JP7418128B2 - 光源装置、照明装置、及び露光装置。 - Google Patents

光源装置、照明装置、及び露光装置。 Download PDF

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JP7418128B2
JP7418128B2 JP2020060986A JP2020060986A JP7418128B2 JP 7418128 B2 JP7418128 B2 JP 7418128B2 JP 2020060986 A JP2020060986 A JP 2020060986A JP 2020060986 A JP2020060986 A JP 2020060986A JP 7418128 B2 JP7418128 B2 JP 7418128B2
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light source
chip
source device
led
cooler
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JP2021162612A5 (https=
JP2021162612A (ja
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健太郎 昼間
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Canon Inc
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Canon Inc
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JP2020060986A 2020-03-30 2020-03-30 光源装置、照明装置、及び露光装置。 Active JP7418128B2 (ja)

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JP2021162612A JP2021162612A (ja) 2021-10-11
JP2021162612A5 JP2021162612A5 (https=) 2023-03-27
JP7418128B2 true JP7418128B2 (ja) 2024-01-19

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004253758A (ja) 2002-12-27 2004-09-09 Nikon Corp 照明光源ユニット、露光装置及び露光方法
JP2005217064A (ja) 2004-01-28 2005-08-11 Canon Inc 露光システム
JP2010192152A (ja) 2009-02-16 2010-09-02 Toshiba Lighting & Technology Corp 照明装置
JP2012043700A (ja) 2010-08-20 2012-03-01 Seiko Epson Corp 光源装置及びプロジェクター
WO2012085669A2 (en) 2010-12-21 2012-06-28 Derose, Anthony Fluid cooled lighting element
JP2013008950A (ja) 2011-05-23 2013-01-10 Panasonic Corp 光源装置および画像表示装置
JP2014127543A (ja) 2012-12-26 2014-07-07 Sony Corp 冷却装置および半導体レーザ装置
JP2018006713A (ja) 2016-07-08 2018-01-11 ファナック株式会社 温度を含む駆動条件を考慮した実効的駆動時間と残存寿命が算出可能なレーザ装置
JP2019016757A (ja) 2017-07-11 2019-01-31 ファナック株式会社 Ｌｄモジュール冷却装置及びレーザ装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004253758A (ja) 2002-12-27 2004-09-09 Nikon Corp 照明光源ユニット、露光装置及び露光方法
JP2005217064A (ja) 2004-01-28 2005-08-11 Canon Inc 露光システム
JP2010192152A (ja) 2009-02-16 2010-09-02 Toshiba Lighting & Technology Corp 照明装置
JP2012043700A (ja) 2010-08-20 2012-03-01 Seiko Epson Corp 光源装置及びプロジェクター
WO2012085669A2 (en) 2010-12-21 2012-06-28 Derose, Anthony Fluid cooled lighting element
JP2013008950A (ja) 2011-05-23 2013-01-10 Panasonic Corp 光源装置および画像表示装置
JP2014127543A (ja) 2012-12-26 2014-07-07 Sony Corp 冷却装置および半導体レーザ装置
JP2018006713A (ja) 2016-07-08 2018-01-11 ファナック株式会社 温度を含む駆動条件を考慮した実効的駆動時間と残存寿命が算出可能なレーザ装置
JP2019016757A (ja) 2017-07-11 2019-01-31 ファナック株式会社 Ｌｄモジュール冷却装置及びレーザ装置

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