CN115668768B - 弹性波装置 - Google Patents

弹性波装置

Info

Publication number
CN115668768B
CN115668768B CN202180037473.7A CN202180037473A CN115668768B CN 115668768 B CN115668768 B CN 115668768B CN 202180037473 A CN202180037473 A CN 202180037473A CN 115668768 B CN115668768 B CN 115668768B
Authority
CN
China
Prior art keywords
mass
elastic wave
electrode
wave device
electrode fingers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202180037473.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN115668768A (zh
Inventor
大门克也
山本浩司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN115668768A publication Critical patent/CN115668768A/zh
Application granted granted Critical
Publication of CN115668768B publication Critical patent/CN115668768B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14576—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger
    • H03H9/14582—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger the last fingers having a different pitch
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/643—Means for obtaining a particular transfer characteristic the transfer characteristic being determined by reflective or coupling array characteristics

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
CN202180037473.7A 2020-05-27 2021-05-19 弹性波装置 Active CN115668768B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020092069 2020-05-27
JP2020-092069 2020-05-27
PCT/JP2021/019015 WO2021241364A1 (ja) 2020-05-27 2021-05-19 弾性波装置

Publications (2)

Publication Number Publication Date
CN115668768A CN115668768A (zh) 2023-01-31
CN115668768B true CN115668768B (zh) 2025-12-23

Family

ID=78744643

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180037473.7A Active CN115668768B (zh) 2020-05-27 2021-05-19 弹性波装置

Country Status (5)

Country Link
US (1) US20230071909A1 (https=)
JP (1) JP7464116B2 (https=)
KR (1) KR102771817B1 (https=)
CN (1) CN115668768B (https=)
WO (1) WO2021241364A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018131952A1 (de) * 2018-12-12 2020-06-18 RF360 Europe GmbH Elektroakustischer Resonator mit unterdrückter Anregungtransversaler Spaltmoden und verringerten transversalen Moden
WO2022138328A1 (ja) * 2020-12-23 2022-06-30 株式会社村田製作所 弾性波装置
WO2023234144A1 (ja) * 2022-05-30 2023-12-07 株式会社村田製作所 弾性波装置
CN120476549A (zh) * 2023-01-18 2025-08-12 株式会社村田制作所 弹性波装置以及复合滤波器装置
WO2025094971A1 (ja) * 2023-11-01 2025-05-08 株式会社村田製作所 弾性表面波共振子、弾性表面波フィルタ及びマルチプレクサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106464229A (zh) * 2014-05-26 2017-02-22 株式会社村田制作所 弹性波装置
CN110140296A (zh) * 2016-12-28 2019-08-16 株式会社村田制作所 纵耦合谐振器型弹性波滤波器

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11261370A (ja) * 1998-03-11 1999-09-24 Nec Corp 弾性表面波デバイス
JP2005080202A (ja) * 2003-09-03 2005-03-24 Murata Mfg Co Ltd 弾性表面波素子
JP4583243B2 (ja) 2005-05-27 2010-11-17 京セラ株式会社 弾性表面波共振器および弾性表面波装置並びに通信装置
CN102684639B (zh) * 2011-03-07 2016-08-17 特里奎恩特半导体公司 使微调影响和活塞波型不稳定性最小化的声波导器件和方法
WO2014192756A1 (ja) * 2013-05-29 2014-12-04 株式会社村田製作所 弾性波装置
JP6355328B2 (ja) * 2013-12-19 2018-07-11 太陽誘電株式会社 弾性表面波デバイス及びフィルタ
US20170155373A1 (en) * 2015-11-30 2017-06-01 Avago Technologies General Ip (Singapore) Pte. Ltd. Surface acoustic wave (saw) resonator structure with dielectric material below electrode fingers
WO2017110586A1 (ja) 2015-12-25 2017-06-29 株式会社村田製作所 弾性波装置
WO2018025962A1 (ja) * 2016-08-05 2018-02-08 株式会社村田製作所 弾性表面波フィルタ、高周波モジュールおよびマルチプレクサ
WO2018116680A1 (ja) * 2016-12-20 2018-06-28 株式会社村田製作所 弾性波装置、高周波フロントエンド回路及び通信装置
CN110114973B (zh) * 2016-12-26 2024-04-26 株式会社村田制作所 弹性波装置
JPWO2018131360A1 (ja) * 2017-01-10 2019-11-07 株式会社村田製作所 弾性波装置
WO2020045442A1 (ja) * 2018-08-30 2020-03-05 株式会社村田製作所 弾性波装置及びラダー型フィルタ
CN112997403B (zh) * 2018-11-16 2025-01-17 株式会社村田制作所 弹性波装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106464229A (zh) * 2014-05-26 2017-02-22 株式会社村田制作所 弹性波装置
CN110140296A (zh) * 2016-12-28 2019-08-16 株式会社村田制作所 纵耦合谐振器型弹性波滤波器

Also Published As

Publication number Publication date
WO2021241364A1 (ja) 2021-12-02
CN115668768A (zh) 2023-01-31
US20230071909A1 (en) 2023-03-09
KR102771817B1 (ko) 2025-02-24
JP7464116B2 (ja) 2024-04-09
KR20220160662A (ko) 2022-12-06
JPWO2021241364A1 (https=) 2021-12-02

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