JP7377890B2 - 蛍光ｘ線分析装置 - Google Patents
蛍光ｘ線分析装置 Download PDFInfo
- Publication number
- JP7377890B2 JP7377890B2 JP2021562654A JP2021562654A JP7377890B2 JP 7377890 B2 JP7377890 B2 JP 7377890B2 JP 2021562654 A JP2021562654 A JP 2021562654A JP 2021562654 A JP2021562654 A JP 2021562654A JP 7377890 B2 JP7377890 B2 JP 7377890B2
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- JP
- Japan
- Prior art keywords
- ray
- fluorescent
- rays
- liquid sample
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000007788 liquid Substances 0.000 claims description 62
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 42
- 229910052710 silicon Inorganic materials 0.000 claims description 42
- 239000010703 silicon Substances 0.000 claims description 42
- 238000001514 detection method Methods 0.000 claims description 29
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 18
- 229910052698 phosphorus Inorganic materials 0.000 claims description 18
- 239000011574 phosphorus Substances 0.000 claims description 18
- 238000002441 X-ray diffraction Methods 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 claims description 17
- 239000012528 membrane Substances 0.000 claims description 16
- 238000004876 x-ray fluorescence Methods 0.000 claims description 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 229910052727 yttrium Inorganic materials 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 3
- 239000004734 Polyphenylene sulfide Substances 0.000 claims description 3
- 239000004760 aramid Substances 0.000 claims description 3
- 229920003235 aromatic polyamide Polymers 0.000 claims description 3
- 125000003118 aryl group Chemical group 0.000 claims description 3
- 229910021389 graphene Inorganic materials 0.000 claims description 3
- 229920001643 poly(ether ketone) Polymers 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 229920000069 polyphenylene sulfide Polymers 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 claims description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 30
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 15
- 238000005259 measurement Methods 0.000 description 11
- 238000010521 absorption reaction Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 235000013619 trace mineral Nutrition 0.000 description 3
- 239000011573 trace mineral Substances 0.000 description 3
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000004445 quantitative analysis Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019218356 | 2019-12-02 | ||
| JP2019218356 | 2019-12-02 | ||
| PCT/JP2020/044667 WO2021112079A1 (ja) | 2019-12-02 | 2020-12-01 | 蛍光ｘ線分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPWO2021112079A1 JPWO2021112079A1 (https=) | 2021-06-10 |
| JP7377890B2 true JP7377890B2 (ja) | 2023-11-10 |
Family
ID=76222413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021562654A Active JP7377890B2 (ja) | 2019-12-02 | 2020-12-01 | 蛍光ｘ線分析装置 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7377890B2 (https=) |
| WO (1) | WO2021112079A1 (https=) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001235437A (ja) | 2000-02-21 | 2001-08-31 | Technos Kenkyusho:Kk | 全反射蛍光ｘ線分析装置 |
| WO2004088296A1 (ja) | 2003-03-28 | 2004-10-14 | Rigaku Industrial Corporation | 蛍光ｘ線分析装置 |
| JP2008039772A (ja) | 2006-07-14 | 2008-02-21 | Japan Science & Technology Agency | Ｘ線分析装置及びｘ線分析方法 |
| JP2011107005A (ja) | 2009-11-19 | 2011-06-02 | Seiko Instruments Inc | 蛍光ｘ線検査装置及び蛍光ｘ線検査方法 |
| JP2013108759A (ja) | 2011-11-17 | 2013-06-06 | Fuji Electric Co Ltd | 半導体ウェハプロセス用ふっ酸溶液の不純物分析方法および該ふっ酸溶液の交換時期の管理方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01126555U (https=) * | 1988-02-24 | 1989-08-29 | ||
| JP3117833B2 (ja) * | 1993-03-01 | 2000-12-18 | セイコーインスツルメンツ株式会社 | 蛍光ｘ線分析装置 |
| JP3287069B2 (ja) * | 1993-08-13 | 2002-05-27 | 住友電気工業株式会社 | 全反射蛍光ｘ線分析の測定方法及びその装置 |
| IL120429A (en) * | 1997-03-12 | 2000-09-28 | Jordan Valley Applied Radiation Ltd | X-ray fluorescence analyzer |
| JP2005345442A (ja) * | 2004-06-07 | 2005-12-15 | Rigaku Industrial Co | 蛍光ｘ線分析用液体試料容器 |
| JP2006030018A (ja) * | 2004-07-16 | 2006-02-02 | Nyuurii Kk | 蛍光ｘ線分析装置 |
| JP4838821B2 (ja) * | 2008-03-18 | 2011-12-14 | 株式会社リガク | 蛍光ｘ線分析用試料保持具ならびにそれを用いる蛍光ｘ線分析方法および装置 |
| JP5487936B2 (ja) * | 2009-12-16 | 2014-05-14 | 東亜ディーケーケー株式会社 | 蛍光ｘ線液分析計 |
| JP2017083346A (ja) * | 2015-10-29 | 2017-05-18 | 株式会社堀場製作所 | 液体試料分析装置 |
-
2020
- 2020-12-01 JP JP2021562654A patent/JP7377890B2/ja active Active
- 2020-12-01 WO PCT/JP2020/044667 patent/WO2021112079A1/ja not_active Ceased
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001235437A (ja) | 2000-02-21 | 2001-08-31 | Technos Kenkyusho:Kk | 全反射蛍光ｘ線分析装置 |
| WO2004088296A1 (ja) | 2003-03-28 | 2004-10-14 | Rigaku Industrial Corporation | 蛍光ｘ線分析装置 |
| JP2008039772A (ja) | 2006-07-14 | 2008-02-21 | Japan Science & Technology Agency | Ｘ線分析装置及びｘ線分析方法 |
| JP2011107005A (ja) | 2009-11-19 | 2011-06-02 | Seiko Instruments Inc | 蛍光ｘ線検査装置及び蛍光ｘ線検査方法 |
| JP2013108759A (ja) | 2011-11-17 | 2013-06-06 | Fuji Electric Co Ltd | 半導体ウェハプロセス用ふっ酸溶液の不純物分析方法および該ふっ酸溶液の交換時期の管理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021112079A1 (ja) | 2021-06-10 |
| JPWO2021112079A1 (https=) | 2021-06-10 |
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