JP7428237B2 - 弾性波装置及び複合フィルタ装置 - Google Patents

弾性波装置及び複合フィルタ装置 Download PDF

Info

Publication number
JP7428237B2
JP7428237B2 JP2022508227A JP2022508227A JP7428237B2 JP 7428237 B2 JP7428237 B2 JP 7428237B2 JP 2022508227 A JP2022508227 A JP 2022508227A JP 2022508227 A JP2022508227 A JP 2022508227A JP 7428237 B2 JP7428237 B2 JP 7428237B2
Authority
JP
Japan
Prior art keywords
resonator
elastic wave
resonators
wave device
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022508227A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2021187200A5 (https=
JPWO2021187200A1 (https=
Inventor
亮 中川
治樹 京屋
寛司 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2021187200A1 publication Critical patent/JPWO2021187200A1/ja
Publication of JPWO2021187200A5 publication Critical patent/JPWO2021187200A5/ja
Application granted granted Critical
Publication of JP7428237B2 publication Critical patent/JP7428237B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/703—Networks using bulk acoustic wave devices

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2022508227A 2020-03-18 2021-03-08 弾性波装置及び複合フィルタ装置 Active JP7428237B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020047272 2020-03-18
JP2020047272 2020-03-18
PCT/JP2021/009028 WO2021187200A1 (ja) 2020-03-18 2021-03-08 弾性波装置及び複合フィルタ装置

Publications (3)

Publication Number Publication Date
JPWO2021187200A1 JPWO2021187200A1 (https=) 2021-09-23
JPWO2021187200A5 JPWO2021187200A5 (https=) 2022-09-09
JP7428237B2 true JP7428237B2 (ja) 2024-02-06

Family

ID=77771257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022508227A Active JP7428237B2 (ja) 2020-03-18 2021-03-08 弾性波装置及び複合フィルタ装置

Country Status (4)

Country Link
US (1) US12438521B2 (https=)
JP (1) JP7428237B2 (https=)
CN (1) CN115191084A (https=)
WO (1) WO2021187200A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117559953B (zh) * 2023-02-15 2025-07-08 北京芯溪半导体科技有限公司 滤波器设计方法、装置及相关设备

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000349591A (ja) 1999-06-08 2000-12-15 Oki Electric Ind Co Ltd 弾性表面波フィルタを用いた分波器
WO2009063559A1 (ja) 2007-11-15 2009-05-22 Fujitsu Limited 弾性波デバイス、それを用いたデュープレクサおよびそのデュープレクサを用いた通信機
WO2009150786A1 (ja) 2008-06-09 2009-12-17 株式会社村田製作所 弾性表面波装置及びその製造方法
JP2011097237A (ja) 2009-10-28 2011-05-12 Kyocera Corp 弾性表面波装置
JP2011211460A (ja) 2010-03-30 2011-10-20 Sae Magnetics (Hk) Ltd 弾性表面波装置
JP2018157510A (ja) 2017-03-21 2018-10-04 太陽誘電株式会社 マルチプレクサ
WO2019111902A1 (ja) 2017-12-06 2019-06-13 株式会社村田製作所 マルチプレクサ、高周波フロントエンド回路および通信装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003258594A (ja) 2001-12-27 2003-09-12 Murata Mfg Co Ltd 弾性表面波素子およびその製造方法
CN104205633B (zh) * 2012-03-23 2016-10-26 株式会社村田制作所 弹性波滤波器元件以及其制造方法
WO2016100692A2 (en) * 2014-12-17 2016-06-23 Rf Micro Devices, Inc. Plate wave devices with wave confinement structures and fabrication methods
US11218133B2 (en) * 2016-09-30 2022-01-04 Intel Corporation Film bulk acoustic resonator (FBAR) devices for high frequency RF filters
US10483942B2 (en) * 2017-01-24 2019-11-19 Skyworks Solutions, Inc. Acoustic wave device with acoustically separated multi-channel feedback
DE102018102891A1 (de) * 2017-02-13 2018-08-16 Murata Manufacturing Co., Ltd. Multiplexierer, Übertragungsvorrichtung und Empfangsvorrichtung
JP2018133800A (ja) * 2017-02-13 2018-08-23 株式会社村田製作所 マルチプレクサ、送信装置および受信装置
JP2018207290A (ja) * 2017-06-02 2018-12-27 株式会社村田製作所 弾性波共振子および弾性波フィルタ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000349591A (ja) 1999-06-08 2000-12-15 Oki Electric Ind Co Ltd 弾性表面波フィルタを用いた分波器
WO2009063559A1 (ja) 2007-11-15 2009-05-22 Fujitsu Limited 弾性波デバイス、それを用いたデュープレクサおよびそのデュープレクサを用いた通信機
WO2009150786A1 (ja) 2008-06-09 2009-12-17 株式会社村田製作所 弾性表面波装置及びその製造方法
JP2011097237A (ja) 2009-10-28 2011-05-12 Kyocera Corp 弾性表面波装置
JP2011211460A (ja) 2010-03-30 2011-10-20 Sae Magnetics (Hk) Ltd 弾性表面波装置
JP2018157510A (ja) 2017-03-21 2018-10-04 太陽誘電株式会社 マルチプレクサ
WO2019111902A1 (ja) 2017-12-06 2019-06-13 株式会社村田製作所 マルチプレクサ、高周波フロントエンド回路および通信装置

Also Published As

Publication number Publication date
WO2021187200A1 (ja) 2021-09-23
US12438521B2 (en) 2025-10-07
CN115191084A (zh) 2022-10-14
US20220416764A1 (en) 2022-12-29
JPWO2021187200A1 (https=) 2021-09-23

Similar Documents

Publication Publication Date Title
TWI762832B (zh) 聲表面波器件
JP4419961B2 (ja) 弾性境界波装置
CN101796727B (zh) 弹性边界波装置
WO2019138810A1 (ja) 弾性波装置、マルチプレクサ、高周波フロントエンド回路及び通信装置
US12463614B2 (en) Acoustic wave device
US12244296B2 (en) Acoustic wave filter
CN113872562B (zh) 表面声波元件
CN115549639A (zh) 一种声波滤波器
US12191840B2 (en) Acoustic wave device
JP7544151B2 (ja) 弾性波装置
CN113454912B (zh) 弹性波装置
JP7268747B2 (ja) 弾性波装置
WO2020250572A1 (ja) 弾性波装置
CN114070257A (zh) 声波装置、滤波器及多路复用器
WO2021024762A1 (ja) 弾性波フィルタ装置
JP7428237B2 (ja) 弾性波装置及び複合フィルタ装置
JP2024162642A (ja) 弾性波装置
WO2024077955A1 (zh) 一种多传输零点的声表面波滤波器及信号处理电路
US20240162883A1 (en) Acoustic wave device
US20240014793A1 (en) Acoustic wave device and method for manufacturing acoustic wave device
WO2023033032A1 (ja) 弾性波素子、分波器および通信装置
JP2022178244A (ja) 弾性波デバイス、フィルタ、マルチプレクサ、および弾性波デバイスの製造方法
US12424997B2 (en) Acoustic wave device and ladder filter
CN112805919B (zh) 弹性波装置、带通型滤波器、双工器以及多工器
CN219351697U (zh) 弹性波装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220714

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220714

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230912

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231005

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20231226

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240108

R150 Certificate of patent or registration of utility model

Ref document number: 7428237

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150