KR102789579B1 - 반송장치 및 물품의 제조방법 - Google Patents

반송장치 및 물품의 제조방법 Download PDF

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Publication number
KR102789579B1
KR102789579B1 KR1020210008569A KR20210008569A KR102789579B1 KR 102789579 B1 KR102789579 B1 KR 102789579B1 KR 1020210008569 A KR1020210008569 A KR 1020210008569A KR 20210008569 A KR20210008569 A KR 20210008569A KR 102789579 B1 KR102789579 B1 KR 102789579B1
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South Korea
Prior art keywords
coil
yoke
mover
coils
stator
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KR1020210008569A
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English (en)
Korean (ko)
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KR20210101133A (ko
Inventor
토모히로 오노
히토시 스즈키
타케시 야마모토
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캐논 가부시끼가이샤
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Publication of KR20210101133A publication Critical patent/KR20210101133A/ko
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Publication of KR102789579B1 publication Critical patent/KR102789579B1/ko
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G23/00—Driving gear for endless conveyors; Belt- or chain-tensioning arrangements
    • B65G23/22—Arrangements or mountings of driving motors
    • B65G23/23—Arrangements or mountings of driving motors of electric linear motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
KR1020210008569A 2020-02-07 2021-01-21 반송장치 및 물품의 제조방법 Active KR102789579B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020019513A JP7451205B2 (ja) 2020-02-07 2020-02-07 搬送装置および物品の製造方法
JPJP-P-2020-019513 2020-02-07

Publications (2)

Publication Number Publication Date
KR20210101133A KR20210101133A (ko) 2021-08-18
KR102789579B1 true KR102789579B1 (ko) 2025-04-01

Family

ID=77176935

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020210008569A Active KR102789579B1 (ko) 2020-02-07 2021-01-21 반송장치 및 물품의 제조방법

Country Status (4)

Country Link
US (1) US11670998B2 (enExample)
JP (1) JP7451205B2 (enExample)
KR (1) KR102789579B1 (enExample)
CN (1) CN113315336B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7479835B2 (ja) * 2019-12-24 2024-05-09 キヤノン株式会社 搬送装置及び物品の製造方法
WO2024100880A1 (ja) * 2022-11-11 2024-05-16 三菱電機株式会社 搬送システム
WO2024100885A1 (ja) * 2022-11-11 2024-05-16 三菱電機株式会社 搬送システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004187401A (ja) * 2002-12-03 2004-07-02 Nikon Corp リニアモータ装置、ステージ装置、及び露光装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5439562B2 (enExample) * 1972-07-05 1979-11-28
JPH0748318B2 (ja) * 1988-03-14 1995-05-24 三菱電機株式会社 半導体記憶回路およびそのテスト方法
JPH055807Y2 (enExample) * 1988-06-17 1993-02-16
JPH07318699A (ja) 1994-05-27 1995-12-08 Canon Inc ステージ装置及びこれを有する露光装置とデバイス製造方法
JP3863429B2 (ja) * 2002-01-04 2006-12-27 学校法人東京電機大学 リニア振動アクチュエータ
JP4725910B2 (ja) * 2004-09-07 2011-07-13 日本パルスモーター株式会社 リニアアクチュエータ
JP5240563B2 (ja) * 2008-09-19 2013-07-17 株式会社安川電機 Ｘｙ軸コアレスリニアモータ及びそれを用いたステージ装置
JP2010148233A (ja) * 2008-12-18 2010-07-01 Jtekt Corp リニアモータ駆動送り装置
KR101531656B1 (ko) * 2013-10-16 2015-06-25 한국전기연구원 자기 부상 이송 장치
KR102192244B1 (ko) * 2013-12-30 2020-12-17 삼성디스플레이 주식회사 기판 이송장치
JP6444238B2 (ja) * 2015-03-27 2018-12-26 キヤノン株式会社 駆動ユニット、レンズ鏡筒、及び光学機器
KR102652589B1 (ko) * 2016-06-23 2024-04-01 엘지전자 주식회사 횡자속형 왕복동 모터 및 이를 구비한 왕복동식 압축기

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004187401A (ja) * 2002-12-03 2004-07-02 Nikon Corp リニアモータ装置、ステージ装置、及び露光装置

Also Published As

Publication number Publication date
US11670998B2 (en) 2023-06-06
CN113315336A (zh) 2021-08-27
JP7451205B2 (ja) 2024-03-18
KR20210101133A (ko) 2021-08-18
US20210249944A1 (en) 2021-08-12
CN113315336B (zh) 2024-08-23
JP2021126002A (ja) 2021-08-30

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