EP2220371A1 - Pumpenanordnung mit sicherheitsventil - Google Patents
Pumpenanordnung mit sicherheitsventilInfo
- Publication number
- EP2220371A1 EP2220371A1 EP07846798A EP07846798A EP2220371A1 EP 2220371 A1 EP2220371 A1 EP 2220371A1 EP 07846798 A EP07846798 A EP 07846798A EP 07846798 A EP07846798 A EP 07846798A EP 2220371 A1 EP2220371 A1 EP 2220371A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- inlet
- outlet
- valve
- pump assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 41
- 238000005086 pumping Methods 0.000 claims description 61
- 239000012528 membrane Substances 0.000 claims description 35
- 230000002572 peristaltic effect Effects 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 230000000712 assembly Effects 0.000 description 5
- 238000000429 assembly Methods 0.000 description 5
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000012377 drug delivery Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000003444 anaesthetic effect Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000241 respiratory effect Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012549 training Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
- F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/10—Other safety measures
Definitions
- Embodiments of the invention relate to a pump arrangement and in particular to a pump arrangement which has a safety valve at a pump outlet of a pump.
- Diaphragm pumps with passive check valves at the pump inlet and at the pump outlet are known, for example, from DE-A-19719862.
- Peristaltic pumps without active valves are known, for example, from DE-A-10238600.
- micropumps which can be understood as meaning those pumps whose pumping volume is in the microliter range or less with a single actuation.
- micropumps have a problem in that free flow through the pump can take place when an overpressure is applied to the inlet reservoir connected to the respective pump inlet and no operating voltage is applied to the pump.
- Normally closed, self-blocking valves are known from DE-Al-10048376 and WO-Al-2004/081390. Under a normally closed valve is a valve to understand that is closed in the unactuated state.
- DE-A1-10048376 discloses a normally closed self-blocking valve in which a positive pressure acts on a valve inlet closing.
- the valve comprises a piezoceramic, wherein the application of a voltage to the piezoceramic results in an opening of the valve.
- the advantage of such a valve is the self-blocking function, even with an overpressure at the inlet, as well as the simple structure. If you wanted to use such a valve with a pump Combine to avoid a free flow, this leads through the required separate component to increased space and cost requirements. Furthermore, a separate piezo drive is required.
- a double-normally closed microvalve is known, the valve outlet of which is fluidically coupled to the inlet of a downstream micropump.
- the valve is formed in a valve chip which has a self-blocking function when an overpressure is applied to the inlet of the valve, which has a self-blocking function when an overpressure is applied to the outlet of the valve, and the valve Valve opens when a vacuum is applied to the outlet.
- the pump When the pump is turned on, it creates a vacuum at the pump inlet and the valve outlet, which opens the valve.
- Such a microvalve provides a self-blocking function, has passive components, so that no piezo actuation is needed and thus has a very good element-to-element reproducibility.
- a medicament dosing device which has a pump and at the outlet of the pump a safety valve.
- An embodiment of this document teaches a diaphragm pump with passive ball check valves at a pump inlet and a pump outlet.
- a safety valve is provided which has a valve seat and a diaphragm acting as a valve flap.
- One face of this membrane is fluidly connected to an inlet reservoir of the pump assembly so that pressure in that inlet reservoir acts on that side of the membrane.
- the other surface of the diaphragm is connected via the check valve at the outlet of the pump to the pressure generated in a pumping chamber of the pump.
- WO-A-03/099351 when the pump is off, the safety valve is pressure balanced over almost the entire diaphragm size, but not in the area within the safety valve seat.
- the advantage of a safety valve connected in series with the outlet of a micropump is that an overpressure at the pump inlet acts to close the safety valve.
- a relatively small overpressure generated at the pump outlet can open the safety valve.
- penan angelen are disadvantageous in that separate components are needed, which in turn leads to increased space and cost requirements.
- the pump assemblies have a large dead volume, which in turn fluid connections are needed.
- the present invention provides a pump assembly having the following features:
- a pump having a pump inlet and a pump outlet configured to pump fluid from the pump inlet to the pump outlet;
- a safety valve disposed between the pump outlet and an outlet of the pump assembly and having a valve seat and a valve cover;
- valve seat, the pump outlet and the pump inlet are structured in a first surface of a first integral part of the pump assembly
- valve cover is formed in a second integral part of the pump assembly
- a safety valve is integrated directly with a pump.
