JP7473429B2 - レーザー加工装置 - Google Patents

レーザー加工装置 Download PDF

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Publication number
JP7473429B2
JP7473429B2 JP2020151919A JP2020151919A JP7473429B2 JP 7473429 B2 JP7473429 B2 JP 7473429B2 JP 2020151919 A JP2020151919 A JP 2020151919A JP 2020151919 A JP2020151919 A JP 2020151919A JP 7473429 B2 JP7473429 B2 JP 7473429B2
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JP
Japan
Prior art keywords
air
nozzle
flow path
sub
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020151919A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022046068A (ja
Inventor
良太 後藤
宏充 吉元
将人 寺島
悠介 水永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Disco Corp
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Priority to JP2020151919A priority Critical patent/JP7473429B2/ja
Priority to KR1020210108404A priority patent/KR20220033983A/ko
Priority to CN202111030378.2A priority patent/CN114248011A/zh
Priority to TW110133140A priority patent/TW202211320A/zh
Publication of JP2022046068A publication Critical patent/JP2022046068A/ja
Application granted granted Critical
Publication of JP7473429B2 publication Critical patent/JP7473429B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/0042—Devices for removing chips
    • B23Q11/005—Devices for removing chips by blowing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Dicing (AREA)
JP2020151919A 2020-09-10 2020-09-10 レーザー加工装置 Active JP7473429B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2020151919A JP7473429B2 (ja) 2020-09-10 2020-09-10 レーザー加工装置
KR1020210108404A KR20220033983A (ko) 2020-09-10 2021-08-18 레이저 가공 장치
CN202111030378.2A CN114248011A (zh) 2020-09-10 2021-09-03 激光加工装置
TW110133140A TW202211320A (zh) 2020-09-10 2021-09-07 雷射加工裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020151919A JP7473429B2 (ja) 2020-09-10 2020-09-10 レーザー加工装置

Publications (2)

Publication Number Publication Date
JP2022046068A JP2022046068A (ja) 2022-03-23
JP7473429B2 true JP7473429B2 (ja) 2024-04-23

Family

ID=80779767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020151919A Active JP7473429B2 (ja) 2020-09-10 2020-09-10 レーザー加工装置

Country Status (4)

Country Link
JP (1) JP7473429B2 (ko)
KR (1) KR20220033983A (ko)
CN (1) CN114248011A (ko)
TW (1) TW202211320A (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240078842A (ko) 2022-11-28 2024-06-04 김형근 레이저 가공장치
KR102578688B1 (ko) * 2023-04-20 2023-09-14 제놉스 주식회사 보호 윈도우 교체 시기 모니터링 기능이 구비된 에프세타 렌즈 모듈

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004306106A (ja) 2003-04-09 2004-11-04 Babcock Hitachi Kk レーザ加工ヘッド
JP2007216281A (ja) 2006-02-20 2007-08-30 Nissan Motor Co Ltd レーザ加工ヘッドおよびレーザ加工方法
JP2011121099A (ja) 2009-12-11 2011-06-23 Disco Abrasive Syst Ltd レーザー加工装置
WO2017203862A1 (ja) 2016-05-23 2017-11-30 パナソニックＩｐマネジメント株式会社 レーザ溶接装置、およびレーザ溶接方法
WO2019230193A1 (ja) 2018-05-31 2019-12-05 パナソニックＩｐマネジメント株式会社 防汚ガス供給装置及びレーザ加工ヘッドの防汚方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004306106A (ja) 2003-04-09 2004-11-04 Babcock Hitachi Kk レーザ加工ヘッド
JP2007216281A (ja) 2006-02-20 2007-08-30 Nissan Motor Co Ltd レーザ加工ヘッドおよびレーザ加工方法
JP2011121099A (ja) 2009-12-11 2011-06-23 Disco Abrasive Syst Ltd レーザー加工装置
WO2017203862A1 (ja) 2016-05-23 2017-11-30 パナソニックＩｐマネジメント株式会社 レーザ溶接装置、およびレーザ溶接方法
WO2019230193A1 (ja) 2018-05-31 2019-12-05 パナソニックＩｐマネジメント株式会社 防汚ガス供給装置及びレーザ加工ヘッドの防汚方法

Also Published As

Publication number Publication date
CN114248011A (zh) 2022-03-29
JP2022046068A (ja) 2022-03-23
KR20220033983A (ko) 2022-03-17
TW202211320A (zh) 2022-03-16

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