JP7461937B2 - 試料分析装置 - Google Patents

試料分析装置 Download PDF

Info

Publication number
JP7461937B2
JP7461937B2 JP2021519434A JP2021519434A JP7461937B2 JP 7461937 B2 JP7461937 B2 JP 7461937B2 JP 2021519434 A JP2021519434 A JP 2021519434A JP 2021519434 A JP2021519434 A JP 2021519434A JP 7461937 B2 JP7461937 B2 JP 7461937B2
Authority
JP
Japan
Prior art keywords
sample
signal
intensity
gas
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021519434A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2020230775A1 (https=
Inventor
貴仁 井上
博 内原
享司 渋谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Publication of JPWO2020230775A1 publication Critical patent/JPWO2020230775A1/ja
Application granted granted Critical
Publication of JP7461937B2 publication Critical patent/JP7461937B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J3/433—Modulation spectrometry; Derivative spectrometry
    • G01J3/4338—Frequency modulated spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/44—Sample treatment involving radiation, e.g. heat
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N2021/3129—Determining multicomponents by multiwavelength light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G01N21/3518—Devices using gas filter correlation techniques; Devices using gas pressure modulation techniques

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2021519434A 2019-05-15 2020-05-12 試料分析装置 Active JP7461937B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019092441 2019-05-15
JP2019092441 2019-05-15
PCT/JP2020/018928 WO2020230775A1 (ja) 2019-05-15 2020-05-12 試料分析装置

Publications (2)

Publication Number Publication Date
JPWO2020230775A1 JPWO2020230775A1 (https=) 2020-11-19
JP7461937B2 true JP7461937B2 (ja) 2024-04-04

Family

ID=73289441

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021519434A Active JP7461937B2 (ja) 2019-05-15 2020-05-12 試料分析装置

Country Status (5)

Country Link
US (1) US12111254B2 (https=)
EP (1) EP3957979B1 (https=)
JP (1) JP7461937B2 (https=)
CN (1) CN113811758A (https=)
WO (1) WO2020230775A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116148309B (zh) * 2023-04-20 2023-08-15 钢研纳克检测技术股份有限公司 一种基于热导-红外法多组合的氧氮氢联测装置及方法
CN117007545A (zh) * 2023-08-11 2023-11-07 内蒙古科技大学 锅炉烟道尾气co2浓度红外吸收检测模型及其构建方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4216508A1 (de) 1992-05-19 1993-11-25 Ortwin Dr Brandt Feststoffanalysengerät (Vorrichtung und Verfahren)
JP2011169753A (ja) 2010-02-18 2011-09-01 Jfe Steel Corp 金属試料中の硫黄の分析方法および分析装置
JP2011220758A (ja) 2010-04-07 2011-11-04 Shimadzu Corp ガス分析装置
WO2012120957A1 (ja) 2011-03-09 2012-09-13 株式会社堀場製作所 ガス分析装置
JP2013134236A (ja) 2011-12-27 2013-07-08 Horiba Ltd ガス計測装置およびガス計測装置における波長変調幅の設定方法。
WO2015045869A1 (ja) 2013-09-25 2015-04-02 株式会社堀場製作所 分析装置及び分析方法
CN108458984A (zh) 2018-05-21 2018-08-28 郑州力创光电技术有限公司 基于光电传感原理的气体绝缘设备在线气体监测控制系统

