JP7384489B2 - 基板支持組立体及び基板処理装置 - Google Patents
基板支持組立体及び基板処理装置 Download PDFInfo
- Publication number
- JP7384489B2 JP7384489B2 JP2022510863A JP2022510863A JP7384489B2 JP 7384489 B2 JP7384489 B2 JP 7384489B2 JP 2022510863 A JP2022510863 A JP 2022510863A JP 2022510863 A JP2022510863 A JP 2022510863A JP 7384489 B2 JP7384489 B2 JP 7384489B2
- Authority
- JP
- Japan
- Prior art keywords
- hole
- diameter
- screw
- substrate
- substrate support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title claims description 121
- 238000003780 insertion Methods 0.000 claims description 34
- 230000037431 insertion Effects 0.000 claims description 34
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 11
- 238000005530 etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
前記シャフト本体は,前記連結本体と前記ピンシャフトとの間に配置される外側本体を更に含むが,前記ねじ孔の谷の径は前記外側遊動孔の直径及び前記外側本体の直径より小さい。
Claims (8)
- 一面から穿設される挿入孔を一つ以上有し,前記挿入孔は内側遊動孔と前記内側遊動孔の外側に位置するねじ孔とを有する支持フレームと,
一側が前記挿入孔に挿入配置されるシャフト本体と,前記シャフト本体に連結されて基板を接触支持するピンシャフトと,を備え,前記シャフト本体は,前記挿入孔に挿入配置された状態で前記内側遊動孔に位置する内側ねじ本体と,前記内側ねじ本体と前記ピンシャフトとの間に配置され,前記ねじ孔に位置する連結本体とを備える基板支持体を含み,
前記ねじ孔の内周面に雌ねじが形成され,前記雌ねじに対応する雄ねじが前記内側ねじ本体の外周面に形成され,
前記ねじ孔の前記雌ねじの内径は前記内側遊動孔の直径及び前記内側ねじ本体の前記雄ねじの外径より小さく,前記内側ねじ本体は回転によって前記ねじ孔を通過する基板支持組立体。 - 前記支持フレームは,前記ねじ孔の外側に位置する外側遊動孔を更に有し,
前記シャフト本体は,前記連結本体と前記ピンシャフトとの間に配置される外側本体を更に備え,
前記ねじ孔の前記雌ねじの谷の径は前記外側遊動孔の直径及び前記外側本体の直径より小さい請求項1記載の基板支持組立体。 - 前記支持フレームは前記ねじ孔の外側に位置し,中心に向かって内側に傾斜する外側遊動孔を更に有し,
前記シャフト本体は前記連結本体と前記ピンシャフトとの間に配置され,中心に向かって内側に傾斜する外側本体を更に備え,
前記ねじ孔の前記雌ねじの谷の径は前記外側遊動孔の直径及び前記外側本体の最小直径より小さい請求項1記載の基板支持組立体。 - 前記連結本体の長さは前記ねじ孔の長さより大きい請求項1乃至請求項3いずれか1項記載の基板支持組立体。
- 前記支持フレームは,
環状のベースと,
前記ベースの上面に配置され,前記内側遊動孔及び前記ねじ孔が形成される支持ロッドと,を備える請求項1乃至請求項3いずれか1項記載の基板支持組立体。 - 反応チェンバと,
前記反応チェンバ内で被処理基板を支持する支持台と,
前記被処理基板を前記支持台から持ち上げた状態で支持可能な基板支持組立体と,を含み,
前記基板支持組立体は,
一面から穿設した挿入孔を一つ以上有し,前記挿入孔は内側遊動孔と前記内側遊動孔の外側に位置するねじ孔とを有する支持フレームと,
一側が前記挿入孔に挿入配置されるシャフト本体と,前記シャフト本体に連結されて基板を接触支持するピンシャフトと,を備え,前記シャフト本体は,前記挿入孔に挿入配置された状態で前記内側遊動孔に位置する内側ねじ本体と,前記内側ねじ本体と前記ピンシャフトとの間に配置され,前記ねじ孔に位置する連結本体とを備える基板支持体を含み,
前記ねじ孔の内周面に雌ねじが形成され,前記雌ねじに対応する雄ねじが前記内側ねじ本体の外周面に形成され,
前記ねじ孔の前記雌ねじの内径は前記内側遊動孔の直径及び前記内側ねじ本体の前記雄ねじの外径より小さく,前記内側ねじ本体は回転によって前記ねじ孔を通過する基板処理装置。 - 前記支持フレームは,前記ねじ孔の外側に位置する外側遊動孔を更に有し,
前記シャフト本体は,前記連結本体と前記ピンシャフトとの間に配置される外側本体を更に備え,
前記ねじ孔の前記雌ねじの谷の径は前記外側遊動孔の直径及び前記外側本体の直径より小さい請求項6記載の基板処理装置。 - 前記支持フレームは前記ねじ孔の外側に位置し,中心に向かって内側に傾斜する外側遊動孔を更に有し,
前記シャフト本体は前記連結本体と前記ピンシャフトとの間に配置され,中心に向かって内側に傾斜する外側本体を更に備え,
前記ねじ孔の前記雌ねじの谷の径は前記外側遊動孔の直径及び前記外側本体の最小直径より小さい請求項6記載の基板処理装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020190100882A KR102310036B1 (ko) | 2019-08-19 | 2019-08-19 | 기판 지지 조립체 및 기판 처리 장치 |
KR10-2019-0100882 | 2019-08-19 | ||
