JP7349779B2 - 石英ガラスるつぼ - Google Patents

石英ガラスるつぼ Download PDF

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Publication number
JP7349779B2
JP7349779B2 JP2018150790A JP2018150790A JP7349779B2 JP 7349779 B2 JP7349779 B2 JP 7349779B2 JP 2018150790 A JP2018150790 A JP 2018150790A JP 2018150790 A JP2018150790 A JP 2018150790A JP 7349779 B2 JP7349779 B2 JP 7349779B2
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JP
Japan
Prior art keywords
layer
devitrification
quartz glass
glass crucible
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018150790A
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English (en)
Japanese (ja)
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JP2020026362A (ja
JP2020026362A5 (enExample
Inventor
裕二 馬場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2018150790A priority Critical patent/JP7349779B2/ja
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to SG11202101068VA priority patent/SG11202101068VA/en
Priority to PCT/JP2019/022168 priority patent/WO2020031481A1/ja
Priority to KR1020217003924A priority patent/KR102788131B1/ko
Priority to EP19847282.1A priority patent/EP3835270B1/en
Priority to CN201980050978.XA priority patent/CN112533878A/zh
Priority to US17/267,283 priority patent/US11821103B2/en
Priority to TW108120019A priority patent/TWI795571B/zh
Publication of JP2020026362A publication Critical patent/JP2020026362A/ja
Publication of JP2020026362A5 publication Critical patent/JP2020026362A5/ja
Application granted granted Critical
Publication of JP7349779B2 publication Critical patent/JP7349779B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
JP2018150790A 2018-08-09 2018-08-09 石英ガラスるつぼ Active JP7349779B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2018150790A JP7349779B2 (ja) 2018-08-09 2018-08-09 石英ガラスるつぼ
PCT/JP2019/022168 WO2020031481A1 (ja) 2018-08-09 2019-06-04 石英ガラスるつぼ
KR1020217003924A KR102788131B1 (ko) 2018-08-09 2019-06-04 석영유리 도가니
EP19847282.1A EP3835270B1 (en) 2018-08-09 2019-06-04 Quartz glass crucible
SG11202101068VA SG11202101068VA (en) 2018-08-09 2019-06-04 Quartz glass crucible
CN201980050978.XA CN112533878A (zh) 2018-08-09 2019-06-04 石英玻璃坩埚
US17/267,283 US11821103B2 (en) 2018-08-09 2019-06-04 Quartz glass crucible
TW108120019A TWI795571B (zh) 2018-08-09 2019-06-11 石英玻璃坩堝

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018150790A JP7349779B2 (ja) 2018-08-09 2018-08-09 石英ガラスるつぼ

Publications (3)

Publication Number Publication Date
JP2020026362A JP2020026362A (ja) 2020-02-20
JP2020026362A5 JP2020026362A5 (enExample) 2021-03-11
JP7349779B2 true JP7349779B2 (ja) 2023-09-25

Family

ID=69415494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018150790A Active JP7349779B2 (ja) 2018-08-09 2018-08-09 石英ガラスるつぼ

Country Status (8)

Country Link
US (1) US11821103B2 (enExample)
EP (1) EP3835270B1 (enExample)
JP (1) JP7349779B2 (enExample)
KR (1) KR102788131B1 (enExample)
CN (1) CN112533878A (enExample)
SG (1) SG11202101068VA (enExample)
TW (1) TWI795571B (enExample)
WO (1) WO2020031481A1 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018104248A (ja) 2016-12-28 2018-07-05 クアーズテック株式会社 シリコン単結晶引上げ用石英ガラスルツボ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10182139A (ja) 1996-12-18 1998-07-07 Mitsubishi Chem Corp 合成石英ガラス粉末の品質評価方法
JPH10203893A (ja) * 1997-01-20 1998-08-04 Mitsubishi Materials Shilicon Corp 高強度石英ガラスルツボ及びその製造方法
JP4140868B2 (ja) 1998-08-31 2008-08-27 信越石英株式会社 シリコン単結晶引き上げ用石英ガラスるつぼ及び その製造方法
JP3621282B2 (ja) 1999-02-25 2005-02-16 東芝セラミックス株式会社 石英ガラスルツボおよびその製造方法
DE10217946A1 (de) 2002-04-22 2003-11-13 Heraeus Quarzglas Quarzglastiegel und Verfahren zur Herstellung desselben
JP4717771B2 (ja) * 2006-09-28 2011-07-06 コバレントマテリアル株式会社 シリカガラスルツボ
JP4814855B2 (ja) 2007-09-28 2011-11-16 コバレントマテリアル株式会社 シリカガラスルツボ
JP5069663B2 (ja) 2008-10-31 2012-11-07 ジャパンスーパークォーツ株式会社 多層構造を有する石英ガラスルツボ
JP5774400B2 (ja) * 2010-08-12 2015-09-09 株式会社Sumco シリカ粉の評価方法、シリカガラスルツボ、シリカガラスルツボの製造方法
JP5992572B2 (ja) 2010-08-12 2016-09-14 株式会社Sumco シリカ粉の評価方法、シリカガラスルツボ、シリカガラスルツボの製造方法
JP2017186135A (ja) * 2016-04-07 2017-10-12 理想科学工業株式会社 印刷システム
JP2018104247A (ja) 2016-12-28 2018-07-05 クアーズテック株式会社 シリカ焼結体とその製造方法
JP6855358B2 (ja) 2017-09-27 2021-04-07 クアーズテック株式会社 シリコン単結晶引上げ用石英ガラスルツボ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018104248A (ja) 2016-12-28 2018-07-05 クアーズテック株式会社 シリコン単結晶引上げ用石英ガラスルツボ

Also Published As

Publication number Publication date
EP3835270B1 (en) 2025-11-26
TW202018134A (zh) 2020-05-16
EP3835270A4 (en) 2022-05-04
WO2020031481A1 (ja) 2020-02-13
TWI795571B (zh) 2023-03-11
JP2020026362A (ja) 2020-02-20
US20210310151A1 (en) 2021-10-07
KR102788131B1 (ko) 2025-03-31
CN112533878A (zh) 2021-03-19
EP3835270A1 (en) 2021-06-16
KR20210040976A (ko) 2021-04-14
SG11202101068VA (en) 2021-03-30
US11821103B2 (en) 2023-11-21

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