- the valve seat of the safety valve, the pump outlet and the pump inlet are structured in a first surface of an integral part of the pump arrangement.
- the valve seat of the safety valve can be formed directly at the outlet of the pump, which in addition to a simple structure, a small dead volume can be obtained.
- the pump inlet is further structured in the same surface and fluidly connected to a fluid region of the pump assembly which acts to close the safety valve. This makes it possible to implement the pump arrangement according to the invention with a simple structure.
- the second integral part of the pump assembly is a layer of substantially uniform thickness disposed between and separating the first one-piece part and the third part.
- This second integral part may have at least one opening through which the pump inlet is fluidically connected to the fluid area, which is an inlet fluid area of the pump arrangement.
- the second integral part may have another opening through which an outlet of the safety valve is fluidly connected to the outlet of the pump assembly.
- the second one-piece part may be formed only in the area of the safety valve.
- Embodiments of pump arrangements according to the invention can be implemented with different pumps, for example diaphragm pumps with passive check valves at the pump inlet and at the pump outlet or peristaltic pumps.
- Embodiments of the present invention are particularly suitable for the implementation of micropumps, in which a pumping volume pumped during a pumping cycle may be in the microliter range and below.
- relevant dimensions of such a micropump such as, for example, the pumping stroke of a pumping membrane or the thickness of a pumping membrane, can lie in the micrometer range.
- the present invention provides a pump assembly in which a pump and a safety valve are integrated in a component which may be implemented with a small number of parts.
- a pump assembly element may be implemented, which is formed of five or six individual parts or layers, wherein a pumping membrane part with associated piezoceramic and corresponding terminals is considered as a part.
- Embodiments of the present invention provide a pump assembly chip constructed of a plurality of stacked structured layers forming a pump and a safety valve integrated with the pump outlet. In embodiments of the invention thus no separate fluidic connections between the pump and the valve are required. Thus, in embodiments of the invention both a dead volume and a space requirement can be minimized. embodiments In addition to a simple design, the invention enables a saving in terms of size, weight and costs.
- an overpressure at the pump arrangement inlet acts closing on the safety valve, so that in the unactuated state a flow in the direction from the inlet to the outlet can be effectively avoided.
- FIG. 1a is a schematic cross-sectional view of an embodiment of a pump arrangement according to the invention.
- FIG. 1b is a bottom view of a pump part of the pump shown in FIG.
- Fig. 2 is a schematic cross-sectional view of a modification of the embodiment shown in Fig. 1;
- FIG. 3 is a schematic cross-sectional view of an alternative embodiment of a pump arrangement according to the invention.
- FIG. 4 shows a schematic cross-sectional view of a further alternative embodiment of a pump arrangement according to the invention.
- the pump arrangement comprises five structured layers, which are arranged one above the other and attached to one another. These layers are referred to below as first layer 10, second layer 12, third layer 14, fourth layer 16 and fifth layer 18.
- the pump arrangement shown in FIG. 1 a has a diaphragm pump 20 with a pump inlet 22 and a pump outlet 24.
- the pump inlet 22 and the pump outlet 24 are structured in the lower surface of the third layer 14.
- the diaphragm pump 20 includes a passive check valve at the pump inlet 22, which has a valve seat 26 and a valve flap 28.
- the valve seat 26 is patterned in the upper surface of the third layer 14, and the valve flap 28 is patterned in the fourth layer 16.
- the micropump 20 further includes a passive check valve at the pump outlet 24, which has a valve seat 30 and a valve flap 32.
- the valve seat 30 is structured in the fourth layer 16 and the valve flap 32 is structured in the upper surface of the third layer 14.
- the diaphragm pump 20 further includes a pumping membrane 34 which is structured in the fifth part 18.
- a piezoceramic 36 is mounted, so that a volume of a pumping chamber 38 of the diaphragm pump 20 can be varied by operating the same.
- suitable means (not shown) for applying a voltage to the piezoceramic 36 are provided by which the pumping membrane 34 can be deflected from the position shown in Fig. Ia to a position in which the volume of the pumping chamber 38 is reduced.
