CN113315336B - 输送装置和制造物品的方法 - Google Patents

输送装置和制造物品的方法 Download PDF

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Publication number
CN113315336B
CN113315336B CN202110147218.XA CN202110147218A CN113315336B CN 113315336 B CN113315336 B CN 113315336B CN 202110147218 A CN202110147218 A CN 202110147218A CN 113315336 B CN113315336 B CN 113315336B
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CN
China
Prior art keywords
mover
yoke
coil
magnetic
coils
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110147218.XA
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English (en)
Chinese (zh)
Other versions
CN113315336A (zh
Inventor
小野智裕
铃木仁
山本武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN113315336A publication Critical patent/CN113315336A/zh
Application granted granted Critical
Publication of CN113315336B publication Critical patent/CN113315336B/zh
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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
    • B65G23/22—Arrangements or mountings of driving motors
    • B65G23/23—Arrangements or mountings of driving motors of electric linear motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
CN202110147218.XA 2020-02-07 2021-02-03 输送装置和制造物品的方法 Active CN113315336B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-019513 2020-02-07
JP2020019513A JP7451205B2 (ja) 2020-02-07 2020-02-07 搬送装置および物品の製造方法

Publications (2)

Publication Number Publication Date
CN113315336A CN113315336A (zh) 2021-08-27
CN113315336B true CN113315336B (zh) 2024-08-23

Family

ID=77176935

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110147218.XA Active CN113315336B (zh) 2020-02-07 2021-02-03 输送装置和制造物品的方法

Country Status (4)

Country Link
US (1) US11670998B2 (enExample)
JP (1) JP7451205B2 (enExample)
KR (1) KR102789579B1 (enExample)
CN (1) CN113315336B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7479835B2 (ja) * 2019-12-24 2024-05-09 キヤノン株式会社 搬送装置及び物品の製造方法
WO2024100880A1 (ja) * 2022-11-11 2024-05-16 三菱電機株式会社 搬送システム
WO2024100885A1 (ja) * 2022-11-11 2024-05-16 三菱電機株式会社 搬送システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004187401A (ja) * 2002-12-03 2004-07-02 Nikon Corp リニアモータ装置、ステージ装置、及び露光装置
CN1747079A (zh) * 2004-09-07 2006-03-15 日本脉冲马达株式会社 线性致动器

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5439562B2 (enExample) * 1972-07-05 1979-11-28
JPH0748318B2 (ja) * 1988-03-14 1995-05-24 三菱電機株式会社 半導体記憶回路およびそのテスト方法
JPH055807Y2 (enExample) * 1988-06-17 1993-02-16
JPH07318699A (ja) 1994-05-27 1995-12-08 Canon Inc ステージ装置及びこれを有する露光装置とデバイス製造方法
JP3863429B2 (ja) * 2002-01-04 2006-12-27 学校法人東京電機大学 リニア振動アクチュエータ
JP5240563B2 (ja) * 2008-09-19 2013-07-17 株式会社安川電機 Ｘｙ軸コアレスリニアモータ及びそれを用いたステージ装置
JP2010148233A (ja) * 2008-12-18 2010-07-01 Jtekt Corp リニアモータ駆動送り装置
KR101531656B1 (ko) * 2013-10-16 2015-06-25 한국전기연구원 자기 부상 이송 장치
KR102192244B1 (ko) * 2013-12-30 2020-12-17 삼성디스플레이 주식회사 기판 이송장치
JP6444238B2 (ja) * 2015-03-27 2018-12-26 キヤノン株式会社 駆動ユニット、レンズ鏡筒、及び光学機器
KR102652589B1 (ko) * 2016-06-23 2024-04-01 엘지전자 주식회사 횡자속형 왕복동 모터 및 이를 구비한 왕복동식 압축기

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004187401A (ja) * 2002-12-03 2004-07-02 Nikon Corp リニアモータ装置、ステージ装置、及び露光装置
CN1747079A (zh) * 2004-09-07 2006-03-15 日本脉冲马达株式会社 线性致动器

Also Published As

Publication number Publication date
US11670998B2 (en) 2023-06-06
CN113315336A (zh) 2021-08-27
JP7451205B2 (ja) 2024-03-18
KR20210101133A (ko) 2021-08-18
US20210249944A1 (en) 2021-08-12
KR102789579B1 (ko) 2025-04-01
JP2021126002A (ja) 2021-08-30

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