JP7390996B2 - 超小型又は超薄型ディスクリート部品の配置 - Google Patents
超小型又は超薄型ディスクリート部品の配置 Download PDFInfo
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- JP7390996B2 JP7390996B2 JP2020146643A JP2020146643A JP7390996B2 JP 7390996 B2 JP7390996 B2 JP 7390996B2 JP 2020146643 A JP2020146643 A JP 2020146643A JP 2020146643 A JP2020146643 A JP 2020146643A JP 7390996 B2 JP7390996 B2 JP 7390996B2
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Description
ウェハ準備プロセスステップでは、ウェハを薄くし、ダイシングして、所望のサイズ及び厚さを有するディスクリート部品を得る。本明細書に記載のプロセスの幾つかでは、ウェハ準備は、ウェハをハンドル基板上に取り付けることを含むことができる。幾つかの例では、ウェハ準備プロセスステップは、(後述する)ウェハ転写プロセスステップの前に起こり得る。幾つかの例では、ウェハ準備プロセスステップは、ウェハ転写プロセスステップの後に起こり得る。幾つかの例では、ウェハ準備プロセスステップは複数のサブステップを含むことができ、その1つ以上は、ウェハ転写プロセスステップの前に起こることがあり、またその1つ以上は、ウェハ転写プロセスステップの後に起こることがある。
ウェハ転写プロセスステップでは、部分的又は完全にダイシングされたハンドルアセンブリ又はダイシングされていないウェハ又はウェハハンドルアセンブリを、ダイシングテープから、透明キャリア又はワッフルパック、ゲルパック、又は別のタイプのキャリアなどのダイキャリアに転写する。様々なアプローチをウェハ転写に使用することができ、場合によってはダイシングプロセスと組み合わせて使用することができる。
部品転写プロセスステップでは、個々のディスクリート部品が、デバイス基板上の目標位置の上に配置される。
部品相互接続プロセスステップでは、ディスクリート部品をデバイス基板に接合する(例えば、機械的に接合するか、又は電気的に接合するか、又はその両方である)。再び図14を参照すると、デバイス基板上の取り付け面708は、ディスクリート部品とデバイス基板との間の接着、電気的接続、又はその両方などの取り付けを促進する取り付け要素を含む。取り付け要素は、熱的に硬化可能であるか、紫外光に曝されると硬化可能であるか、機械的圧力に曝されると硬化可能であるか、又は別のタイプの刺激に応答して硬化可能である材料など、加えられた刺激に応答して硬化可能な材料、又はそれらの任意の2つ以上の組み合わせであり得る。
ハンドル除去プロセスステップでは、ハンドル基板をディスクリート部品から取り外して除去し、デバイス基板に接合されたディスクリート部品のみを残す。ハンドル基板は、ハンドル解放層を介してディスクリート部品に取り付けられ、ハンドル解放層はディスクリート部品とハンドル基板との間の接着を提供し、それは、温度、紫外光、正常又はせん断機械力、又は別の刺激、又はそれらの任意の2つ以上の組み合わせなどの加えられた刺激に応答して解放され得る。
ハンドルアシスト超小型チップアセンブリプロセスは、(側面寸法において)小さすぎるディスクリート部品のアセンブリを、ピックアンドプレースアプローチを用いて移動させることを可能にする。図16に示すように、超小型及び超薄型ディスクリート部品をパッケージングするプロセス410は、一般に、ディスクリート部品製造(412)、ウェハ準備(414-422)、ディスクリート部品転写(424-430)、ディスクリート部品相互接続(430)、及びハンドル除去を含むことができる。プロセス410におけるディスクリート部品転写は、ハンドル基板上へのディスクリート部品転写(424)、ハンドル基板のダイシング(426)、取り付け場所の準備(428)、及びデバイス基板上へのディスクリート部品転写(430)を含む。
図25に示すように、ハンドルアシストパッケージングプロセス1300は、ハンドル基板を用いてフリップチップ構成で超薄型ディスクリート部品をパッケージングすることを可能にする。多数のディスクリート部品を有するウェハが取得又は製造される(1302)。
図27を参照すると、レーザー対応パッケージングプロセス150は、ハンドル基板を使用せずに超薄型、超小型ディスクリート部品のパッケージングを可能にする。多数のディスクリート部品を有するウェハが製造又は取得される(152)。
