JP7458164B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7458164B2 JP7458164B2 JP2019192521A JP2019192521A JP7458164B2 JP 7458164 B2 JP7458164 B2 JP 7458164B2 JP 2019192521 A JP2019192521 A JP 2019192521A JP 2019192521 A JP2019192521 A JP 2019192521A JP 7458164 B2 JP7458164 B2 JP 7458164B2
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- 239000004065 semiconductor Substances 0.000 title claims description 66
- 239000010408 film Substances 0.000 claims description 344
- 229910052709 silver Inorganic materials 0.000 claims description 104
- 239000004332 silver Substances 0.000 claims description 104
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 103
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 54
- 230000003287 optical effect Effects 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 18
- 239000010409 thin film Substances 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910017107 AlOx Inorganic materials 0.000 claims 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 21
- 239000001301 oxygen Substances 0.000 description 21
- 229910052760 oxygen Inorganic materials 0.000 description 21
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 20
- 229920005591 polysilicon Polymers 0.000 description 20
- 238000002161 passivation Methods 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 238000001514 detection method Methods 0.000 description 15
- 229910052814 silicon oxide Inorganic materials 0.000 description 15
- 229910052581 Si3N4 Inorganic materials 0.000 description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 11
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 239000011368 organic material Substances 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000005546 reactive sputtering Methods 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 230000001603 reducing effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- -1 Zinc Oxide Nitride Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 150000003378 silver Chemical class 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
- OWOMRZKBDFBMHP-UHFFFAOYSA-N zinc antimony(3+) oxygen(2-) Chemical compound [O--].[Zn++].[Sb+3] OWOMRZKBDFBMHP-UHFFFAOYSA-N 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- TYHJXGDMRRJCRY-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) tin(4+) Chemical compound [O-2].[Zn+2].[Sn+4].[In+3] TYHJXGDMRRJCRY-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
- H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K39/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic radiation-sensitive element covered by group H10K30/00
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K39/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic radiation-sensitive element covered by group H10K30/00
- H10K39/30—Devices controlled by radiation
- H10K39/32—Organic image sensors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/60—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation in which radiation controls flow of current through the devices, e.g. photoresistors
- H10K30/65—Light-sensitive field-effect devices, e.g. phototransistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Electroluminescent Light Sources (AREA)
Description
Claims (17)
- 基板の上に薄膜トランジスタが形成された半導体装置であって、
前記半導体装置は、光センサを有し、
前記光センサは、前記薄膜トランジスタより上層に、アノード、光導電膜、カソードで構成されたフォトダイオードを含み、
前記アノードは、銀膜で形成され、前記銀膜の上に第1のITO膜が形成され、前記第1のITO膜の上にアルミナ(AlOx)膜が形成されていることを特徴とする半導体装置。 - 前記光導電膜は有機光導電膜であることを特徴とする請求項1に記載の半導体装置。
- 前記薄膜トランジスタは、前記基板のセンサ領域に複数形成されており、
前記有機光導電膜と、前記アノードと、前記第1のITO膜と、前記アルミナ(AlOx)膜は、前記センサ領域の全面に一体的に形成され、複数の前記薄膜トランジスタに重なることを特徴とする請求項2に記載の半導体装置。 - 前記第1のITO膜の厚さは、5nm乃至20nmであることを特徴とする請求項2に記載の半導体装置。
- 前記銀膜の厚さは90nm乃至200nmであることを特徴とする請求項4に記載の半導体装置。
- 前記アルミナ(AlOx)膜の厚さは10nm乃至50nmであることを特徴とする請求項5に記載の半導体装置。
- 前記第1のITO膜は非晶質であることを特徴とする請求項6に記載の半導体装置。
- 前記カソードは第2のITO膜で形成され、前記薄膜トランジスタに接続されていることを特徴とする請求項7に記載の半導体装置。
- 前記第2のITO膜は結晶化したITOであることを特徴とする請求項8に記載の半導体装置。
- 光センサを有する半導体装置であって、
基板の上に薄膜トランジスタが形成され、
前記光センサは、前記基板と反対側からの光を検知するものであり、
前記薄膜トランジスタよりも上層にフォトダイオードが形成され、
前記フォトダイオードは、アノード、光導電膜、カソードで構成され、
前記アノードは銀膜で形成され、前記銀膜の上に第1のITO膜が形成され、前記第1のITO膜の上にアルミナ(AlOx)膜が形成されていることを特徴とする半導体装置。 - 前記光導電膜は有機光導電膜であることを特徴とする請求項10に記載の半導体装置。
- 前記第1のITO膜の厚さは、5nm乃至20nmであることを特徴とする請求項10に記載の半導体装置。
- 前記銀膜の厚さは20nm乃至50nmであることを特徴とする請求項12に記載の半導体装置。
- 前記アルミナ(AlOx)膜の厚さは10nm乃至30nmであることを特徴とする請求項13に記載の半導体装置。
- 前記第1のITO膜は非晶質であることを特徴とする請求項14に記載の半導体装置。
- 前記カソードは第2のITO膜で形成され、前記第2のITO膜の下面には、金属または合金で形成された反射電極が存在していることを特徴とする請求項15に記載の半導体装置。
