JP7485778B2 - 真空シール装置、及び、駆動伝達装置 - Google Patents

真空シール装置、及び、駆動伝達装置 Download PDF

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Publication number
JP7485778B2
JP7485778B2 JP2022558877A JP2022558877A JP7485778B2 JP 7485778 B2 JP7485778 B2 JP 7485778B2 JP 2022558877 A JP2022558877 A JP 2022558877A JP 2022558877 A JP2022558877 A JP 2022558877A JP 7485778 B2 JP7485778 B2 JP 7485778B2
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JP
Japan
Prior art keywords
seal
housing
rotation transmission
vacuum
transmission member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022558877A
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English (en)
Japanese (ja)
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JPWO2022091550A1 (zh
Inventor
孝治 久保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nabtesco Corp
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Nabtesco Corp
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Publication date
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Publication of JPWO2022091550A1 publication Critical patent/JPWO2022091550A1/ja
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3204—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip
    • F16J15/3232—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings with at least one lip having two or more lips
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/324—Arrangements for lubrication or cooling of the sealing itself
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/32—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings
    • F16J15/3248—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings provided with casings or supports
    • F16J15/3252—Sealings between relatively-moving surfaces with elastic sealings, e.g. O-rings provided with casings or supports with rigid casings or supports

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sealing Devices (AREA)
  • General Details Of Gearings (AREA)
  • Sealing Of Bearings (AREA)
  • Auxiliary Devices For And Details Of Packaging Control (AREA)
  • Vacuum Packaging (AREA)
JP2022558877A 2020-10-28 2021-08-26 真空シール装置、及び、駆動伝達装置 Active JP7485778B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020180316 2020-10-28
JP2020180316 2020-10-28
PCT/JP2021/031338 WO2022091550A1 (ja) 2020-10-28 2021-08-26 真空シール装置、及び、駆動伝達装置

Publications (2)

Publication Number Publication Date
JPWO2022091550A1 JPWO2022091550A1 (zh) 2022-05-05
JP7485778B2 true JP7485778B2 (ja) 2024-05-16

Family

ID=81382292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022558877A Active JP7485778B2 (ja) 2020-10-28 2021-08-26 真空シール装置、及び、駆動伝達装置

Country Status (5)

Country Link
JP (1) JP7485778B2 (zh)
KR (1) KR20230070290A (zh)
CN (1) CN116324235A (zh)
TW (1) TWI824286B (zh)
WO (1) WO2022091550A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023173068A (ja) * 2022-05-25 2023-12-07 ナブテスコ株式会社 回転導入機

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007080986A1 (ja) 2006-01-13 2007-07-19 Nabtesco Corporation 冷却循環通路を備えた基板搬送用ロボットの駆動装置
JP3217649U (ja) 2018-06-12 2018-08-23 Nok株式会社 ユニバーサルジョイント用シール
JP2020144068A (ja) 2019-03-08 2020-09-10 内山工業株式会社 磁気エンコーダ及びこれを備えた密封装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994001354A1 (en) * 1992-07-07 1994-01-20 Ebara Corporation Magnetically levitated carrying apparatus
JP2004084920A (ja) * 2002-07-03 2004-03-18 Ts Corporation 真空用歯車装置
US8293066B2 (en) * 2006-09-19 2012-10-23 Brooks Automation, Inc. Apparatus and methods for transporting and processing substrates
JP6307220B2 (ja) * 2013-03-19 2018-04-04 株式会社日立ハイテクノロジーズ プラズマ処理装置およびプラズマ処理方法
JP6302758B2 (ja) * 2014-06-10 2018-03-28 株式会社ディスコ チャックテーブル
CN106373907B (zh) * 2015-07-22 2019-01-08 中微半导体设备(上海)有限公司 一种真空锁系统及其对基片的处理方法
KR102060400B1 (ko) * 2018-02-13 2020-02-11 씰링크 주식회사 직선운동 로터리 유니온

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007080986A1 (ja) 2006-01-13 2007-07-19 Nabtesco Corporation 冷却循環通路を備えた基板搬送用ロボットの駆動装置
JP3217649U (ja) 2018-06-12 2018-08-23 Nok株式会社 ユニバーサルジョイント用シール
JP2020144068A (ja) 2019-03-08 2020-09-10 内山工業株式会社 磁気エンコーダ及びこれを備えた密封装置

Also Published As

Publication number Publication date
CN116324235A (zh) 2023-06-23
TW202217172A (zh) 2022-05-01
WO2022091550A1 (ja) 2022-05-05
KR20230070290A (ko) 2023-05-22
JPWO2022091550A1 (zh) 2022-05-05
TWI824286B (zh) 2023-12-01

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