図28を参照すると、レーザー対応パッケージングプロセス(160)は、ハンドル基板を使用せずに超小型ディスクリート部品のパッケージングを可能にする。多数のディスクリート部品を有するウェハが製造又は取得される(162)。
図29を参照すると、レーザー対応ハンドルアシストパッケージングプロセス180は、ハンドル基板を用いた超薄型ディスクリート部品のパッケージングを可能にする。多数のディスクリート部品を有するウェハが製造又は取得される(182)。
図30を参照すると、レーザー対応ハンドルアシストパッケージングプロセス250は、超薄型ディスクリート部品のパッケージングを可能にする。多数のディスクリート部品を有するウェハが製造又は取得される(252)。
12、614、704 デバイス基板
14 取り付け要素
100、101、103、500 ハンドルアセンブリ
102 アクティブ面
104、104a、304 第1面
105、105a、305、458、464 ハンドル解放層
106、106a、306 第2面
108、108a、308 ハンドル基板
150、160、180、450 プロセス
300 ウェハ
302 支持基板
310 アクティブ層
320、370、501、550、570 ウェハ転写アプローチ
372、552 ダイシング
374、580 制御可能な接着力を有する材料
376、582 熱又は紫外線などの刺激
400 ウェハハンドルアセンブリ
410 超小型及び超薄型のディスクリート部品をパッケージングするプロセス
454 第1ハンドル基板
456 第2ハンドル基板
460 流動性材料の層
462 第3ハンドル基板
502 ブレード
504 レーザービーム
506 ダイシングテープ
508 紫外線、距離
510 真空チャック、特大ハンドルアセンブリ
512 熱剥離テープ
554 透明キャリア600への転写
556 非接触アプローチ
572 ダイシングブレード
574 ステルスダイシングアプローチ
576 熱剥離テープで覆われた真空チャックへの転写
578 透明キャリアへの解放
600 透明キャリア
602 真空チャック
604 動的解放層(DRL)
610 デバイス基板への転写
612 ディスクリート部品接合ツール
618 接着面
700 ピックアンドプレースアプローチ
702 ツール
708 取り付け面
720 超小型及び/又は超薄型ディスクリート部品をフェイスアップ構成でパッケージングするプロセス
800 レーザーアシスト非接触転写法
802 接着剤層
804 レーザー光
806 ブリスター
810 特大ハンドルアセンブリ
812、1202 距離
815 ハンドル解放層
818 仮基板ハンドル
1000 超小型及び超薄型ディスクリート部品をフリップチップ構成でパッケージングするプロセス
1106 導電性材料
1300 ハンドルアシストパッケージングプロセス
Claims (18)
- 基板上の解放構造と前記解放構造上のディスクリート部品との間の接着力を低下させるステップであって、第1状態から第2状態への前記解放構造の状態変化を引き起こす第1刺激を加えるステップを含む、ステップと、
前記解放構造をレーザー光で照射することを含む第2刺激を加え、前記解放構造内にブリスターを形成するステップであって、前記ブリスターが前記ディスクリート部品を前記解放構造から解放させる、ステップと、
を含む方法。 - 状態変化を引き起こすことは、前記解放構造の少なくとも一部の相転移を引き起こすことを含み、前記相転移は、固体から液体への転移又は固体から気体への転移又はその両方を含む、請求項1に記載の方法。
- 状態変化を引き起こすことは、前記解放構造の少なくとも一部の化学構造又は化学組成又はその両方の変化を引き起こすことを含む、請求項1に記載の方法。
- 前記ディスクリート部品を解放するステップは、解放後にディスクリート部品上に前記解放構造からの残留物を残すことなく前記ディスクリート部品を解放するステップを含む、請求項1に記載の方法。
- 前記状態変化は、表面形態の変化を含む、請求項1に記載の方法。
- 基板と、
前記基板上に配置された解放構造であって、当該解放構造がディスクリート部品の前記解放構造への接着を可能にするのに十分である第1接着力を有するように構成され、当該解放構造が第1層及び第2層を含む、解放構造と
を含み、
第1の刺激が前記解放構造に加えられた場合に、前記解放構造の前記第1層は前記第1接着力から第2接着力への接着力の低下を受けるように構成され、前記第2接着力は前記ディスクリート部品を前記解放構造に接着した状態に保持するのに十分であり、