PCT/KR2020/009804 WO2021033934A1 (ko) | 2019-08-19 | 2020-07-24 | 기판 지지 조립체 및 기판 처리 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022544697A JP2022544697A (ja) | 2022-10-20 |
JP7384489B2 true JP7384489B2 (ja) | 2023-11-21 |
Family
ID=74660293
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022510863A Active JP7384489B2 (ja) | 2019-08-19 | 2020-07-24 | 基板支持組立体及び基板処理装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20220336259A1 (ja) |
JP (1) | JP7384489B2 (ja) |
KR (1) | KR102310036B1 (ja) |
CN (1) | CN114207804A (ja) |
TW (1) | TWI761916B (ja) |
WO (1) | WO2021033934A1 (ja) |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000260854A (ja) | 1999-03-09 | 2000-09-22 | Hitachi Ltd | 半導体ウェハ押し上げ機構 |
JP2006294868A (ja) | 2005-04-11 | 2006-10-26 | Asm Japan Kk | ウエハ保持装置 |
JP2007242954A (ja) | 2006-03-09 | 2007-09-20 | Tokyo Electron Ltd | リフタ及びリフタを備える被処理体の処理装置 |
JP2007250796A (ja) | 2006-03-15 | 2007-09-27 | Tokyo Electron Ltd | リフタ及びリフタを備える被処理体の処理装置 |
JP2008187102A (ja) | 2007-01-31 | 2008-08-14 | Tokyo Electron Ltd | 基板処理装置 |
JP2011525717A (ja) | 2008-06-24 | 2011-09-22 | アプライド マテリアルズ インコーポレイテッド | 大型足部リフトピン |
US20190214290A1 (en) | 2018-01-09 | 2019-07-11 | Varian Semiconductor Equipment Associates, Inc. | Lift pin system for wafer handling |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000051210A (ko) * | 1999-01-19 | 2000-08-16 | 윤종용 | 씨브디 설비의 웨이퍼 리프트 장치 |
JP3398936B2 (ja) * | 1999-04-09 | 2003-04-21 | 日本エー・エス・エム株式会社 | 半導体処理装置 |
JP2003011430A (ja) | 2001-07-04 | 2003-01-15 | Fuji Photo Film Co Ltd | 画像記録方法及び装置 |
KR20030021493A (ko) * | 2001-09-06 | 2003-03-15 | 삼성전자주식회사 | 리프트핀을 갖춘 웨이퍼 처리 장치 및 이를 포함하는반도체 소자 제조 장치 |
US20120270384A1 (en) * | 2011-04-22 | 2012-10-25 | Applied Materials, Inc. | Apparatus for deposition of materials on a substrate |
US9167625B2 (en) * | 2011-11-23 | 2015-10-20 | Asm Ip Holding B.V. | Radiation shielding for a substrate holder |
-
2019
- 2019-08-19 KR KR1020190100882A patent/KR102310036B1/ko active IP Right Grant
-
2020
- 2020-07-24 WO PCT/KR2020/009804 patent/WO2021033934A1/ko active Application Filing
- 2020-07-24 US US17/635,920 patent/US20220336259A1/en active Pending
- 2020-07-24 CN CN202080056395.0A patent/CN114207804A/zh active Pending
- 2020-07-24 JP JP2022510863A patent/JP7384489B2/ja active Active
- 2020-08-19 TW TW109128289A patent/TWI761916B/zh active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000260854A (ja) | 1999-03-09 | 2000-09-22 | Hitachi Ltd | 半導体ウェハ押し上げ機構 |
JP2006294868A (ja) | 2005-04-11 | 2006-10-26 | Asm Japan Kk | ウエハ保持装置 |
JP2007242954A (ja) | 2006-03-09 | 2007-09-20 | Tokyo Electron Ltd | リフタ及びリフタを備える被処理体の処理装置 |
