JP7495043B2 - 多結晶膜の形成方法およびレーザ結晶化装置 - Google Patents
多結晶膜の形成方法およびレーザ結晶化装置 Download PDFInfo
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- JP7495043B2 JP7495043B2 JP2020002754A JP2020002754A JP7495043B2 JP 7495043 B2 JP7495043 B2 JP 7495043B2 JP 2020002754 A JP2020002754 A JP 2020002754A JP 2020002754 A JP2020002754 A JP 2020002754A JP 7495043 B2 JP7495043 B2 JP 7495043B2
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- Thin Film Transistor (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
(レーザ結晶化装置および多結晶膜の形成方法)
図5から図10は、本発明の第1の実施の形態に係るレーザ結晶化装置10およびこのレーザ結晶化装置10を用いた多結晶膜の形成方法を示す。なお、本実施の形態においては、非晶質膜として非晶質シリコン薄膜20を用い、形成される多結晶膜は多結晶シリコン膜30である。
図11-1から図11-3は、本発明の第2の実施の形態に係る多結晶膜の形成方法および多結晶膜としてのアルミニウム膜40Cを示す。
図12は、第1の実施の形態に係る多結晶シリコン膜30をチャネル領域として用いたボトムゲート方式の薄膜トランジスタ50を示している。
以上、本発明の実施の形態について説明したが、この実施の形態の開示の一部をなす論述および図面はこの発明を限定するものであると理解すべきではない。この開示から当業者には様々な代替実施の形態、実施例および運用技術が明らかとなろう。
G 放射方向
1 マスク
1A ガラス基板
1B 遮光領域
2 非晶質膜
3 非照射領域
3A 微結晶領域(種結晶形成領域)
3B 周縁部分
10 レーザ結晶化装置
11 レーザ光源
12-1,12-2,12-3 マスク
12A ガラス基板
12B 遮光領域
14 レンズ
20 非晶質シリコン薄膜
30 多結晶シリコン膜
31 結晶粒
31A 微結晶領域
31B 結晶成長部
32 粒界面
33 未結晶成長領域
40A アルミニウム膜(微結晶構造)
40B アルミニウム膜(微結晶領域を結晶核として成長する段階)
40C アルミニウム膜(多結晶膜)
41 微結晶
41A 微結晶領域
41B 結晶成長部
50 薄膜トランジスタ(ボトムゲート方式)
60 薄膜トランジスタ(トップゲート方式)
Claims (6)
- 非晶質膜にマスクを介してレーザ光を照射して多数の結晶粒を膜面方向に沿って互いに隣接するように均等な配置に形成する多結晶膜の形成方法であって、
前記マスクは、前記非晶質膜の膜表面に対して、前記非晶質膜に均等な配置に設定された種結晶形成領域に対して、光強度を小さくするように光変調を行うように設定され、
前記種結晶形成領域を種結晶として前記結晶粒を成長させ、
互いに隣接する前記結晶粒同士を区画する粒界面における前記膜面方向の両端部に未結晶成長領域を形成する
多結晶膜の形成方法。 - 互いに隣接する前記結晶粒の前記種結晶形成領域同士の距離は、前記膜面方向における前記結晶粒の結晶成長距離の限界長の2倍の距離よりも短く設定され、
前記未結晶成長領域を挟んで隣接する前記結晶粒の前記種結晶形成領域同士の距離は、前記膜面方向における前記結晶粒の結晶成長距離の限界長の2倍の距離よりも長く設定されている
請求項1に記載の多結晶膜の形成方法。 - 前記非晶質膜は、半導体材料、金属材料から選ばれる
請求項1または請求項2に記載の多結晶膜の形成方法。 - レーザ光源と、前記レーザ光源から発振されたレーザ光を変調して、非晶質膜の表面に投影させるマスクと、を備えるレーザ結晶化装置であって、
前記マスクは、前記非晶質膜の膜表面に対して、前記非晶質膜に均等な配置に設定された種結晶形成領域に対して、光強度を小さくするように光変調を行うように設定され、
前記マスクを介して照射されるレーザ光により、前記種結晶形成領域に隣接する領域の前記非晶質膜を溶融させ、前記種結晶形成領域を種結晶として結晶粒を成長させることが可能であり、
互いに隣接する前記結晶粒同士を区画する粒界面における膜面方向の両端部に未結晶成長領域を形成するように設定されている
レーザ結晶化装置。 - 前記マスクは、
互いに隣接する前記結晶粒の前記種結晶形成領域同士の距離が、前記膜面方向における前記結晶粒の結晶成長距離の限界長の2倍の距離よりも短くなり、
