JP7442754B1 - 光半導体素子 - Google Patents

光半導体素子 Download PDF

Info

Publication number
JP7442754B1
JP7442754B1 JP2023566997A JP2023566997A JP7442754B1 JP 7442754 B1 JP7442754 B1 JP 7442754B1 JP 2023566997 A JP2023566997 A JP 2023566997A JP 2023566997 A JP2023566997 A JP 2023566997A JP 7442754 B1 JP7442754 B1 JP 7442754B1
Authority
JP
Japan
Prior art keywords
waveguide
light
tapered
gain
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023566997A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024236697A1 (https=
JPWO2024236697A5 (https=
Inventor
智志 西川
雅広 松浦
涼子 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2024004283A priority Critical patent/JP7446553B1/ja
Application granted granted Critical
Publication of JP7442754B1 publication Critical patent/JP7442754B1/ja
Publication of JPWO2024236697A1 publication Critical patent/JPWO2024236697A1/ja
Publication of JPWO2024236697A5 publication Critical patent/JPWO2024236697A5/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122Basic optical elements, e.g. light-guiding paths
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/017Structures with periodic or quasi periodic potential variation, e.g. superlattices, quantum wells
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/025Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction in an optical waveguide structure
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/29Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
    • G02F1/295Analog deflection from or in an optical waveguide structure]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06Construction or shape of active medium
    • H01S3/063Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/02Structural details or components not essential to laser action
    • H01S5/026Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/50Amplifier structures not provided for in groups H01S5/02 - H01S5/30

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Lasers (AREA)
JP2023566997A 2023-05-15 2023-05-15 光半導体素子 Active JP7442754B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024004283A JP7446553B1 (ja) 2023-05-15 2024-01-16 光半導体素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/018127 WO2024236697A1 (ja) 2023-05-15 2023-05-15 光半導体素子

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024004283A Division JP7446553B1 (ja) 2023-05-15 2024-01-16 光半導体素子

Publications (3)

Publication Number Publication Date
JP7442754B1 true JP7442754B1 (ja) 2024-03-04
JPWO2024236697A1 JPWO2024236697A1 (https=) 2024-11-21
JPWO2024236697A5 JPWO2024236697A5 (https=) 2025-04-22

Family

ID=90096850

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2023566997A Active JP7442754B1 (ja) 2023-05-15 2023-05-15 光半導体素子
JP2024004283A Active JP7446553B1 (ja) 2023-05-15 2024-01-16 光半導体素子

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2024004283A Active JP7446553B1 (ja) 2023-05-15 2024-01-16 光半導体素子

Country Status (3)

Country Link
JP (2) JP7442754B1 (https=)
CN (1) CN121175890A (https=)
WO (1) WO2024236697A1 (https=)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010003950A (ja) * 2008-06-23 2010-01-07 Nec Corp 光半導体装置
JP2010226062A (ja) * 2009-03-25 2010-10-07 Fujitsu Ltd 光導波素子とその製造方法、半導体素子、レーザモジュール及び光伝送システム
JP2012113267A (ja) * 2010-11-29 2012-06-14 Canon Inc 光走査装置
JP2014154680A (ja) * 2013-02-07 2014-08-25 Furukawa Electric Co Ltd:The 半導体レーザ装置
CN106921441A (zh) * 2017-03-13 2017-07-04 南京邮电大学 一种可实现无差异混频的相干光接收机
JP2018151538A (ja) * 2017-03-14 2018-09-27 沖電気工業株式会社 光導波路素子
CN211126441U (zh) * 2020-03-05 2020-07-28 度亘激光技术(苏州)有限公司 一种激光器
US20200366061A1 (en) * 2018-02-05 2020-11-19 Zhejiang University Tunable semiconductor laser based on half-wave coupled partial reflectors
JP2021158268A (ja) * 2020-03-27 2021-10-07 株式会社デンソー 半導体発光素子