レーザー光の照射が前記解放構造に加えられた場合に、前記解放構造の前記第2層がブリスターを形成するように構成されており、前記ブリスターが前記ディスクリート部品を前記解放構造から解放させる、装置。 - 前記ブリスターは、前記照射に応答して第1状態から第2状態への状態変化によって形成される、請求項6に記載の装置。
- 前記第2層は、前記第1層と前記基板との間に配置される、請求項6に記載の装置。
- 前記第2層は、前記基板に隣接している、請求項8に記載の装置。
- 前記状態変化は、形態の変化を含む、請求項7に記載の装置。
- 解放構造であって、
基板上にフィルムを形成するように構成された制御可能な接着材料であって、第1の刺激の適用に応答して第1接着力から第2接着力への接着力の低下を受けるように構成され、前記第1接着力及び前記第2接着力はともに、前記制御可能な接着材料の前記フィルムへのディスクリート部品の接着を可能にするのに十分である、制御可能な接着材料を含む第1層と、
前記第1層と平行でありかつ前記第1層と接触する第2層であって、紫外線光に感受性を有し、前記紫外線光の適用に応答して第1状態から第2状態への状態変化を受けるように構成され、前記第2状態は、前記制御可能な接着材料の前記フィルムからの前記ディスクリート部品の解放を可能にする状態である、第2層と、
を含む、
解放構造を含む、装置。 - 前記状態変化は、形態の変化を含む、請求項11に記載の装置。
- 前記第1の刺激は、前記制御可能な接着材料の表面形態の変化を引き起こす、請求項11に記載の装置。
- 前記第1の刺激は、前記制御可能な接着材料の少なくとも一部の化学構造又は化学組成又はその両方の変化を引き起こす、請求項11に記載の装置。
- 基板と、
前記基板上に配置された解放構造であって、第1層及び第2層を含み、前記第2層は前記第1層と前記基板との間に配置され、前記第1層は、ディスクリート部品の前記解放構造への接着を可能にするのに十分である第1接着力を有する、解放構造と
を含み、
第1の刺激が前記解放構造に加えられた場合に、前記解放構造の前記第1層は前記第1接着力から第2接着力への接着力の低下を受けるように構成され、前記第2接着力は前記ディスクリート部品を前記解放構造に接着した状態に保持するのに十分であり、
第2の刺激が前記解放構造に加えられた場合に、前記解放構造の前記第2層は第1状態から第2状態への状態変化を受けるように構成され、前記第2状態は前記ディスクリート部品の前記基板からの解放を可能にし、前記状態変化は、形態変化、相転移、化学構造の変化、及び化学組成の変化の1つ以上を含む、装置。 - 前記状態変化は、形態の変化を含む、請求項15に記載の装置。
- 前記第1の刺激は、制御可能な接着材料の少なくとも一部の化学構造又は化学組成又はその両方の変化を引き起こす、請求項15に記載の装置。
- 前記状態変化は、前記解放構造の少なくとも一部の相転移を含み、前記相転移は、固体から液体への転移又は固体から気体への転移又はその両方を含む、請求項15に記載の装置。
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CN108778737B (zh) | 2021-11-26 |
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TW202308015A (zh) | 2023-02-16 |
KR20230118701A (ko) | 2023-08-11 |
EP4360877A2 (en) | 2024-05-01 |
EP3402676A1 (en) | 2018-11-21 |
TWI783910B (zh) | 2022-11-21 |
JP2020194980A (ja) | 2020-12-03 |
JP6759343B2 (ja) | 2020-09-23 |
JP2023010701A (ja) | 2023-01-20 |
CN108778737A (zh) | 2018-11-09 |
WO2017123780A1 (en) | 2017-07-20 |
US10748802B2 (en) | 2020-08-18 |
KR20180101541A (ko) | 2018-09-12 |
TW201725642A (zh) | 2017-07-16 |
EP3402676B1 (en) | 2023-12-20 |
US20190057891A1 (en) | 2019-02-21 |
KR102203790B1 (ko) | 2021-01-18 |
EP3402676A4 (en) | 2019-09-11 |
KR102561688B1 (ko) | 2023-07-31 |
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