JPWO2021131288A1 - - Google Patents

Info

Publication number
JPWO2021131288A1
JPWO2021131288A1 JP2021566859A JP2021566859A JPWO2021131288A1 JP WO2021131288 A1 JPWO2021131288 A1 JP WO2021131288A1 JP 2021566859 A JP2021566859 A JP 2021566859A JP 2021566859 A JP2021566859 A JP 2021566859A JP WO2021131288 A1 JPWO2021131288 A1 JP WO2021131288A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021566859A
Other languages
Japanese (ja)
Other versions
JPWO2021131288A5 (https=
JP7327514B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021131288A1 publication Critical patent/JPWO2021131288A1/ja
Publication of JPWO2021131288A5 publication Critical patent/JPWO2021131288A5/ja
Application granted granted Critical
Publication of JP7327514B2 publication Critical patent/JP7327514B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2021566859A 2019-12-26 2020-10-23 ポンプ装置 Active JP7327514B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019235444 2019-12-26
JP2019235444 2019-12-26
PCT/JP2020/039852 WO2021131288A1 (ja) 2019-12-26 2020-10-23 ポンプ装置

Publications (3)

Publication Number Publication Date
JPWO2021131288A1 true JPWO2021131288A1 (https=) 2021-07-01
JPWO2021131288A5 JPWO2021131288A5 (https=) 2022-08-19
JP7327514B2 JP7327514B2 (ja) 2023-08-16

Family

ID=76574260

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021566859A Active JP7327514B2 (ja) 2019-12-26 2020-10-23 ポンプ装置

Country Status (5)

Country Link
US (1) US12025116B2 (https=)
JP (1) JP7327514B2 (https=)
CN (1) CN114761686B (https=)
DE (1) DE112020005324T5 (https=)
WO (1) WO2021131288A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116249834B (zh) * 2020-09-30 2024-06-04 株式会社村田制作所 流体控制装置
US12497286B2 (en) 2021-07-09 2025-12-16 Frore Systems Inc. Anchor and cavity configuration for MEMS-based cooling systems
WO2023283448A2 (en) * 2021-07-09 2023-01-12 Frore Systems Inc. Anchor and cavity configuration for mems-based cooling systems
US12581620B2 (en) 2021-07-12 2026-03-17 Frore Systems Inc. Exit channel configuration for MEMS-based actuator systems

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017061349A1 (ja) * 2015-10-05 2017-04-13 株式会社村田製作所 流体制御装置、減圧装置、および、加圧装置
WO2018021099A1 (ja) * 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置、及び血圧計
WO2019124060A1 (ja) * 2017-12-22 2019-06-27 株式会社村田製作所 ポンプ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001323879A (ja) 2000-05-16 2001-11-22 Matsushita Electric Ind Co Ltd 圧電ポンプ
JP2002314279A (ja) * 2001-04-19 2002-10-25 Matsushita Electric Ind Co Ltd 冷却装置
JP5028802B2 (ja) 2006-01-11 2012-09-19 日本電気株式会社 圧電型液体搬送器
JP5291892B2 (ja) * 2007-05-01 2013-09-18 オリンパスイメージング株式会社 撮像素子モジュール、撮像素子モジュールを用いたレンズユニット及び携帯用電子機器
CN104364526B (zh) * 2012-06-11 2016-08-24 株式会社村田制作所 鼓风机
JP2016200067A (ja) * 2015-04-10 2016-12-01 株式会社村田製作所 流体制御装置
WO2018020882A1 (ja) 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置、及び血圧計
JP6849488B2 (ja) 2017-03-07 2021-03-24 オムロン株式会社 血圧計、血圧測定方法および機器
JP6536770B1 (ja) * 2018-02-16 2019-07-03 株式会社村田製作所 流体制御装置
TWI747076B (zh) * 2019-11-08 2021-11-21 研能科技股份有限公司 行動裝置散熱組件
JP2023133758A (ja) * 2022-03-14 2023-09-27 キヤノン株式会社 圧電ポンプ、液体吐出ヘッド及び液体吐出装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017061349A1 (ja) * 2015-10-05 2017-04-13 株式会社村田製作所 流体制御装置、減圧装置、および、加圧装置
WO2018021099A1 (ja) * 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置、及び血圧計
WO2019124060A1 (ja) * 2017-12-22 2019-06-27 株式会社村田製作所 ポンプ

Also Published As

Publication number Publication date
US20220260068A1 (en) 2022-08-18
CN114761686A (zh) 2022-07-15
US12025116B2 (en) 2024-07-02
CN114761686B (zh) 2024-07-05
WO2021131288A1 (ja) 2021-07-01
JP7327514B2 (ja) 2023-08-16
DE112020005324T5 (de) 2022-08-11

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