前記未結晶成長領域を挟んで隣接する前記結晶粒の前記種結晶形成領域同士の距離は、前記膜面方向における前記結晶粒の結晶成長距離の限界長の2倍の距離よりも長くなるように設定されている
請求項4に記載のレーザ結晶化装置。 - 前記非晶質膜は、半導体材料、金属材料から選ばれる
請求項4または請求項5に記載のレーザ結晶化装置。
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JP2020002754A JP7495043B2 (ja) | 2020-01-10 | 2020-01-10 | 多結晶膜の形成方法およびレーザ結晶化装置 |
US17/791,047 US11791160B2 (en) | 2020-01-10 | 2020-12-15 | Polycrystalline film, method for forming polycrystalline film, laser crystallization device and semiconductor device |
CN202080084865.4A CN114787969A (zh) | 2020-01-10 | 2020-12-15 | 多晶膜、多晶膜的形成方法、激光晶化装置及半导体装置 |
PCT/JP2020/046746 WO2021140849A1 (ja) | 2020-01-10 | 2020-12-15 | 多結晶膜、多結晶膜の形成方法、レーザ結晶化装置、および半導体装置 |
KR1020227016849A KR20220124681A (ko) | 2020-01-10 | 2020-12-15 | 다결정 막, 다결정 막의 형성 방법, 레이저 결정화 장치 및 반도체 장치 |
TW109145442A TW202133232A (zh) | 2020-01-10 | 2020-12-22 | 多晶膜、多晶膜之形成方法、雷射結晶化裝置、及半導體裝置 |
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Citations (4)
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JP2007281465A (ja) | 2006-04-06 | 2007-10-25 | Boe Hydis Technology Co Ltd | 多結晶膜の形成方法 |
JP2009099797A (ja) | 2007-10-17 | 2009-05-07 | Advanced Lcd Technologies Development Center Co Ltd | 半導体薄膜の結晶化方法、薄膜半導体装置の製造方法及び液晶表示装置の製造方法 |
JP2012019231A (ja) | 2011-09-20 | 2012-01-26 | Japan Steel Works Ltd:The | アモルファス膜の結晶化方法および装置 |
JP5534402B2 (ja) | 2009-11-05 | 2014-07-02 | 株式会社ブイ・テクノロジー | 低温ポリシリコン膜の形成装置及び方法 |
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JP2505764B2 (ja) * | 1986-09-01 | 1996-06-12 | 株式会社日立製作所 | 単結晶半導体薄膜の形成方法 |
JPH05190449A (ja) * | 1992-01-09 | 1993-07-30 | Nippondenso Co Ltd | 半導体薄膜の製造方法 |
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JP2007281465A (ja) | 2006-04-06 | 2007-10-25 | Boe Hydis Technology Co Ltd | 多結晶膜の形成方法 |
JP2009099797A (ja) | 2007-10-17 | 2009-05-07 | Advanced Lcd Technologies Development Center Co Ltd | 半導体薄膜の結晶化方法、薄膜半導体装置の製造方法及び液晶表示装置の製造方法 |
JP5534402B2 (ja) | 2009-11-05 | 2014-07-02 | 株式会社ブイ・テクノロジー | 低温ポリシリコン膜の形成装置及び方法 |
JP2012019231A (ja) | 2011-09-20 | 2012-01-26 | Japan Steel Works Ltd:The | アモルファス膜の結晶化方法および装置 |
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JP2021111697A (ja) | 2021-08-02 |
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