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265475A (ja) 1993-03-13 1994-09-22 Horiba Ltd 酸素気流中燃焼ガス分析装置
US5984998A (en) * 1997-11-14 1999-11-16 American Iron And Steel Institute Method and apparatus for off-gas composition sensing
US6326620B1 (en) 1999-05-07 2001-12-04 Leco Corporation Switched mode NDIR system
CA2351792C (en) * 2000-06-26 2010-07-27 Murray J. Thomson Method and apparatus for improved process control in combustion applications
US20020152797A1 (en) * 2001-01-09 2002-10-24 Mcandrew James J.F. Gas delivery apparatus and method for monitoring a gas phase species therein
US6827903B2 (en) 2001-10-26 2004-12-07 Leco Corporation Inert gas fusion analyzer
JP3762729B2 (ja) * 2002-09-11 2006-04-05 株式会社堀場製作所 多成分分析装置
EP1750116B1 (en) 2005-08-04 2013-04-17 Axetris AG Gas concentration detection method and device
EP2118638B2 (en) 2007-02-26 2017-08-16 Yokogawa Corporation of America Combustion gas analysis
JP5170034B2 (ja) 2009-08-24 2013-03-27 株式会社島津製作所 ガス分析装置
JP5667912B2 (ja) * 2010-05-18 2015-02-12 株式会社堀場製作所 吸着性ガス分析装置
JP2013050403A (ja) * 2011-08-31 2013-03-14 Shimadzu Corp ガス分析装置
CN104316480B (zh) * 2014-11-06 2016-08-24 中国科学院合肥物质科学研究院 一种含砷金精矿焙烧炉内氧气浓度的激光原位检测系统
WO2016208424A1 (ja) * 2015-06-22 2016-12-29 国立大学法人京都大学 Ｎｄｉｒ式のガスセンサ、ガス分析計、光合成速度測定装置、及び、光合成速度測定方法
JP6651126B2 (ja) * 2015-09-08 2020-02-19 富士電機株式会社 ガス分析計
GB2544507B (en) * 2015-11-18 2017-11-22 Servomex Group Ltd Method and system for reduction of influence of baseline distortion in absorption spectroscopy measurements
JP6513762B2 (ja) 2016-12-15 2019-05-15 株式会社堀場製作所 分析装置、分析装置用プログラム及び分析方法
NO345903B1 (en) 2017-06-16 2021-10-04 Neo Monitors As Chemical analysis method for measurement of tetrafluoromethane, cf4, with improved selectivity
JP6907785B2 (ja) * 2017-07-28 2021-07-21 富士電機株式会社 ガス分析装置
CN109596538B (zh) * 2017-10-03 2023-08-25 株式会社堀场制作所 分析装置和分析方法
JP7075862B2 (ja) 2017-10-16 2022-05-26 株式会社堀場製作所 分析装置
CN109490250B (zh) 2018-11-22 2021-06-25 宁波海尔欣光电科技有限公司 校准激光器的波长的方法及装置、气体浓度分析仪
JP6886507B2 (ja) * 2018-12-26 2021-06-16 株式会社堀場製作所 分析装置、分析装置用プログラム及び分析方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4216508A1 (de) 1992-05-19 1993-11-25 Ortwin Dr Brandt Feststoffanalysengerät (Vorrichtung und Verfahren)
JP2011169753A (ja) 2010-02-18 2011-09-01 Jfe Steel Corp 金属試料中の硫黄の分析方法および分析装置
JP2011220758A (ja) 2010-04-07 2011-11-04 Shimadzu Corp ガス分析装置
WO2012120957A1 (ja) 2011-03-09 2012-09-13 株式会社堀場製作所 ガス分析装置
JP2013134236A (ja) 2011-12-27 2013-07-08 Horiba Ltd ガス計測装置およびガス計測装置における波長変調幅の設定方法。
WO2015045869A1 (ja) 2013-09-25 2015-04-02 株式会社堀場製作所 分析装置及び分析方法
CN108458984A (zh) 2018-05-21 2018-08-28 郑州力创光电技术有限公司 基于光电传感原理的气体绝缘设备在线气体监测控制系统

Also Published As

Publication number Publication date
CN113811758A (zh) 2021-12-17
WO2020230775A1 (ja) 2020-11-19
EP3957979A4 (en) 2023-01-11
JPWO2020230775A1 (https=) 2020-11-19
US20220244176A1 (en) 2022-08-04
US12111254B2 (en) 2024-10-08
EP3957979A1 (en) 2022-02-23
EP3957979B1 (en) 2025-04-16

Similar Documents

Publication Publication Date Title
JP5907442B2 (ja) レーザ式ガス分析計
CN108226064B (zh) 分析装置、计算机可读存储介质和分析方法
CN109596538B (zh) 分析装置和分析方法
JP6886507B2 (ja) 分析装置、分析装置用プログラム及び分析方法
JP7461937B2 (ja) 試料分析装置
CN115667884B (zh) 分析装置、记录介质及分析方法
JP6791214B2 (ja) 分光分析装置
JP7473546B2 (ja) 分析装置
CN118176413A (zh) 分析装置、分析装置用程序以及分析方法
WO2023095876A1 (ja) 分析装置及び分析方法
WO2023095864A1 (ja) 分析装置、分析装置用プログラム及び分析方法
JPWO2023095864A5 (https=)
EP4446728A1 (en) Analysis device and analysis method
JP6028889B2 (ja) レーザ式ガス分析計

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230417

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20231114

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231226

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240109

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240304

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240312

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240325

R150 Certificate of patent or registration of utility model

Ref document number: 7461937

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150