- the embodiment shown in Fig. Ia a Pumpenanordnu ⁇ g invention has a safety valve 40 at the pump outlet 24.
- the safety valve 40 comprises a safety valve seat 42 and a safety valve flap 44.
- the safety valve seat 42 is structured in the lower surface of the third layer 14.
- the safety valve flap 44 is formed by a part of the second layer 12, which lies opposite the safety valve seat 42.
- the third layer 14 west in the lower O ber
- the pump assembly shown in FIG. 1 a includes a pump assembly inlet 46 and a pump assembly outlet 48.
- the pump assembly inlet 46 is connected to a fluid region 50.
- the pump assembly inlet 46, the pump assembly outlet 48, and the fluid region 50 are structured in the first layer 10.
- the fluid region 50 adjoins the underside of the second layer 12, so that a pressure prevailing in the fluid region 50 acts closing on the safety valve 40.
- the fluid region 50 and thus the pump assembly inlet 46 are fluidly connected to the pump inlet 22 via a first opening 52 in the second layer 12.
- the pump outlet 48 is fluidly connected via a second opening 54 in the second layer 12 to a fluid channel 56, which in turn is fluidically connected to the safety valve 40 and an outlet 58 of the safety valve, respectively.
- the fluid channel 56 is formed in the illustrated embodiment by appropriate structuring in the third layer 14 and the fourth layer 16.
- the outlet of the safety valve is structured in the upper surface of the third layer 14.
- the pump assembly inlet 46 and the pump assembly outlet 48 may be provided with suitable fluid connectors that facilitate connection of further fluidic structures, such as so-called luer connectors for connecting tubing and the like.
- FIG. 1 b shows the structures formed in the lower side of the third layer 14, which cover the pump inlet 22, the pump pen outlet 24, the safety valve seat 42 and a structured in the lower surface of the third layer 14 outlet-side end 60 of the fluid channel 56 include.
- the fluid channel 56 is indicated by dashed lines in FIG.
- the valve flap 32 of the non-return valve at the outlet of the micropump can be seen in FIG. 1b above the pump outlet 24.
- the position and arrangement of the pumping membrane 34 are indicated in dashed lines in FIG. 1b.
- the recess represented a safety valve chamber 62, which is structured in the underside of the third layer 14, and has a substantially square shape in the illustrated embodiment.
- an optional spacer structure 64 may be provided therefor, as indicated by regularly spaced supports in FIG.
- This spacer structure which is not shown in Fig. Ia, may be formed by projections in the third layer 14, which may have the same height as the safety valve seat 42.
- the projections may be formed using the same process steps, for example the same etching step as the safety valve seat 42 to be made.
- the spacer structure may be configured to reduce or substantially prevent flexing of the safety valve flap toward the third layer 14 at an overpressure at the pump assembly inlet 46. As a result, leaks due to a deflection of the safety valve flap 44 can be prevented. Further, the diaphragm forming the safety valve flap 44 is thereby subjected to lower stresses, whereby the durability thereof can be increased.
- the pumping membrane 34 is actuated, starting from the state shown in Fig. Ia, so that the volume of the pumping chamber 38 is reduced.
- an overpressure is generated in the pumping chamber 38, which on the one hand opens on the pump outlet 24 and on the other hand, a pressure on the safety valve flap 44 exerts.
- the overpressure in the pumping chamber 38 closes on the check valve at the inlet of the pump chamber.
- the piezoceramic 36 may be periodically energized, for example by a pulsed square wave voltage. Depending on the frequency of the applied actuating voltage and a stroke volume of the pumping membrane 34 thus a desired delivery rate can be achieved.
- the pressure acts from below on the entire movable flap surface, while the pressure from above the area covered by the valve seat 42 does not act. Thereby, a free flow at a positive pressure at the pump assembly inlet in the non-actuated state can be securely prevented.
- FIG. 2 A modification of the training shown in Fig. Ia and Ib • guide embodiment is shown in Fig. 2, wherein like elements are designated by like reference numerals and further description of these elements will be omitted.
- the pumping membrane 34 has at the bottom of the same elevations 34a, 34b, which protrude into the pumping chamber.
- the fourth layer 16 has an elevation 66 projecting into the pumping chamber 38.
- the pumping diaphragm 34 is shown in the actuated state.
- the elevations 34a, 34b may be formed in the edge area of the pumping membrane 34a, 34b.
- the elevations 34a, 34b and 66 result in a reduction in the dead volume of the pumping chamber 38, which in turn results in an increase in the compression ratio of the pump.
- the operation of the pump arrangement shown in Fig. 2 corresponds to the operation of the embodiment described above with reference to Figs. 1a and 1b.
- the pump assembly shown in Fig. 3 comprises five layers 110, 112, 114, 116 and 118 superimposed and attached to each other.
- the pump assembly includes a pump having a pump inlet 122 and a pump outlet 124.
- the pump inlet 122 and the pump outlet 124 are structured in the lower surface of the third layer 114.
- a recess is formed, in which a check valve module 126 is arranged.
- the return Shock valve module 126 may be glued, for example, in the recess.
- the check valve module 126 may, for example, have a structure as described in DE-A-19719862.
- the upper surface of the third layer 114 is further patterned to define a pumping chamber 130 together with the underside of a pumping membrane 128 formed by the fourth layer 116.
- the pumping membrane 128 may be formed, for example, by a metal layer, such as e.g. a stainless steel foil, be formed.
- a piezoceramic 132 is arranged on the pumping diaphragm 128, a piezoceramic 132 is arranged. A voltage can be applied to the piezoceramic 132 via corresponding connection devices, which are shown schematically at 134, in order to actuate the pumping membrane 128.
- the pumping membrane 128 Upon actuation, the pumping membrane 128 is deflected downwards, so that the volume of the pumping chamber 130 is reduced. As shown in Fig.
- the contour of the pumping membrane 128 facing surface of the third layer 114 is adapted to the contour of the pumping diaphragm 128 in the deflected state, so that a dead volume of the pump can be reduced and thus a compression ratio thereof can be increased.
- a lid 136 is provided in the example shown, which is formed by a corresponding structuring of the fifth layer 118.
- the pump assembly shown in FIG. 3 further includes a safety valve 140 having a safety valve seat 142 and a safety valve door 144.
- the safety valve seat 142 is structured in the underside of the third layer 114.
- the safety valve flap 144 is formed by a movable part of the second layer 112.
- the movable part of the second layer 112 is in turn defined by a corresponding recess in the underside of the third layer 114.
- the pump assembly includes a pump assembly inlet 146 and a pump assembly outlet 148.
- the pump assembly Inlet inlet 146 is structured in the first layer 110 and fluidly connected to a fluid region 150, which is also structured in the first layer 110.
- the fluid region 150 adjoins the underside of the safety valve flap 144, so that an overpressure prevailing at the inlet 146 acts on the underside of the valve flap 144.
- the pump arrangement outlet 148 is fluidly connected to an outlet 158 of the safety valve 140 via a fluid channel 156.
- the movable safety valve flap 44 is not attached to the valve seat 142, so that a pressure acting on the top of the valve flap prevailing on the underside of the valve flap opening acts on the safety valve.
- the check valve module 100 provides a check valve at the pump inlet 122 and a check valve 124 at the pump outlet.
- An overpressure in the pumping chamber 130 acts to close the check valve at the pump inlet 122 and open onto the check valve at the pump outlet 124, while a negative pressure in the pumping chamber 130 acts to open the check valve at the pump inlet 122 and to close the check valve at the pump outlet 124.
- the pump assembly inlet 146 and the pump assembly outlet 148 may be configured to facilitate the connection of fluid tubing or the like.
- the pump inlet 122 is fluidly connected to the fluid area 150 via an opening 152 in the second layer 112.
- the fourth layer 116 may be formed by a metal foil with a piezoceramic applied thereto.
- the check valve module 126 can be made of silicon-structured microvents. Ie have. Such a combination advantageously allows for the implementation of micropumps of small construction and high delivery rate.
- a pressure differential created by a pumping stroke in the pumping chamber 130 acts to open the safety valve door 144 so that fluid is pumped out of the pumping chamber through the pumping assembly outlet 148 during such a pumping stroke.
