CN115191084A - 弹性波装置及复合滤波器装置 - Google Patents

弹性波装置及复合滤波器装置 Download PDF

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Publication number
CN115191084A
CN115191084A CN202180017643.5A CN202180017643A CN115191084A CN 115191084 A CN115191084 A CN 115191084A CN 202180017643 A CN202180017643 A CN 202180017643A CN 115191084 A CN115191084 A CN 115191084A
Authority
CN
China
Prior art keywords
resonator
elastic wave
wave device
electrode layer
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180017643.5A
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English (en)
Chinese (zh)
Inventor
中川亮
京屋治树
清水宽司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN115191084A publication Critical patent/CN115191084A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/703—Networks using bulk acoustic wave devices

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
CN202180017643.5A 2020-03-18 2021-03-08 弹性波装置及复合滤波器装置 Pending CN115191084A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020047272 2020-03-18
JP2020-047272 2020-03-18
PCT/JP2021/009028 WO2021187200A1 (ja) 2020-03-18 2021-03-08 弾性波装置及び複合フィルタ装置

Publications (1)

Publication Number Publication Date
CN115191084A true CN115191084A (zh) 2022-10-14

Family

ID=77771257

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180017643.5A Pending CN115191084A (zh) 2020-03-18 2021-03-08 弹性波装置及复合滤波器装置

Country Status (4)

Country Link
US (1) US12438521B2 (https=)
JP (1) JP7428237B2 (https=)
CN (1) CN115191084A (https=)
WO (1) WO2021187200A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117559953A (zh) * 2023-02-15 2024-02-13 北京芯溪半导体科技有限公司 滤波器设计方法、装置及相关设备

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101796722A (zh) * 2007-11-15 2010-08-04 太阳诱电株式会社 弹性波器件、使用其的双工器以及使用该双工器的通信机
US20110102108A1 (en) * 2008-06-09 2011-05-05 Murata Manufacturing Co., Ltd. Surface acoustic wave device and method for manufacturing the same
CN104205631A (zh) * 2012-03-26 2014-12-10 株式会社村田制作所 弹性波装置及其制造方法
CN104205633A (zh) * 2012-03-23 2014-12-10 株式会社村田制作所 弹性波滤波器元件以及其制造方法
CN207939487U (zh) * 2017-02-13 2018-10-02 株式会社村田制作所 多工器、发送装置以及接收装置
JP2018207290A (ja) * 2017-06-02 2018-12-27 株式会社村田製作所 弾性波共振子および弾性波フィルタ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000349591A (ja) * 1999-06-08 2000-12-15 Oki Electric Ind Co Ltd 弾性表面波フィルタを用いた分波器
JP2003258594A (ja) 2001-12-27 2003-09-12 Murata Mfg Co Ltd 弾性表面波素子およびその製造方法
JP5340112B2 (ja) * 2009-10-28 2013-11-13 京セラ株式会社 弾性表面波装置
JP5341006B2 (ja) 2010-03-30 2013-11-13 新科實業有限公司 弾性表面波装置
WO2016100692A2 (en) * 2014-12-17 2016-06-23 Rf Micro Devices, Inc. Plate wave devices with wave confinement structures and fabrication methods
US11218133B2 (en) * 2016-09-30 2022-01-04 Intel Corporation Film bulk acoustic resonator (FBAR) devices for high frequency RF filters
US10483942B2 (en) * 2017-01-24 2019-11-19 Skyworks Solutions, Inc. Acoustic wave device with acoustically separated multi-channel feedback
DE102018102891A1 (de) * 2017-02-13 2018-08-16 Murata Manufacturing Co., Ltd. Multiplexierer, Übertragungsvorrichtung und Empfangsvorrichtung
JP6534406B2 (ja) 2017-03-21 2019-06-26 太陽誘電株式会社 マルチプレクサ
WO2019111902A1 (ja) 2017-12-06 2019-06-13 株式会社村田製作所 マルチプレクサ、高周波フロントエンド回路および通信装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101796722A (zh) * 2007-11-15 2010-08-04 太阳诱电株式会社 弹性波器件、使用其的双工器以及使用该双工器的通信机
US20110102108A1 (en) * 2008-06-09 2011-05-05 Murata Manufacturing Co., Ltd. Surface acoustic wave device and method for manufacturing the same
CN104205633A (zh) * 2012-03-23 2014-12-10 株式会社村田制作所 弹性波滤波器元件以及其制造方法
CN104205631A (zh) * 2012-03-26 2014-12-10 株式会社村田制作所 弹性波装置及其制造方法
CN207939487U (zh) * 2017-02-13 2018-10-02 株式会社村田制作所 多工器、发送装置以及接收装置
JP2018207290A (ja) * 2017-06-02 2018-12-27 株式会社村田製作所 弾性波共振子および弾性波フィルタ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117559953A (zh) * 2023-02-15 2024-02-13 北京芯溪半导体科技有限公司 滤波器设计方法、装置及相关设备

Also Published As

Publication number Publication date
WO2021187200A1 (ja) 2021-09-23
US12438521B2 (en) 2025-10-07
JP7428237B2 (ja) 2024-02-06
US20220416764A1 (en) 2022-12-29
JPWO2021187200A1 (https=) 2021-09-23

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