JP7451875B2 - 流量測定装置 - Google Patents

流量測定装置 Download PDF

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Publication number
JP7451875B2
JP7451875B2 JP2019047533A JP2019047533A JP7451875B2 JP 7451875 B2 JP7451875 B2 JP 7451875B2 JP 2019047533 A JP2019047533 A JP 2019047533A JP 2019047533 A JP2019047533 A JP 2019047533A JP 7451875 B2 JP7451875 B2 JP 7451875B2
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JP
Japan
Prior art keywords
sensor
flow rate
temperature
measured
fluid
Prior art date
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Active
Application number
JP2019047533A
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English (en)
Japanese (ja)
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JP2020148677A (ja
Inventor
憲一 半田
保幸 桝井
克行 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP2019047533A priority Critical patent/JP7451875B2/ja
Priority to CN201910700262.1A priority patent/CN111693105B/zh
Priority to PCT/JP2020/009751 priority patent/WO2020184448A1/ja
Publication of JP2020148677A publication Critical patent/JP2020148677A/ja
Application granted granted Critical
Publication of JP7451875B2 publication Critical patent/JP7451875B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/6888—Thermoelectric elements, e.g. thermocouples, thermopiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/56—Investigating or analyzing materials by the use of thermal means by investigating moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2019047533A 2019-03-14 2019-03-14 流量測定装置 Active JP7451875B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019047533A JP7451875B2 (ja) 2019-03-14 2019-03-14 流量測定装置
CN201910700262.1A CN111693105B (zh) 2019-03-14 2019-07-31 流量测定装置
PCT/JP2020/009751 WO2020184448A1 (ja) 2019-03-14 2020-03-06 流量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019047533A JP7451875B2 (ja) 2019-03-14 2019-03-14 流量測定装置

Publications (2)

Publication Number Publication Date
JP2020148677A JP2020148677A (ja) 2020-09-17
JP7451875B2 true JP7451875B2 (ja) 2024-03-19

Family

ID=72426985

Family Applications (1)

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JP2019047533A Active JP7451875B2 (ja) 2019-03-14 2019-03-14 流量測定装置

Country Status (3)

Country Link
JP (1) JP7451875B2 (zh)
CN (1) CN111693105B (zh)
WO (1) WO2020184448A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112577571B (zh) * 2020-12-11 2024-04-16 浙江启尔机电技术有限公司 一种具有传感器标定流路的供液系统及其标定方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160290849A1 (en) 2013-11-19 2016-10-06 Endress+Hauser Flowtec Ag Measuring device and method for determining a corrected mass flow and uses of the measuring device
JP2018091726A (ja) 2016-12-02 2018-06-14 株式会社デンソー 物理量計測装置、異常検出装置、及び異常検出方法
JP2018124225A (ja) 2017-02-03 2018-08-09 地方独立行政法人東京都立産業技術研究センター 熱伝導式センサ
JP2018151307A (ja) 2017-03-14 2018-09-27 オムロン株式会社 流量測定装置及び流量測定方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10239130A (ja) * 1997-02-24 1998-09-11 Omron Corp フローセンサ
US6349722B1 (en) * 1997-06-17 2002-02-26 Fisher & Paykel Limited Respiratory humidification system
JP4089152B2 (ja) * 2000-06-23 2008-05-28 オムロン株式会社 センサ用発熱装置、センサ及び加速度センサ
JP4261797B2 (ja) * 2001-10-01 2009-04-30 矢崎総業株式会社 ガス流量計
JP3945385B2 (ja) * 2002-11-15 2007-07-18 オムロン株式会社 フローセンサ及び流量計測方法
JP4907959B2 (ja) * 2005-11-21 2012-04-04 矢崎総業株式会社 フローセンサ用補正ユニット、流体判別装置、及び、流量計測装置
US7685875B2 (en) * 2007-10-23 2010-03-30 Therm-O-Disc, Incorporated Fluid flow rate sensor and method of operation
JP5652315B2 (ja) * 2011-04-28 2015-01-14 オムロン株式会社 流量測定装置
JP6641820B2 (ja) * 2015-09-16 2020-02-05 株式会社デンソー 流量測定装置
KR101824866B1 (ko) * 2016-08-18 2018-02-05 한국표준과학연구원 열식 마이크로 유량계 및 이를 이용한 유량측정방법
JP2019002717A (ja) * 2017-06-12 2019-01-10 オムロン株式会社 流量測定装置
JP6867909B2 (ja) * 2017-08-02 2021-05-12 アズビル株式会社 熱式流量計

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160290849A1 (en) 2013-11-19 2016-10-06 Endress+Hauser Flowtec Ag Measuring device and method for determining a corrected mass flow and uses of the measuring device
JP2018091726A (ja) 2016-12-02 2018-06-14 株式会社デンソー 物理量計測装置、異常検出装置、及び異常検出方法
JP2018124225A (ja) 2017-02-03 2018-08-09 地方独立行政法人東京都立産業技術研究センター 熱伝導式センサ
JP2018151307A (ja) 2017-03-14 2018-09-27 オムロン株式会社 流量測定装置及び流量測定方法

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Publication number Publication date
CN111693105B (zh) 2022-09-06
WO2020184448A1 (ja) 2020-09-17
CN111693105A (zh) 2020-09-22
JP2020148677A (ja) 2020-09-17

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