JP7464116B2 - 弾性波装置 - Google Patents

弾性波装置 Download PDF

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Publication number
JP7464116B2
JP7464116B2 JP2022526936A JP2022526936A JP7464116B2 JP 7464116 B2 JP7464116 B2 JP 7464116B2 JP 2022526936 A JP2022526936 A JP 2022526936A JP 2022526936 A JP2022526936 A JP 2022526936A JP 7464116 B2 JP7464116 B2 JP 7464116B2
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Japan
Prior art keywords
mass
electrode
film
electrode fingers
elastic wave
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JP2022526936A
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English (en)
Japanese (ja)
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JPWO2021241364A5 (https=
JPWO2021241364A1 (https=
Inventor
克也 大門
浩司 山本
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14576—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger
    • H03H9/14582—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger the last fingers having a different pitch
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/643—Means for obtaining a particular transfer characteristic the transfer characteristic being determined by reflective or coupling array characteristics

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2022526936A 2020-05-27 2021-05-19 弾性波装置 Active JP7464116B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020092069 2020-05-27
JP2020092069 2020-05-27
PCT/JP2021/019015 WO2021241364A1 (ja) 2020-05-27 2021-05-19 弾性波装置

Publications (3)

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JPWO2021241364A1 JPWO2021241364A1 (https=) 2021-12-02
JPWO2021241364A5 JPWO2021241364A5 (https=) 2023-01-24
JP7464116B2 true JP7464116B2 (ja) 2024-04-09

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ID=78744643

Family Applications (1)

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JP2022526936A Active JP7464116B2 (ja) 2020-05-27 2021-05-19 弾性波装置

Country Status (5)

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US (1) US20230071909A1 (https=)
JP (1) JP7464116B2 (https=)
KR (1) KR102771817B1 (https=)
CN (1) CN115668768B (https=)
WO (1) WO2021241364A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018131952A1 (de) * 2018-12-12 2020-06-18 RF360 Europe GmbH Elektroakustischer Resonator mit unterdrückter Anregungtransversaler Spaltmoden und verringerten transversalen Moden
WO2022138328A1 (ja) * 2020-12-23 2022-06-30 株式会社村田製作所 弾性波装置
WO2023234144A1 (ja) * 2022-05-30 2023-12-07 株式会社村田製作所 弾性波装置
CN120476549A (zh) * 2023-01-18 2025-08-12 株式会社村田制作所 弹性波装置以及复合滤波器装置
WO2025094971A1 (ja) * 2023-11-01 2025-05-08 株式会社村田製作所 弾性表面波共振子、弾性表面波フィルタ及びマルチプレクサ

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012186808A (ja) 2011-03-07 2012-09-27 Triquint Semiconductor Inc トリミング効果とピストンモードでの不安定性を最小化する音響波導波装置および方法
WO2015182522A1 (ja) 2014-05-26 2015-12-03 株式会社村田製作所 弾性波装置
US20170155373A1 (en) 2015-11-30 2017-06-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (saw) resonator structure with dielectric material below electrode fingers
WO2018025962A1 (ja) 2016-08-05 2018-02-08 株式会社村田製作所 弾性表面波フィルタ、高周波モジュールおよびマルチプレクサ
WO2018116680A1 (ja) 2016-12-20 2018-06-28 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
WO2018123657A1 (ja) 2016-12-28 2018-07-05 株式会社村田製作所 縦結合共振子型弾性波フィルタ
WO2020045442A1 (ja) 2018-08-30 2020-03-05 株式会社村田製作所 弾性波装置及びラダー型フィルタ
WO2020100744A1 (ja) 2018-11-16 2020-05-22 株式会社村田製作所 弾性波装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11261370A (ja) * 1998-03-11 1999-09-24 Nec Corp 弾性表面波デバイス
JP2005080202A (ja) * 2003-09-03 2005-03-24 Murata Mfg Co Ltd 弾性表面波素子
JP4583243B2 (ja) 2005-05-27 2010-11-17 京セラ株式会社 弾性表面波共振器および弾性表面波装置並びに通信装置
WO2014192756A1 (ja) * 2013-05-29 2014-12-04 株式会社村田製作所 弾性波装置
JP6355328B2 (ja) * 2013-12-19 2018-07-11 太陽誘電株式会社 弾性表面波デバイス及びフィルタ
WO2017110586A1 (ja) 2015-12-25 2017-06-29 株式会社村田製作所 弾性波装置
CN110114973B (zh) * 2016-12-26 2024-04-26 株式会社村田制作所 弹性波装置
JPWO2018131360A1 (ja) * 2017-01-10 2019-11-07 株式会社村田製作所 弾性波装置

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012186808A (ja) 2011-03-07 2012-09-27 Triquint Semiconductor Inc トリミング効果とピストンモードでの不安定性を最小化する音響波導波装置および方法
WO2015182522A1 (ja) 2014-05-26 2015-12-03 株式会社村田製作所 弾性波装置
US20170155373A1 (en) 2015-11-30 2017-06-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (saw) resonator structure with dielectric material below electrode fingers
WO2018025962A1 (ja) 2016-08-05 2018-02-08 株式会社村田製作所 弾性表面波フィルタ、高周波モジュールおよびマルチプレクサ
WO2018116680A1 (ja) 2016-12-20 2018-06-28 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
WO2018123657A1 (ja) 2016-12-28 2018-07-05 株式会社村田製作所 縦結合共振子型弾性波フィルタ
WO2020045442A1 (ja) 2018-08-30 2020-03-05 株式会社村田製作所 弾性波装置及びラダー型フィルタ
WO2020100744A1 (ja) 2018-11-16 2020-05-22 株式会社村田製作所 弾性波装置

Also Published As

Publication number Publication date
WO2021241364A1 (ja) 2021-12-02
CN115668768A (zh) 2023-01-31
US20230071909A1 (en) 2023-03-09
KR102771817B1 (ko) 2025-02-24
CN115668768B (zh) 2025-12-23
KR20220160662A (ko) 2022-12-06
JPWO2021241364A1 (https=) 2021-12-02

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