JP7359321B2 - 天井保管システム - Google Patents
天井保管システム Download PDFInfo
- Publication number
- JP7359321B2 JP7359321B2 JP2022573956A JP2022573956A JP7359321B2 JP 7359321 B2 JP7359321 B2 JP 7359321B2 JP 2022573956 A JP2022573956 A JP 2022573956A JP 2022573956 A JP2022573956 A JP 2022573956A JP 7359321 B2 JP7359321 B2 JP 7359321B2
- Authority
- JP
- Japan
- Prior art keywords
- unit
- rail
- shelf
- hanging member
- scaffolding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000003860 storage Methods 0.000 title claims description 78
- 230000032258 transport Effects 0.000 description 46
- 239000000463 material Substances 0.000 description 19
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 12
- 238000012546 transfer Methods 0.000 description 12
- 238000012423 maintenance Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000009194 climbing Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0464—Storage devices mechanical with access from above
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B61—RAILWAYS
- B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
- B61B13/00—Other railway systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Description
Claims (5)
- 少なくとも一部が格子状に配置されたレール上を走行する走行部、及び、前記走行部から懸垂され前記レールの下側で物品を保持する本体部を有する天井搬送車と、
前記レールの下方に配置され、前記物品を保管する保管棚と、を備えた天井保管システムであって、
前記保管棚は、
上下方向に延在する複数本の吊り部材であって、中間部にレール支持部が設けられるとともに下端部にユニット支持部が設けられる吊り部材と、
前記吊り部材の前記ユニット支持部に支持される棚ユニット及び足場ユニットと、を有し、
前記棚ユニットのコーナー部、及び前記足場ユニットのコーナー部が、前記ユニット支持部に支持されている、天井保管システム。 - 前記棚ユニット、及び前記足場ユニットは、平面視において四角形状である、請求項1に記載の天井保管システム。
- 前記吊り部材は、前記レール支持部から下端が突出する上吊り部材と、前記上吊り部材に上端が連結される下吊り部材と、を含む、請求項1又は2に記載の天井保管システム。
- 前記足場ユニットが、前記棚ユニットと別の前記棚ユニットとの間に配置される、請求項1~3のいずれか一項に記載の天井保管システム。
- 前記レールは、
第1方向に沿って延びる複数の第1レールと、
前記第1方向と交差する第2方向に沿って延びる複数の第2レールと、
前記第1レールの端部及び前記第2レールの端部のそれぞれに対して、前記走行部と前記本体部とを連結する連結部が通過可能な隙間をあけて配置された複数の交差点レールと、を含み、
前記第2方向に並ぶ一対の前記第1レールと、前記第1方向に並ぶ一対の前記第2レールと、によって、前記格子状の一つのマス目を構成するセルが画成されており、
前記棚ユニット、及び前記足場ユニットは、それぞれ、平面視において、整数個配列された前記セルに対応する形状及び大きさを有する、請求項1~4のいずれか一項に記載の天井保管システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021000565 | 2021-01-05 | ||
JP2021000565 | 2021-01-05 | ||
PCT/JP2021/045131 WO2022149397A1 (ja) | 2021-01-05 | 2021-12-08 | 天井保管システム |
Publications (3)
Publication Number | Publication Date |
---|---|
JPWO2022149397A1 JPWO2022149397A1 (ja) | 2022-07-14 |
JPWO2022149397A5 JPWO2022149397A5 (ja) | 2023-07-28 |
JP7359321B2 true JP7359321B2 (ja) | 2023-10-11 |
Family
ID=82357678
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022573956A Active JP7359321B2 (ja) | 2021-01-05 | 2021-12-08 | 天井保管システム |
Country Status (8)
Country | Link |
---|---|
US (1) | US20240059488A1 (ja) |
EP (1) | EP4276040A1 (ja) |
JP (1) | JP7359321B2 (ja) |
KR (1) | KR20230128057A (ja) |
CN (1) | CN116685541A (ja) |
IL (1) | IL303939A (ja) |
TW (1) | TW202227299A (ja) |
WO (1) | WO2022149397A1 (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2568451A (en) | 2017-08-23 | 2019-05-22 | Nicholls Ind Building Services Ltd | Walkway system |
WO2020017137A1 (ja) | 2018-07-20 | 2020-01-23 | 村田機械株式会社 | 保管棚及び保管棚の設置方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102165190B1 (ko) | 2016-08-26 | 2020-10-12 | 무라다기카이가부시끼가이샤 | 유궤도 대차 시스템 및 유궤도 대차 |
JP7283550B2 (ja) * | 2019-09-18 | 2023-05-30 | 村田機械株式会社 | 搬送システム及び保管部 |
-
2021
- 2021-12-08 IL IL303939A patent/IL303939A/en unknown
- 2021-12-08 JP JP2022573956A patent/JP7359321B2/ja active Active
- 2021-12-08 WO PCT/JP2021/045131 patent/WO2022149397A1/ja active Application Filing
- 2021-12-08 EP EP21917618.7A patent/EP4276040A1/en active Pending
- 2021-12-08 KR KR1020237025729A patent/KR20230128057A/ko unknown
- 2021-12-08 CN CN202180087526.6A patent/CN116685541A/zh active Pending
- 2021-12-08 US US18/269,581 patent/US20240059488A1/en active Pending
- 2021-12-29 TW TW110149252A patent/TW202227299A/zh unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2568451A (en) | 2017-08-23 | 2019-05-22 | Nicholls Ind Building Services Ltd | Walkway system |
WO2020017137A1 (ja) | 2018-07-20 | 2020-01-23 | 村田機械株式会社 | 保管棚及び保管棚の設置方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20230128057A (ko) | 2023-09-01 |
CN116685541A (zh) | 2023-09-01 |
US20240059488A1 (en) | 2024-02-22 |
WO2022149397A1 (ja) | 2022-07-14 |
TW202227299A (zh) | 2022-07-16 |
EP4276040A1 (en) | 2023-11-15 |
JPWO2022149397A1 (ja) | 2022-07-14 |
IL303939A (en) | 2023-08-01 |
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