JP2021162612A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2021162612A5 JP2021162612A5 JP2020060986A JP2020060986A JP2021162612A5 JP 2021162612 A5 JP2021162612 A5 JP 2021162612A5 JP 2020060986 A JP2020060986 A JP 2020060986A JP 2020060986 A JP2020060986 A JP 2020060986A JP 2021162612 A5 JP2021162612 A5 JP 2021162612A5
- Authority
- JP
- Japan
- Prior art keywords
- light source
- source device
- chip
- substrate
- chip row
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 238000005286 illumination Methods 0.000 claims description 7
- 239000002826 coolant Substances 0.000 claims 5
- 238000004519 manufacturing process Methods 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 3
- 238000009826 distribution Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 2
- 238000005192 partition Methods 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000003507 refrigerant Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020060986A JP7418128B2 (ja) | 2020-03-30 | 2020-03-30 | 光源装置、照明装置、及び露光装置。 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020060986A JP7418128B2 (ja) | 2020-03-30 | 2020-03-30 | 光源装置、照明装置、及び露光装置。 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021162612A JP2021162612A (ja) | 2021-10-11 |
| JP2021162612A5 true JP2021162612A5 (https=) | 2023-03-27 |
| JP7418128B2 JP7418128B2 (ja) | 2024-01-19 |
Family
ID=78004789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020060986A Active JP7418128B2 (ja) | 2020-03-30 | 2020-03-30 | 光源装置、照明装置、及び露光装置。 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7418128B2 (https=) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004253758A (ja) | 2002-12-27 | 2004-09-09 | Nikon Corp | 照明光源ユニット、露光装置及び露光方法 |
| JP2005217064A (ja) | 2004-01-28 | 2005-08-11 | Canon Inc | 露光システム |
| JP2010192152A (ja) | 2009-02-16 | 2010-09-02 | Toshiba Lighting & Technology Corp | 照明装置 |
| JP5873625B2 (ja) | 2010-08-20 | 2016-03-01 | セイコーエプソン株式会社 | 光源装置及びプロジェクター |
| CN103392243A (zh) | 2010-12-21 | 2013-11-13 | 安东尼·德罗斯 | 流体冷却式照明元件 |
| JP2013008950A (ja) | 2011-05-23 | 2013-01-10 | Panasonic Corp | 光源装置および画像表示装置 |
| JP2014127543A (ja) | 2012-12-26 | 2014-07-07 | Sony Corp | 冷却装置および半導体レーザ装置 |
| JP6374447B2 (ja) | 2016-07-08 | 2018-08-15 | ファナック株式会社 | 温度を含む駆動条件を考慮した実効的駆動時間と残存寿命が算出可能なレーザ装置 |
| JP6636996B2 (ja) | 2017-07-11 | 2020-01-29 | ファナック株式会社 | Ｌｄモジュール冷却装置及びレーザ装置 |
-
2020
- 2020-03-30 JP JP2020060986A patent/JP7418128B2/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101134769B1 (ko) | 노광 장치, 노광 광 조사 방법 및 표시용 패널 기판의 제조 방법 | |
| JP2020122921A5 (https=) | ||
| TW200942994A (en) | Exposure method and apparatus, and device manufacturing method | |
| US20220178533A1 (en) | Light source device, cooling method, and manufacturing method for product | |
| JP2008523451A (ja) | フォトリソグラフィ転写用のコリメートされたｕｖ光線を生成するプロセスおよび装置 | |
| CN106793932B (zh) | 摄像系统 | |
| TWI608309B (zh) | 曝光用光源模組單元及具備該光源模組單元的曝光裝置 | |
| JP7355773B2 (ja) | 試験装置、試験方法およびプログラム | |
| Rammohan et al. | Experimental analysis on estimating junction temperature and service life of high power LED array | |
| KR101761279B1 (ko) | 대면적 패턴 노광용 led어레이광원모듈 및 그 제어장치 | |
| JP2021162612A5 (https=) | ||
| JP7005620B2 (ja) | Ｃｍｏｓ画像走査デバイスを試験するためのｌｅｄ光源プローブカード技術 | |
| JP7418128B2 (ja) | 光源装置、照明装置、及び露光装置。 | |
| KR20160068206A (ko) | 암시야 조명 장치 | |
| KR102700446B1 (ko) | 광원 장치, 조명 장치 및 노광 장치 | |
| TW201704884A (zh) | 曝光用光源模組單元及具備該光源模組單元的曝光裝置 | |
| KR101110516B1 (ko) | 노광용 광원 | |
| CN107990215A (zh) | 线光源的聚光结构、光源系统及应用 | |
| JP2009145226A (ja) | 撮像素子検査用光源装置及びこれを備えた撮像素子検査装置 | |
| JP2023073019A (ja) | 光源装置、露光装置、及び物品の製造方法 | |
| TWI768271B (zh) | 曝光裝置用光源、曝光裝置及光阻劑之曝光方法 | |
| EP4709111A1 (en) | Light source apparatus, exposure apparatus, and article manufacturing method | |
| CN208041755U (zh) | 线光源的聚光结构和光源系统 | |
| TWI710007B (zh) | 微影設備及執行微發光二極體微影之方法 | |
| Todorov et al. | A study on thermal performance of LED signal heads using infrared thermography |