JP7451205B2 - 搬送装置および物品の製造方法 - Google Patents

搬送装置および物品の製造方法 Download PDF

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Publication number
JP7451205B2
JP7451205B2 JP2020019513A JP2020019513A JP7451205B2 JP 7451205 B2 JP7451205 B2 JP 7451205B2 JP 2020019513 A JP2020019513 A JP 2020019513A JP 2020019513 A JP2020019513 A JP 2020019513A JP 7451205 B2 JP7451205 B2 JP 7451205B2
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JP
Japan
Prior art keywords
movable element
yoke
coil
coils
core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020019513A
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English (en)
Japanese (ja)
Other versions
JP2021126002A (ja
JP2021126002A5 (enExample
Inventor
智裕 小野
仁 鈴木
武 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2020019513A priority Critical patent/JP7451205B2/ja
Priority to KR1020210008569A priority patent/KR102789579B1/ko
Priority to US17/166,634 priority patent/US11670998B2/en
Priority to CN202110147218.XA priority patent/CN113315336B/zh
Publication of JP2021126002A publication Critical patent/JP2021126002A/ja
Publication of JP2021126002A5 publication Critical patent/JP2021126002A5/ja
Application granted granted Critical
Publication of JP7451205B2 publication Critical patent/JP7451205B2/ja
Active legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
    • B65G23/22—Arrangements or mountings of driving motors
    • B65G23/23—Arrangements or mountings of driving motors of electric linear motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
JP2020019513A 2020-02-07 2020-02-07 搬送装置および物品の製造方法 Active JP7451205B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2020019513A JP7451205B2 (ja) 2020-02-07 2020-02-07 搬送装置および物品の製造方法
KR1020210008569A KR102789579B1 (ko) 2020-02-07 2021-01-21 반송장치 및 물품의 제조방법
US17/166,634 US11670998B2 (en) 2020-02-07 2021-02-03 Conveyance apparatus and method of manufacturing article
CN202110147218.XA CN113315336B (zh) 2020-02-07 2021-02-03 输送装置和制造物品的方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020019513A JP7451205B2 (ja) 2020-02-07 2020-02-07 搬送装置および物品の製造方法

Publications (3)

Publication Number Publication Date
JP2021126002A JP2021126002A (ja) 2021-08-30
JP2021126002A5 JP2021126002A5 (enExample) 2023-02-08
JP7451205B2 true JP7451205B2 (ja) 2024-03-18

Family

ID=77176935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020019513A Active JP7451205B2 (ja) 2020-02-07 2020-02-07 搬送装置および物品の製造方法

Country Status (4)

Country Link
US (1) US11670998B2 (enExample)
JP (1) JP7451205B2 (enExample)
KR (1) KR102789579B1 (enExample)
CN (1) CN113315336B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7479835B2 (ja) * 2019-12-24 2024-05-09 キヤノン株式会社 搬送装置及び物品の製造方法
CN119233936B (zh) * 2022-11-11 2025-08-22 三菱电机株式会社 输送系统
DE112022007208T5 (de) * 2022-11-11 2025-03-13 Mitsubishi Electric Corporation Transportsystem

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004187401A (ja) 2002-12-03 2004-07-02 Nikon Corp リニアモータ装置、ステージ装置、及び露光装置
JP2016187276A (ja) 2015-03-27 2016-10-27 キヤノン株式会社 駆動ユニット、レンズ鏡筒、及び光学機器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5439562B2 (enExample) * 1972-07-05 1979-11-28
JPH0748318B2 (ja) * 1988-03-14 1995-05-24 三菱電機株式会社 半導体記憶回路およびそのテスト方法
JPH055807Y2 (enExample) * 1988-06-17 1993-02-16
JPH07318699A (ja) 1994-05-27 1995-12-08 Canon Inc ステージ装置及びこれを有する露光装置とデバイス製造方法
JP3863429B2 (ja) * 2002-01-04 2006-12-27 学校法人東京電機大学 リニア振動アクチュエータ
JP4725910B2 (ja) * 2004-09-07 2011-07-13 日本パルスモーター株式会社 リニアアクチュエータ
JP5240563B2 (ja) * 2008-09-19 2013-07-17 株式会社安川電機 Ｘｙ軸コアレスリニアモータ及びそれを用いたステージ装置
JP2010148233A (ja) * 2008-12-18 2010-07-01 Jtekt Corp リニアモータ駆動送り装置
KR101531656B1 (ko) * 2013-10-16 2015-06-25 한국전기연구원 자기 부상 이송 장치
KR102192244B1 (ko) * 2013-12-30 2020-12-17 삼성디스플레이 주식회사 기판 이송장치
KR102652589B1 (ko) * 2016-06-23 2024-04-01 엘지전자 주식회사 횡자속형 왕복동 모터 및 이를 구비한 왕복동식 압축기

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004187401A (ja) 2002-12-03 2004-07-02 Nikon Corp リニアモータ装置、ステージ装置、及び露光装置
JP2016187276A (ja) 2015-03-27 2016-10-27 キヤノン株式会社 駆動ユニット、レンズ鏡筒、及び光学機器

Also Published As

Publication number Publication date
JP2021126002A (ja) 2021-08-30
CN113315336B (zh) 2024-08-23
US20210249944A1 (en) 2021-08-12
KR20210101133A (ko) 2021-08-18
US11670998B2 (en) 2023-06-06
CN113315336A (zh) 2021-08-27
KR102789579B1 (ko) 2025-04-01

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