JP2007250796A (ja) | 2006-03-15 | 2007-09-27 | Tokyo Electron Ltd | リフタ及びリフタを備える被処理体の処理装置 |
JP2008187102A (ja) | 2007-01-31 | 2008-08-14 | Tokyo Electron Ltd | 基板処理装置 |
JP2011525717A (ja) | 2008-06-24 | 2011-09-22 | アプライド マテリアルズ インコーポレイテッド | 大型足部リフトピン |
US20190214290A1 (en) | 2018-01-09 | 2019-07-11 | Varian Semiconductor Equipment Associates, Inc. | Lift pin system for wafer handling |
Also Published As
Publication number | Publication date |
---|---|
CN114207804A (zh) | 2022-03-18 |
TW202123382A (zh) | 2021-06-16 |
JP2022544697A (ja) | 2022-10-20 |
TWI761916B (zh) | 2022-04-21 |
WO2021033934A1 (ko) | 2021-02-25 |
KR20210021685A (ko) | 2021-03-02 |
US20220336259A1 (en) | 2022-10-20 |
KR102310036B1 (ko) | 2021-10-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI567863B (zh) | Plasma processing device, substrate unloading device and method | |
TWI659490B (zh) | Substrate mounting device and substrate processing device | |
US20120258414A1 (en) | Substrate support instrument, and vertical heat treatment apparatus and driving method thereof | |
US11315807B2 (en) | Substrate pressing module, substrate pressing method, substrate treating apparatus including the substrate treating module, and the substrate treating method | |
JP2008041969A (ja) | 基板の脱離方法 | |
JP7384489B2 (ja) | 基板支持組立体及び基板処理装置 | |
KR100920384B1 (ko) | 평판표시소자 제조장치의 리프트 핀 모듈 | |
JP2821088B2 (ja) | ウェーハ載置台 | |
KR101345605B1 (ko) | 승강 장치, 이를 포함하는 기판 처리 장치 및 이를이용하여 기판을 처리하는 방법 | |
TWI753580B (zh) | 基板處理設備及基板處理方法 | |
KR20060118742A (ko) | 웨이퍼 리프팅 장치 | |
KR100596328B1 (ko) | 평판표시소자 제조장치의 리프트 핀 모듈 | |
TWI791215B (zh) | 基板處理裝置及基板處理方法 | |
KR20030026059A (ko) | 웨이퍼 리프트 핀 | |
JPH11111821A (ja) | 基板支持装置 | |
KR100553102B1 (ko) | 리프트 핀 모듈 및 그것을 구비하는 평판표시소자 제조장치 | |
JP3323168B2 (ja) | 半導体製造装置 | |
KR20240041723A (ko) | 위치 조절 기구 및 이를 포함하는 웨이퍼 처리 장치 | |
JPH08124999A (ja) | 基板押上げピンの着脱構造 | |
KR20170126111A (ko) | 리프트핀용 지지유닛 및 이를 사용한 기판처리장치 | |
KR20090048202A (ko) | 기판 안착 장치 및 기판 안착 방법 | |
KR20130058411A (ko) | 리프트 핀 조립체 및 이를 포함하는 기판 처리 장치 | |
US20130269877A1 (en) | Semiconductor processing apparatus | |
TW202345256A (zh) | 用於改善基板黏著現象的基板處理裝置和基板處理方法 | |
KR20040043026A (ko) | 리프팅 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220324 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230322 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230327 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230623 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20231004 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20231101 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7384489 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |