JP7327514B2 - ポンプ装置 - Google Patents

ポンプ装置 Download PDF

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Publication number
JP7327514B2
JP7327514B2 JP2021566859A JP2021566859A JP7327514B2 JP 7327514 B2 JP7327514 B2 JP 7327514B2 JP 2021566859 A JP2021566859 A JP 2021566859A JP 2021566859 A JP2021566859 A JP 2021566859A JP 7327514 B2 JP7327514 B2 JP 7327514B2
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JP
Japan
Prior art keywords
pump
housing
pump device
main surface
main
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021566859A
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English (en)
Japanese (ja)
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JPWO2021131288A5 (https=
JPWO2021131288A1 (https=
Inventor
幸治 兒玉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2021131288A1 publication Critical patent/JPWO2021131288A1/ja
Publication of JPWO2021131288A5 publication Critical patent/JPWO2021131288A5/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2021566859A 2019-12-26 2020-10-23 ポンプ装置 Active JP7327514B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019235444 2019-12-26
JP2019235444 2019-12-26
PCT/JP2020/039852 WO2021131288A1 (ja) 2019-12-26 2020-10-23 ポンプ装置

Publications (3)

Publication Number Publication Date
JPWO2021131288A1 JPWO2021131288A1 (https=) 2021-07-01
JPWO2021131288A5 JPWO2021131288A5 (https=) 2022-08-19
JP7327514B2 true JP7327514B2 (ja) 2023-08-16

Family

ID=76574260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021566859A Active JP7327514B2 (ja) 2019-12-26 2020-10-23 ポンプ装置

Country Status (5)

Country Link
US (1) US12025116B2 (https=)
JP (1) JP7327514B2 (https=)
CN (1) CN114761686B (https=)
DE (1) DE112020005324T5 (https=)
WO (1) WO2021131288A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116249834B (zh) * 2020-09-30 2024-06-04 株式会社村田制作所 流体控制装置
US12497286B2 (en) 2021-07-09 2025-12-16 Frore Systems Inc. Anchor and cavity configuration for MEMS-based cooling systems
WO2023283448A2 (en) * 2021-07-09 2023-01-12 Frore Systems Inc. Anchor and cavity configuration for mems-based cooling systems
US12581620B2 (en) 2021-07-12 2026-03-17 Frore Systems Inc. Exit channel configuration for MEMS-based actuator systems

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017061349A1 (ja) 2015-10-05 2017-04-13 株式会社村田製作所 流体制御装置、減圧装置、および、加圧装置
WO2018021099A1 (ja) 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置、及び血圧計
WO2019124060A1 (ja) 2017-12-22 2019-06-27 株式会社村田製作所 ポンプ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001323879A (ja) 2000-05-16 2001-11-22 Matsushita Electric Ind Co Ltd 圧電ポンプ
JP2002314279A (ja) * 2001-04-19 2002-10-25 Matsushita Electric Ind Co Ltd 冷却装置
JP5028802B2 (ja) 2006-01-11 2012-09-19 日本電気株式会社 圧電型液体搬送器
JP5291892B2 (ja) * 2007-05-01 2013-09-18 オリンパスイメージング株式会社 撮像素子モジュール、撮像素子モジュールを用いたレンズユニット及び携帯用電子機器
CN104364526B (zh) * 2012-06-11 2016-08-24 株式会社村田制作所 鼓风机
JP2016200067A (ja) * 2015-04-10 2016-12-01 株式会社村田製作所 流体制御装置
WO2018020882A1 (ja) 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置、及び血圧計
JP6849488B2 (ja) 2017-03-07 2021-03-24 オムロン株式会社 血圧計、血圧測定方法および機器
JP6536770B1 (ja) * 2018-02-16 2019-07-03 株式会社村田製作所 流体制御装置
TWI747076B (zh) * 2019-11-08 2021-11-21 研能科技股份有限公司 行動裝置散熱組件
JP2023133758A (ja) * 2022-03-14 2023-09-27 キヤノン株式会社 圧電ポンプ、液体吐出ヘッド及び液体吐出装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017061349A1 (ja) 2015-10-05 2017-04-13 株式会社村田製作所 流体制御装置、減圧装置、および、加圧装置
WO2018021099A1 (ja) 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置、及び血圧計
WO2019124060A1 (ja) 2017-12-22 2019-06-27 株式会社村田製作所 ポンプ

Also Published As

Publication number Publication date
US20220260068A1 (en) 2022-08-18
CN114761686A (zh) 2022-07-15
US12025116B2 (en) 2024-07-02
CN114761686B (zh) 2024-07-05
WO2021131288A1 (ja) 2021-07-01
DE112020005324T5 (de) 2022-08-11
JPWO2021131288A1 (https=) 2021-07-01

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