 | 2015-01-24 | Particle Measuring Systems S R L | Dispositivo per il campionamento microbico dell'aria |
| KR102601473B1 (ko) | 2017-10-26 | 2023-11-10 | 파티클 머슈어링 시스템즈, 인크. | 입자 측정을 위한 시스템 및 방법 |
| KR20210052506A (ko) | 2018-09-04 | 2021-05-10 | 파티클 머슈어링 시스템즈, 인크. | 생산 장비 및 표면에서 나노입자 검출 |
| KR102793378B1 (ko) * | 2018-09-12 | 2025-04-08 | 램 리써치 코포레이션 | 입자들을 측정하기 위한 방법 및 장치 |
| US11385161B2 (en) | 2018-11-12 | 2022-07-12 | Particle Measuring Systems, Inc. | Calibration verification for optical particle analyzers |
| US11181455B2 (en) | 2018-11-12 | 2021-11-23 | Particle Measuring Systems, Inc. | Calibration verification for optical particle analyzers |
| US10908059B2 (en) | 2018-11-16 | 2021-02-02 | Particle Measuring Systems, Inc. | Slurry monitor coupling bulk size distribution and single particle detection |
| WO2020102032A1 (en) | 2018-11-16 | 2020-05-22 | Particle Measuring Systems, Inc. | Particle sampling systems and methods for robotic controlled manufacturing barrier systems |
| WO2020219841A1 (en) | 2019-04-25 | 2020-10-29 | Particle Measuring Systems, Inc. | Particle detection systems and methods for on-axis particle detection and/or differential detection |
| US11441974B2 (en) * | 2019-08-01 | 2022-09-13 | Applied Materials, Inc. | Detection of surface particles on chamber components with carbon dioxide |
| CN114270165B (zh) | 2019-08-26 | 2024-08-27 | 粒子监测系统有限公司 | 触发式采样系统和方法 |
| CN114466704A (zh) | 2019-10-07 | 2022-05-10 | 粒子监测系统有限公司 | 抗微生物颗粒检测器 |
| WO2021071792A1 (en) | 2019-10-07 | 2021-04-15 | Particle Measuring Systems, Inc. | Particle detectors with remote alarm monitoring and control |
| IT201900020248A1 (it) | 2019-11-04 | 2021-05-04 | Particle Measuring Systems S R L | Dispositivo di monitoraggio mobile per aree a contaminazione controllata |
| KR102886900B1 (ko) | 2019-11-22 | 2025-11-14 | 파티클 머슈어링 시스템즈, 인크. | 간섭 입자 검출 및 작은 크기의 입자들 검출을 위한 고급 시스템 및 방법 |
| TWI801797B (zh) | 2020-01-21 | 2023-05-11 | 美商粒子監測系統有限公司 | 撞擊器及用於對來自一流體流之生物顆粒取樣之方法 |
| EP4356105A4 (en) | 2021-06-15 | 2025-05-07 | Particle Measuring Systems, Inc. | MODULAR PARTICLE COUNTER WITH DOCKING STATION |
| JP2024522459A (ja) | 2021-06-15 | 2024-06-21 | パーティクル・メージャーリング・システムズ・インコーポレーテッド | コンパクトなインテリジェントエアロゾルおよび流体マニホールド |
| WO2022266029A1 (en) * | 2021-06-15 | 2022-12-22 | Particle Measuring Systems, Inc. | Condensation particle counters and methods of use |
| US12326393B2 (en) | 2022-01-21 | 2025-06-10 | Particle Measuring Systems, Inc. | Enhanced dual-pass and multi-pass particle detection |
| EP4257948A1 (en) | 2022-04-04 | 2023-10-11 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO | Method and system for inspecting a surface |
| CN114965229B (zh) * | 2022-04-28 | 2025-07-29 | 上海纬冉科技有限公司 | 进样仓测量方法、装置、计算机设备和存储介质 |
| WO2024218516A1 (en) * | 2023-04-19 | 2024-10-24 | Smiths Detection-Watford Limited | Communications adapter for detection device and communications method for a detection device |
| US12461010B2 (en) | 2023-11-16 | 2025-11-04 | Particle Measuring Systems, Inc. | Systems and methods for reducing false positive particle detection events in a particle detector |
| US20250208018A1 (en) * | 2023-12-20 | 2025-06-26 | Kang-Ho Ahn | Condensation particle counter and system including same |
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| TW201905465A (zh) * | 2017-06-20 | 2019-02-01 | 美商五角科技集團股份有限公司 | 高解析度表面粒子檢測器 |
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| US20210140867A1 (en) | 2021-05-13 |
| US10928293B2 (en) | 2021-02-23 |
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| US11428619B2 (en) | 2022-08-30 |
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| US20200072724A1 (en) | 2020-03-05 |
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