KR102771817B1 - 탄성파 장치 - Google Patents

탄성파 장치 Download PDF

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Publication number
KR102771817B1
KR102771817B1 KR1020227037783A KR20227037783A KR102771817B1 KR 102771817 B1 KR102771817 B1 KR 102771817B1 KR 1020227037783 A KR1020227037783 A KR 1020227037783A KR 20227037783 A KR20227037783 A KR 20227037783A KR 102771817 B1 KR102771817 B1 KR 102771817B1
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KR
South Korea
Prior art keywords
mass
electrode
elastic wave
film
pitch
Prior art date
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Application number
KR1020227037783A
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English (en)
Korean (ko)
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KR20220160662A (ko
Inventor
카츠야 다이몬
코지 야마모토
Original Assignee
가부시키가이샤 무라타 세이사쿠쇼
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Publication of KR20220160662A publication Critical patent/KR20220160662A/ko
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Publication of KR102771817B1 publication Critical patent/KR102771817B1/ko
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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14576—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger
    • H03H9/14582—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger the last fingers having a different pitch
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/643—Means for obtaining a particular transfer characteristic the transfer characteristic being determined by reflective or coupling array characteristics

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
KR1020227037783A 2020-05-27 2021-05-19 탄성파 장치 Active KR102771817B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020092069 2020-05-27
JPJP-P-2020-092069 2020-05-27
PCT/JP2021/019015 WO2021241364A1 (ja) 2020-05-27 2021-05-19 弾性波装置

Publications (2)

Publication Number Publication Date
KR20220160662A KR20220160662A (ko) 2022-12-06
KR102771817B1 true KR102771817B1 (ko) 2025-02-24

Family

ID=78744643

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227037783A Active KR102771817B1 (ko) 2020-05-27 2021-05-19 탄성파 장치

Country Status (5)

Country Link
US (1) US20230071909A1 (https=)
JP (1) JP7464116B2 (https=)
KR (1) KR102771817B1 (https=)
CN (1) CN115668768B (https=)
WO (1) WO2021241364A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018131952A1 (de) * 2018-12-12 2020-06-18 RF360 Europe GmbH Elektroakustischer Resonator mit unterdrückter Anregungtransversaler Spaltmoden und verringerten transversalen Moden
WO2022138328A1 (ja) * 2020-12-23 2022-06-30 株式会社村田製作所 弾性波装置
WO2023234144A1 (ja) * 2022-05-30 2023-12-07 株式会社村田製作所 弾性波装置
CN120476549A (zh) * 2023-01-18 2025-08-12 株式会社村田制作所 弹性波装置以及复合滤波器装置
WO2025094971A1 (ja) * 2023-11-01 2025-05-08 株式会社村田製作所 弾性表面波共振子、弾性表面波フィルタ及びマルチプレクサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005080202A (ja) 2003-09-03 2005-03-24 Murata Mfg Co Ltd 弾性表面波素子
US20150180451A1 (en) 2013-12-19 2015-06-25 Taiyo Yuden Co., Ltd. Surface acoustic wave device and filter

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11261370A (ja) * 1998-03-11 1999-09-24 Nec Corp 弾性表面波デバイス
JP4583243B2 (ja) 2005-05-27 2010-11-17 京セラ株式会社 弾性表面波共振器および弾性表面波装置並びに通信装置
CN102684639B (zh) * 2011-03-07 2016-08-17 特里奎恩特半导体公司 使微调影响和活塞波型不稳定性最小化的声波导器件和方法
WO2014192756A1 (ja) * 2013-05-29 2014-12-04 株式会社村田製作所 弾性波装置
KR101838085B1 (ko) * 2014-05-26 2018-03-13 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
US20170155373A1 (en) * 2015-11-30 2017-06-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (saw) resonator structure with dielectric material below electrode fingers
WO2017110586A1 (ja) 2015-12-25 2017-06-29 株式会社村田製作所 弾性波装置
WO2018025962A1 (ja) * 2016-08-05 2018-02-08 株式会社村田製作所 弾性表面波フィルタ、高周波モジュールおよびマルチプレクサ
WO2018116680A1 (ja) * 2016-12-20 2018-06-28 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
CN110114973B (zh) * 2016-12-26 2024-04-26 株式会社村田制作所 弹性波装置
CN110140296B (zh) * 2016-12-28 2023-01-13 株式会社村田制作所 纵耦合谐振器型弹性波滤波器
JPWO2018131360A1 (ja) * 2017-01-10 2019-11-07 株式会社村田製作所 弾性波装置
WO2020045442A1 (ja) * 2018-08-30 2020-03-05 株式会社村田製作所 弾性波装置及びラダー型フィルタ
CN112997403B (zh) * 2018-11-16 2025-01-17 株式会社村田制作所 弹性波装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005080202A (ja) 2003-09-03 2005-03-24 Murata Mfg Co Ltd 弾性表面波素子
US20150180451A1 (en) 2013-12-19 2015-06-25 Taiyo Yuden Co., Ltd. Surface acoustic wave device and filter

Also Published As

Publication number Publication date
WO2021241364A1 (ja) 2021-12-02
CN115668768A (zh) 2023-01-31
US20230071909A1 (en) 2023-03-09
CN115668768B (zh) 2025-12-23
JP7464116B2 (ja) 2024-04-09
KR20220160662A (ko) 2022-12-06
JPWO2021241364A1 (https=) 2021-12-02

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