- 前記第2のITO膜は結晶化したITOであることを特徴とする請求項16に記載の半導体装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019192521A JP7458164B2 (ja) | 2019-10-23 | 2019-10-23 | 半導体装置 |
DE112020004244.8T DE112020004244T5 (de) | 2019-10-23 | 2020-09-02 | Halbleitervorrichtung |
PCT/JP2020/033236 WO2021079626A1 (ja) | 2019-10-23 | 2020-09-02 | 半導体装置 |
CN202080074284.2A CN114586162A (zh) | 2019-10-23 | 2020-09-02 | 半导体器件 |
US17/720,366 US20220238825A1 (en) | 2019-10-23 | 2022-04-14 | Semiconductor device |
JP2024041859A JP2024069516A (ja) | 2019-10-23 | 2024-03-18 | 半導体装置 |
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JP2019192521A JP7458164B2 (ja) | 2019-10-23 | 2019-10-23 | 半導体装置 |
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JP2024041859A Division JP2024069516A (ja) | 2019-10-23 | 2024-03-18 | 半導体装置 |
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JP2021068793A JP2021068793A (ja) | 2021-04-30 |
JP7458164B2 true JP7458164B2 (ja) | 2024-03-29 |
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JP2019192521A Active JP7458164B2 (ja) | 2019-10-23 | 2019-10-23 | 半導体装置 |
JP2024041859A Pending JP2024069516A (ja) | 2019-10-23 | 2024-03-18 | 半導体装置 |
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US (1) | US20220238825A1 (ja) |
JP (2) | JP7458164B2 (ja) |
CN (1) | CN114586162A (ja) |
DE (1) | DE112020004244T5 (ja) |
WO (1) | WO2021079626A1 (ja) |
Citations (4)
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JP2013073965A (ja) | 2011-09-26 | 2013-04-22 | Toshiba Corp | 光電変換装置及びその製造方法 |
JP2013251173A (ja) | 2012-06-01 | 2013-12-12 | Canon Inc | 表示装置の製造方法及び表示装置 |
JP2016021380A (ja) | 2014-06-17 | 2016-02-04 | キヤノン株式会社 | 有機発光装置及びその製造方法 |
US20190027550A1 (en) | 2017-07-24 | 2019-01-24 | Samsung Display Co., Ltd. | Display device and method of manufacturing a display device |
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JP2000276950A (ja) * | 1999-03-19 | 2000-10-06 | Toyota Central Res & Dev Lab Inc | 透明導電薄膜 |
US7057208B2 (en) * | 2003-03-25 | 2006-06-06 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
JP4971618B2 (ja) * | 2005-09-30 | 2012-07-11 | ジオマテック株式会社 | 表示用電極パターン製造方法 |
JP5297840B2 (ja) * | 2009-03-03 | 2013-09-25 | シャープ株式会社 | 積層体、薄膜光電変換素子、集積型薄膜太陽電池およびそれらの製造方法 |
TWI467214B (zh) * | 2009-09-02 | 2015-01-01 | Dexerials Corp | A conductive optical element, a touch panel, an information input device, a display device, a solar cell, and a conductive optical element |
JP5440165B2 (ja) * | 2009-12-28 | 2014-03-12 | デクセリアルズ株式会社 | 導電性光学素子、タッチパネル、および液晶表示装置 |
WO2011099343A1 (en) * | 2010-02-12 | 2011-08-18 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and driving method thereof |
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AU2012338004B2 (en) * | 2011-11-18 | 2015-07-09 | Jx Nippon Oil & Energy Corporation | Organic EL element |
CN107403840B (zh) * | 2012-05-10 | 2021-05-11 | 株式会社半导体能源研究所 | 半导体装置 |
JP5981399B2 (ja) | 2012-10-04 | 2016-08-31 | 富士フイルム株式会社 | 成膜用有機材料及びそれを用いて得られた有機光電変換素子、撮像素子、受光層形成方法、有機光電変換素子の製造方法 |
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2019
- 2019-10-23 JP JP2019192521A patent/JP7458164B2/ja active Active
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2020
- 2020-09-02 WO PCT/JP2020/033236 patent/WO2021079626A1/ja active Application Filing
- 2020-09-02 CN CN202080074284.2A patent/CN114586162A/zh active Pending
- 2020-09-02 DE DE112020004244.8T patent/DE112020004244T5/de active Pending
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2022
- 2022-04-14 US US17/720,366 patent/US20220238825A1/en active Pending
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- 2024-03-18 JP JP2024041859A patent/JP2024069516A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013073965A (ja) | 2011-09-26 | 2013-04-22 | Toshiba Corp | 光電変換装置及びその製造方法 |
JP2013251173A (ja) | 2012-06-01 | 2013-12-12 | Canon Inc | 表示装置の製造方法及び表示装置 |
JP2016021380A (ja) | 2014-06-17 | 2016-02-04 | キヤノン株式会社 | 有機発光装置及びその製造方法 |
US20190027550A1 (en) | 2017-07-24 | 2019-01-24 | Samsung Display Co., Ltd. | Display device and method of manufacturing a display device |
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Publication number | Publication date |
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CN114586162A (zh) | 2022-06-03 |
DE112020004244T5 (de) | 2022-06-15 |
US20220238825A1 (en) | 2022-07-28 |
JP2024069516A (ja) | 2024-05-21 |
WO2021079626A1 (ja) | 2021-04-29 |
JP2021068793A (ja) | 2021-04-30 |
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