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6614585B1 (en) 1999-05-06 2003-09-02 Trumpf Photonics Inc. Phase conjugating structure for mode matching in super luminescent diode cavities
EP1507321B1 (en) 2003-08-11 2006-10-25 Lumera Laser GmbH Solid state laser pumped by a laser diode with a convergent beam
CN111308829A (zh) 2020-04-10 2020-06-19 上海大学 一种PbS/SiO2共掺纳米集成锥形光纤放大器及其制备方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010003950A (ja) * 2008-06-23 2010-01-07 Nec Corp 光半導体装置
JP2010226062A (ja) * 2009-03-25 2010-10-07 Fujitsu Ltd 光導波素子とその製造方法、半導体素子、レーザモジュール及び光伝送システム
JP2012113267A (ja) * 2010-11-29 2012-06-14 Canon Inc 光走査装置
JP2014154680A (ja) * 2013-02-07 2014-08-25 Furukawa Electric Co Ltd:The 半導体レーザ装置
CN106921441A (zh) * 2017-03-13 2017-07-04 南京邮电大学 一种可实现无差异混频的相干光接收机
JP2018151538A (ja) * 2017-03-14 2018-09-27 沖電気工業株式会社 光導波路素子
US20200366061A1 (en) * 2018-02-05 2020-11-19 Zhejiang University Tunable semiconductor laser based on half-wave coupled partial reflectors
CN211126441U (zh) * 2020-03-05 2020-07-28 度亘激光技术(苏州)有限公司 一种激光器
JP2021158268A (ja) * 2020-03-27 2021-10-07 株式会社デンソー 半導体発光素子

Also Published As

Publication number Publication date
JP7446553B1 (ja) 2024-03-08
JPWO2024236697A1 (https=) 2024-11-21
WO2024236697A1 (ja) 2024-11-21
JP2024164794A (ja) 2024-11-27
CN121175890A (zh) 2025-12-19

Similar Documents

Publication Publication Date Title
US10534131B2 (en) Semiconductor optical integrated device having buried hetero structure waveguide and deep ridge waveguide
US6768758B1 (en) Semiconductor laser, semiconductor optical amplifier, and production method thereof
JP5717726B2 (ja) 大出力パワー用の横結合を持つdfbレーザダイオード
CN104937791B (zh) 激光装置、光调制装置以及光半导体元件
JP4942429B2 (ja) 半導体波長可変レーザ
US11050215B2 (en) Variable wavelength laser device and variable wavelength laser device production method
JP4906185B2 (ja) 光半導体素子及び光半導体素子の変調方法
JP5718007B2 (ja) 半導体光導波路素子の製造方法
JP7442754B1 (ja) 光半導体素子
JPWO2019156189A1 (ja) 光集積素子および光モジュール
JP3778260B2 (ja) 半導体レーザとこれを用いたデジタル光通信システムと方法
US5200968A (en) Laser amplifier for amplifying optical waves without saturation
JP7541271B2 (ja) 半導体レーザ及び光送信器
WO2025013161A1 (ja) 半導体光集積素子、半導体光集積素子の製造方法、半導体光装置および半導体光装置の制御方法
JP6673137B2 (ja) 光変調器付き半導体レーザ装置
JP7294453B2 (ja) 直接変調レーザ
JP3006553B2 (ja) 半導体集積型偏波モード変換器
JP4033822B2 (ja) Dbr型波長可変光源
JPS60260017A (ja) 光変調素子
US12259561B2 (en) Spot-size converter
JP2005117045A (ja) 利得固定半導体光増幅器
JP2012146761A (ja) 半導体レーザ及び光半導体装置
WO2026022890A1 (ja) 光半導体素子
JP2020004752A (ja) 半導体レーザ
JP4448771B2 (ja) 光増幅装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231031

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20231031

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20231031

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20231121

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240116

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240123

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240220

R151 Written notification of patent or utility model registration

Ref document number: 7442754

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151