JP7005620B2 - Cmos画像走査デバイスを試験するためのled光源プローブカード技術 - Google Patents
Cmos画像走査デバイスを試験するためのled光源プローブカード技術 Download PDFInfo
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- JP7005620B2 JP7005620B2 JP2019529174A JP2019529174A JP7005620B2 JP 7005620 B2 JP7005620 B2 JP 7005620B2 JP 2019529174 A JP2019529174 A JP 2019529174A JP 2019529174 A JP2019529174 A JP 2019529174A JP 7005620 B2 JP7005620 B2 JP 7005620B2
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- 238000012360 testing method Methods 0.000 title claims description 28
- 239000000523 sample Substances 0.000 title claims description 8
- 238000005286 illumination Methods 0.000 claims description 18
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 10
- 230000005693 optoelectronics Effects 0.000 claims description 5
- 238000005259 measurement Methods 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 claims description 3
- 238000009434 installation Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
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-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0418—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using attenuators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/08—Arrangements of light sources specially adapted for photometry standard sources, also using luminescent or radioactive material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
- G01J1/20—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle
- G01J1/28—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle using variation of intensity or distance of source
- G01J1/30—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle using variation of intensity or distance of source using electric radiation detectors
- G01J1/32—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle using variation of intensity or distance of source using electric radiation detectors adapted for automatic variation of the measured or reference value
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
- G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/024—Details of scanning heads ; Means for illuminating the original
- H04N1/028—Details of scanning heads ; Means for illuminating the original for picture information pick-up
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/024—Details of scanning heads ; Means for illuminating the original
- H04N1/028—Details of scanning heads ; Means for illuminating the original for picture information pick-up
- H04N1/02815—Means for illuminating the original, not specific to a particular type of pick-up head
- H04N1/0288—Means for illuminating the original, not specific to a particular type of pick-up head using a two-dimensional light source, e.g. two-dimensional LED array
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
- H04N1/024—Details of scanning heads ; Means for illuminating the original
- H04N1/028—Details of scanning heads ; Means for illuminating the original for picture information pick-up
- H04N1/02815—Means for illuminating the original, not specific to a particular type of pick-up head
- H04N1/02885—Means for compensating spatially uneven illumination, e.g. an aperture arrangement
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N17/00—Diagnosis, testing or measuring for television systems or their details
- H04N17/002—Diagnosis, testing or measuring for television systems or their details for television cameras
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J2001/4247—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources
- G01J2001/4252—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources for testing LED's
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
