JP7458354B2 - 保持装置 - Google Patents

保持装置 Download PDF

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Publication number
JP7458354B2
JP7458354B2 JP2021150178A JP2021150178A JP7458354B2 JP 7458354 B2 JP7458354 B2 JP 7458354B2 JP 2021150178 A JP2021150178 A JP 2021150178A JP 2021150178 A JP2021150178 A JP 2021150178A JP 7458354 B2 JP7458354 B2 JP 7458354B2
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JP
Japan
Prior art keywords
joint
shear stress
inorganic filler
sample
strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021150178A
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English (en)
Japanese (ja)
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JP2023042825A (ja
Inventor
敦 鈴木
智史 森
絵里 早川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=85724116&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP7458354(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP2021150178A priority Critical patent/JP7458354B2/ja
Publication of JP2023042825A publication Critical patent/JP2023042825A/ja
Priority to JP2024022513A priority patent/JP7612075B2/ja
Application granted granted Critical
Publication of JP7458354B2 publication Critical patent/JP7458354B2/ja
Priority to JP2024164280A priority patent/JP7833507B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP2021150178A 2021-09-15 2021-09-15 保持装置 Active JP7458354B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2021150178A JP7458354B2 (ja) 2021-09-15 2021-09-15 保持装置
JP2024022513A JP7612075B2 (ja) 2021-09-15 2024-02-19 保持装置
JP2024164280A JP7833507B2 (ja) 2021-09-15 2024-09-20 保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021150178A JP7458354B2 (ja) 2021-09-15 2021-09-15 保持装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024022513A Division JP7612075B2 (ja) 2021-09-15 2024-02-19 保持装置

Publications (2)

Publication Number Publication Date
JP2023042825A JP2023042825A (ja) 2023-03-28
JP7458354B2 true JP7458354B2 (ja) 2024-03-29

Family

ID=85724116

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2021150178A Active JP7458354B2 (ja) 2021-09-15 2021-09-15 保持装置
JP2024022513A Active JP7612075B2 (ja) 2021-09-15 2024-02-19 保持装置
JP2024164280A Active JP7833507B2 (ja) 2021-09-15 2024-09-20 保持装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2024022513A Active JP7612075B2 (ja) 2021-09-15 2024-02-19 保持装置
JP2024164280A Active JP7833507B2 (ja) 2021-09-15 2024-09-20 保持装置

Country Status (1)

Country Link
JP (3) JP7458354B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7561164B2 (ja) * 2022-08-01 2024-10-03 日本特殊陶業株式会社 保持装置
WO2024219229A1 (ja) * 2023-04-18 2024-10-24 日本特殊陶業株式会社 保持装置
WO2026058633A1 (ja) * 2024-09-12 2026-03-19 日本碍子株式会社 ウエハ載置台

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007194320A (ja) 2006-01-18 2007-08-02 Sumitomo Osaka Cement Co Ltd 静電チャック装置
JP2008218992A (ja) 2007-02-09 2008-09-18 Ngk Insulators Ltd 接合剤及び半導体支持装置
JP2011222978A (ja) 2010-03-24 2011-11-04 Toto Ltd 静電チャック
JP2020023088A (ja) 2018-08-07 2020-02-13 日本特殊陶業株式会社 複合部材および接着剤組成物
JP2020068219A (ja) 2018-10-22 2020-04-30 日本特殊陶業株式会社 保持装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001315163A (ja) 2000-05-11 2001-11-13 Canon Inc 成形方法
CN102217054B (zh) 2008-11-25 2013-05-08 京瓷株式会社 晶片加热装置、静电卡盘以及晶片加热装置的制造方法
JP6250949B2 (ja) 2013-04-15 2017-12-20 日本特殊陶業株式会社 半導体製造装置用部品及びその製造方法
JP2016050213A (ja) 2014-08-28 2016-04-11 パナソニックＩｐマネジメント株式会社 熱伝導性フィラー、熱伝導性繊維および熱伝導性樹脂
JP7169958B2 (ja) 2019-10-18 2022-11-11 日本特殊陶業株式会社 シリコーン接着剤組成物、シリコーン接着剤組成物の製造方法、および、複合部材

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007194320A (ja) 2006-01-18 2007-08-02 Sumitomo Osaka Cement Co Ltd 静電チャック装置
JP2008218992A (ja) 2007-02-09 2008-09-18 Ngk Insulators Ltd 接合剤及び半導体支持装置
JP2011222978A (ja) 2010-03-24 2011-11-04 Toto Ltd 静電チャック
JP2020023088A (ja) 2018-08-07 2020-02-13 日本特殊陶業株式会社 複合部材および接着剤組成物
JP2020068219A (ja) 2018-10-22 2020-04-30 日本特殊陶業株式会社 保持装置

Also Published As

Publication number Publication date
JP7833507B2 (ja) 2026-03-19
JP2024046684A (ja) 2024-04-03
JP2023042825A (ja) 2023-03-28
JP7612075B2 (ja) 2025-01-10
JP2024175120A (ja) 2024-12-17

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