DE112020005324T5 - Pumpvorrichtung - Google Patents

Pumpvorrichtung Download PDF

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Publication number
DE112020005324T5
DE112020005324T5 DE112020005324.5T DE112020005324T DE112020005324T5 DE 112020005324 T5 DE112020005324 T5 DE 112020005324T5 DE 112020005324 T DE112020005324 T DE 112020005324T DE 112020005324 T5 DE112020005324 T5 DE 112020005324T5
Authority
DE
Germany
Prior art keywords
pumping device
main surface
pump
main
adhesion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112020005324.5T
Other languages
German (de)
English (en)
Inventor
Yukiharu KODAMA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE112020005324T5 publication Critical patent/DE112020005324T5/de
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
DE112020005324.5T 2019-12-26 2020-10-23 Pumpvorrichtung Pending DE112020005324T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019235444 2019-12-26
JP2019-235444 2019-12-26
PCT/JP2020/039852 WO2021131288A1 (ja) 2019-12-26 2020-10-23 ポンプ装置

Publications (1)

Publication Number Publication Date
DE112020005324T5 true DE112020005324T5 (de) 2022-08-11

Family

ID=76574260

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112020005324.5T Pending DE112020005324T5 (de) 2019-12-26 2020-10-23 Pumpvorrichtung

Country Status (5)

Country Link
US (1) US12025116B2 (https=)
JP (1) JP7327514B2 (https=)
CN (1) CN114761686B (https=)
DE (1) DE112020005324T5 (https=)
WO (1) WO2021131288A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116249834B (zh) * 2020-09-30 2024-06-04 株式会社村田制作所 流体控制装置
US12497286B2 (en) 2021-07-09 2025-12-16 Frore Systems Inc. Anchor and cavity configuration for MEMS-based cooling systems
WO2023283448A2 (en) * 2021-07-09 2023-01-12 Frore Systems Inc. Anchor and cavity configuration for mems-based cooling systems
US12581620B2 (en) 2021-07-12 2026-03-17 Frore Systems Inc. Exit channel configuration for MEMS-based actuator systems

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018143557A (ja) 2017-03-07 2018-09-20 オムロン株式会社 血圧計、血圧測定方法および機器

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001323879A (ja) 2000-05-16 2001-11-22 Matsushita Electric Ind Co Ltd 圧電ポンプ
JP2002314279A (ja) * 2001-04-19 2002-10-25 Matsushita Electric Ind Co Ltd 冷却装置
JP5028802B2 (ja) 2006-01-11 2012-09-19 日本電気株式会社 圧電型液体搬送器
JP5291892B2 (ja) * 2007-05-01 2013-09-18 オリンパスイメージング株式会社 撮像素子モジュール、撮像素子モジュールを用いたレンズユニット及び携帯用電子機器
CN104364526B (zh) * 2012-06-11 2016-08-24 株式会社村田制作所 鼓风机
JP2016200067A (ja) * 2015-04-10 2016-12-01 株式会社村田製作所 流体制御装置
CN108138759B (zh) * 2015-10-05 2020-02-21 株式会社村田制作所 流体控制装置、减压装置以及加压装置
WO2018020882A1 (ja) 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置、及び血圧計
WO2018021099A1 (ja) 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置、及び血圧計
JP6687170B2 (ja) 2017-12-22 2020-04-22 株式会社村田製作所 ポンプ
JP6536770B1 (ja) * 2018-02-16 2019-07-03 株式会社村田製作所 流体制御装置
TWI747076B (zh) * 2019-11-08 2021-11-21 研能科技股份有限公司 行動裝置散熱組件
JP2023133758A (ja) * 2022-03-14 2023-09-27 キヤノン株式会社 圧電ポンプ、液体吐出ヘッド及び液体吐出装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018143557A (ja) 2017-03-07 2018-09-20 オムロン株式会社 血圧計、血圧測定方法および機器

Also Published As

Publication number Publication date
US20220260068A1 (en) 2022-08-18
CN114761686A (zh) 2022-07-15
US12025116B2 (en) 2024-07-02
CN114761686B (zh) 2024-07-05
WO2021131288A1 (ja) 2021-07-01
JP7327514B2 (ja) 2023-08-16
JPWO2021131288A1 (https=) 2021-07-01

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