JP7350559B2 - エンコーダ装置、駆動装置、ロボット装置、位置検出方法、物品の製造方法、プログラム、及び記録媒体 - Google Patents

エンコーダ装置、駆動装置、ロボット装置、位置検出方法、物品の製造方法、プログラム、及び記録媒体 Download PDF

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JP7350559B2
JP7350559B2 JP2019146511A JP2019146511A JP7350559B2 JP 7350559 B2 JP7350559 B2 JP 7350559B2 JP 2019146511 A JP2019146511 A JP 2019146511A JP 2019146511 A JP2019146511 A JP 2019146511A JP 7350559 B2 JP7350559 B2 JP 7350559B2
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scale
detection
detection unit
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absolute position
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JP2021025973A (ja
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春彦 堀口
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Canon Inc
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Canon Inc
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Priority to US16/931,604 priority patent/US11709076B2/en
Priority to CN202010789737.1A priority patent/CN112338961B/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B25J19/0095—Means or methods for testing manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/088—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices with position, velocity or acceleration sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/24471—Error correction
    • G01D5/2448—Correction of gain, threshold, offset or phase control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • G01D5/34794—Optical encoders using the Vernier principle, i.e. incorporating two or more tracks having a (n, n+1, ...) relationship
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/33—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an analogue measuring device
    • G05B19/35—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an analogue measuring device for point-to-point control
    • G05B19/351—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an analogue measuring device for point-to-point control the positional error is used to control continuously the servomotor according to its magnitude
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1679—Program controls characterised by the tasks executed
    • B25J9/1692—Calibration of manipulator
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/27—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an absolute digital measuring device
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37104—Absolute encoder
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37499—Determine cumulative deviation, difference
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/39—Robotics, robotics to robotics hand
    • G05B2219/39058—Sensor, calibration of sensor, potentiometer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Optical Transform (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Manipulator (AREA)
JP2019146511A 2019-08-08 2019-08-08 エンコーダ装置、駆動装置、ロボット装置、位置検出方法、物品の製造方法、プログラム、及び記録媒体 Active JP7350559B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019146511A JP7350559B2 (ja) 2019-08-08 2019-08-08 エンコーダ装置、駆動装置、ロボット装置、位置検出方法、物品の製造方法、プログラム、及び記録媒体
US16/931,604 US11709076B2 (en) 2019-08-08 2020-07-17 Encoder apparatus and position detection method
CN202010789737.1A CN112338961B (zh) 2019-08-08 2020-08-07 编码器装置和位置检测方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019146511A JP7350559B2 (ja) 2019-08-08 2019-08-08 エンコーダ装置、駆動装置、ロボット装置、位置検出方法、物品の製造方法、プログラム、及び記録媒体

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JP2021025973A5 JP2021025973A5 (https=) 2022-08-12
JP7350559B2 true JP7350559B2 (ja) 2023-09-26

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US11964389B2 (en) 2017-11-15 2024-04-23 Universal Robots A/S Strain wave gear with output flange and integrated encoder
JP7646393B2 (ja) * 2021-03-02 2025-03-17 キヤノン株式会社 ロボットシステム、トルクセンサ、変位検出装置、検出方法、物品の製造方法、プログラム及び記録媒体
DK180930B1 (en) 2021-03-25 2022-06-29 Universal Robots As Strain wave gear with encoder integration
CN113746394B (zh) * 2021-09-09 2022-05-03 江苏汉武智能科技有限公司 基于磁性传感器的自纠错运动控制方法及系统
US12528200B2 (en) * 2021-12-30 2026-01-20 Francis Joseph Osebold, III Light for teach pendant
CN114520613B (zh) * 2022-03-17 2022-11-15 哈尔滨理工大学 一种基于参数引入的异步电机速度反馈观测算法的速度估计方法
US20250375906A1 (en) * 2022-06-20 2025-12-11 Universal Robots A/S Robot element with illuminating ring
CN115502970B (zh) * 2022-09-02 2026-03-24 北京极智嘉科技股份有限公司 位置检测组件、运动控制系统及机器人

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JP2012529028A (ja) 2009-06-05 2012-11-15 レニショウ パブリック リミテッド カンパニー 位置測定エンコーダおよび操作方法
JP2014126492A (ja) 2012-12-27 2014-07-07 Canon Inc 位置検出装置、駆動制御装置及びレンズ装置
JP2015121405A (ja) 2013-12-20 2015-07-02 キヤノン株式会社 アブソリュートエンコーダおよび装置

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US7465917B2 (en) * 2006-02-16 2008-12-16 Avago Technologies General Ip (Singapore) Pte. Ltd. Absolute encoder utilizing light of different wavelengths to reduce cross-talk
DE102008043556B4 (de) 2008-11-07 2022-03-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP5155223B2 (ja) * 2009-03-17 2013-03-06 株式会社ミツトヨ アブソリュート型リニアエンコーダ、及び、その位置調整方法
WO2012050130A1 (ja) * 2010-10-12 2012-04-19 株式会社ニコン エンコーダ、駆動装置及びロボット装置
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JP2018185210A (ja) 2017-04-25 2018-11-22 セイコーエプソン株式会社 エンコーダー、プリンターおよびロボット
JP6932983B2 (ja) 2017-05-01 2021-09-08 セイコーエプソン株式会社 エンコーダースケール、エンコーダースケールの製造方法、エンコーダー、ロボットおよびプリンター
JP6971822B2 (ja) 2017-12-11 2021-11-24 キヤノン株式会社 エンコーダ、ロボット及びギャップ測定方法
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JP2014126492A (ja) 2012-12-27 2014-07-07 Canon Inc 位置検出装置、駆動制御装置及びレンズ装置
JP2015121405A (ja) 2013-12-20 2015-07-02 キヤノン株式会社 アブソリュートエンコーダおよび装置

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US11709076B2 (en) 2023-07-25
US20210041846A1 (en) 2021-02-11
CN112338961A (zh) 2021-02-09
CN112338961B (zh) 2024-02-06

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