Description
Claims (9)
- 感光性電子デバイスのアレイを試験するための装置であって、
試験される電子デバイスの各々に対応するLED(発光ダイオード)光源を有するように構成されたLED光源アレイを備え、
前記各LED光源は、
LED光を提供するように構成されたLEDと、
前記LED光を受光し、リン光を提供するように配置された蛍光体と、
前記リン光から点光源照明を提供するように構成されたアパーチャと、
前記点光源照明からコリメート光を提供するように構成されたレンズと、
前記コリメート光を受光し、改善された照明の均一性を有する出力光を提供するように配置された均一性フィルタと、
各LED光源から光信号を測定し、測定された前記光信号を用いて前記LED光源アレイの動作を制御し、前記感光性電子デバイスのアレイに対して均一な照明を提供するように構成されたフィードバック制御システムと、を含み、
前記各LED光源は、第1の光検出器をさらに含み、前記光信号は、前記第1の光検出器によって提供され、
以下の3つの条件、
(i)前記各LED光源は、前記第1の光検出器上に配置された減光フィルタをさらに含む、
(ii)前記第1の光検出器は、前記LED光源の前記LED及び前記蛍光体の両方から前記LED光源内の光を受光するように構成される、及び
(iii)前記各LED光源は、第2の光検出器と、第2の光検出器上に配置された減光フィルタと、をさらに含み、前記光信号は、前記第1の光検出器及び前記第2の光検出器の両方によって提供される、
の少なくとも1つの条件を満たすことを特徴とする装置。 - 請求項1に記載の装置であって、
当該装置は、光電子撮像デバイスを試験するためのプローブカードであり、
試験される光電子撮像デバイスの電気端子に電気的に接触するための1以上の電気プローブをさらに備えることを特徴とする装置。 - 請求項1に記載の装置であって、
前記各LED光源の前記蛍光体は、前記LED光源の前記LED上に配置される均一な厚さを有する薄膜として構成されることを特徴とする装置。 - 請求項1に記載の装置であって、
前記フィードバック制御システムは、前記LED光源からの出力光の較正測定から導出された参照テーブルを使用するように構成されたことを特徴とする装置。 - 請求項1に記載の装置であって、
前記各LED光源は、前記第1の光検出器上に配置された減光フィルタをさらに含むことを特徴とする装置。 - 請求項1に記載の装置であって、
前記第1の光検出器は、前記LED光源の前記LED及び前記蛍光体の両方から前記LED光源内の光を受光するように構成されたことを特徴とする装置。 - 請求項1に記載の装置であって、
前記各LED光源は、
第2の光検出器と、
第2の光検出器上に配置された減光フィルタと、をさらに含み、
前記光信号は、前記第1の光検出器及び前記第2の光検出器の両方によって提供されることを特徴とする装置。 - 請求項7に記載の装置であって、
前記第1の光検出器及び前記第2の光検出器は、前記LED光源の前記LED及び前記蛍光体の両方から前記LED光源内の光を受光するように構成されたことを特徴とする装置。 - 感光性電子デバイスのアレイを試験するための装置であって、
試験される電子デバイスの各々に対応するLED(発光ダイオード)光源を有するように構成されたLED光源アレイを備え、
前記各LED光源は、
LED光を提供するように構成されたLEDと、
前記LED光を受光し、リン光を提供するように配置された蛍光体と、
前記リン光から点光源照明を提供するように構成されたアパーチャと、
前記点光源照明からコリメート光を提供するように構成されたレンズと、
前記コリメート光を受光し、改善された照明の均一性を有する出力光を提供するように配置された均一性フィルタと、を含み、
前記各LED光源の前記均一性フィルタは、各均一性フィルタの設置前の前記LED光源アレイの出力光均一性の較正測定に従って、その均一性フィルタに対応するLED光源について個別にカスタマイズされていることを特徴とする装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US201662432548P | 2016-12-09 | 2016-12-09 | |
US62/432,548 | 2016-12-09 | ||
PCT/US2017/065195 WO2018106970A1 (en) | 2016-12-09 | 2017-12-07 | Led light source probe card technology for testing cmos image scan devices |
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JP2020518124A JP2020518124A (ja) | 2020-06-18 |
JP7005620B2 true JP7005620B2 (ja) | 2022-01-21 |
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JP2019529174A Active JP7005620B2 (ja) | 2016-12-09 | 2017-12-07 | Cmos画像走査デバイスを試験するためのled光源プローブカード技術 |
Country Status (5)
Country | Link |
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US (1) | US10352870B2 (ja) |
EP (1) | EP3551986A4 (ja) |
JP (1) | JP7005620B2 (ja) |
TW (1) | TWI793091B (ja) |
WO (1) | WO2018106970A1 (ja) |
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US10757320B2 (en) | 2017-12-28 | 2020-08-25 | Waymo Llc | Multiple operating modes to expand dynamic range |
US20190208136A1 (en) * | 2017-12-29 | 2019-07-04 | Waymo Llc | High-speed image readout and processing |
TWI674412B (zh) * | 2018-10-29 | 2019-10-11 | 致茂電子股份有限公司 | 晶圓測試載盤與晶圓測試裝置 |
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- 2017-12-07 JP JP2019529174A patent/JP7005620B2/ja active Active
- 2017-12-07 EP EP17879336.0A patent/EP3551986A4/en active Pending
- 2017-12-07 US US15/835,380 patent/US10352870B2/en active Active
- 2017-12-07 WO PCT/US2017/065195 patent/WO2018106970A1/en unknown
- 2017-12-08 TW TW106143126A patent/TWI793091B/zh active
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TW201833520A (zh) | 2018-09-16 |
WO2018106970A1 (en) | 2018-06-14 |
US20180164223A1 (en) | 2018-06-14 |
JP2020518124A (ja) | 2020-06-18 |
EP3551986A1 (en) | 2019-10-16 |
EP3551986A4 (en) | 2020-08-05 |
TWI793091B (zh) | 2023-02-21 |
US10352870B2 (en) | 2019-07-16 |
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