- fluid is drawn through the pump assembly inlet 146 and the check valve at the pump inlet 122 while the check valve at the pump outlet 126 is closed.
- pump overpressure at the pump assembly inlet 146 again acts to close the underside of the safety valve door 144 so that flow through the pump assembly can be safely prevented when the inlet is over-pressurized in the de-energized state.
- FIG. 4 an alternative embodiment of a pump assembly according to the present invention will now be described having a peristaltic micropump.
- the pump assembly shown in FIG. 4 includes a first layer 210, a second layer 212, a third layer 214, a fourth layer 216, and a fifth layer 218.
- the layers 210, 212, 214 and 218 are stacked and attached to each other.
- the layer 216 is mounted on the layer 214 or, as shown in FIG. 4, disposed in a recess formed in an upper surface of the layer 214.
- the pump arrangement shown in FIG. 4 has a peristaltic micropump 220 which has a pump inlet 222, a pump outlet 224, a pumping membrane formed by the fourth layer 216 and three piezoelectric actuators. comprises members 226, 228 and 230.
- An inlet valve seat 232 forms an active inlet valve, along with a portion of diaphragm 216 opposite thereto, while an outlet valve seat 234, together with a same opposed portion of membrane 216, provides an active outlet valve.
- the pumping chamber 236 is fluidly connected via fluidic connections 238 to an inlet valve chamber 240 and an outlet valve chamber 242.
- the construction of the peristaltic micropump essentially corresponds to the structure of a peristaltic micropump, as described in DE-A-10238600.
- the piezoelectric actuators 226, 228 and 230 are connected via respective electrical connections (not shown) to voltage sources and control means, respectively (not shown).
- the individual membrane sections of the membrane 216 can be actuated or deflected downward in a specific sequence in order to effect a pumping action from the pump inlet 222 to the pump outlet 224, as described, for example, in DE-A-10238600 Related teaching is hereby incorporated by reference.
- the pump arrangement shown in FIG. 4 has a safety valve 250 on the pump outlet 224 of the pump 220, which has a safety valve seat 252 and a safety valve flap 254.
- the safety valve seat 252 is formed in the lower surface of the third layer 214 while the safety valve flap 254 is formed by a movable portion of the second layer 212.
- the movable part of the second layer 212 is defined by a recess 256 in the bottom of the third layer 214.
- the pump assembly includes a pump assembly inlet 260 and a pump assembly outlet 262.
- the pump assembly inlet 260 is fluidly connected to a fluid region 270 that communicates with the pump inlet 222 via an opening 272 in the second layer 212.
- the fluid arrangement outlet 262 is fluidically connected to an outlet 276 of the safety valve 250 via a fluid channel 274.
- the fifth layer 218 is patterned to provide a cover for protecting the diaphragm 216 and the piezoelectric actuators 226, 228 and 230 disposed thereon and the electrical connections therefor.
- the portions of membrane 216 may be operated as described in DE-A-10238600.
- a positive pressure caused during a pumping stroke in the pumping chamber 236 thereby opens the safety valve 250 which is fluidically connected to the pump outlet 224.
- the present invention thus provides pump assemblies in which fluid flow from the inlet to the outlet can be safely avoided with positive pressure at the inlet, with a simple structure, using a small number of components and with a small gate volume.
- the different parts or layers of embodiments of the pump assemblies of the present invention may be implemented from any suitable materials using any suitable manufacturing method.
- the parts can be made of silicon, with appropriate structuring by wet etching (isotropic) or dry etching (anisotropic) can be generated.
- the parts may be made of plastic and produced by injection molding.
- the layers 12, 14 16 and 18 may be structured of silicon.
- the second layers 12, 112 and 212 may, for example, of an elastic material, such. B. corresponding to thin silicon or rubber.
- the first layers 10, 110 and 210, the third layers 114 and 214 and the fifth layers 118 and 218 may be formed by injection molding from plastic, for example.
- the diaphragm 216 may be made of silicon or other suitable material, for example, to realize together with the actuators 226, 228 and 230 each piezoelectric bending transducers.
- Inventive pump assemblies are suitable for a variety of applications. In the following, only examples are given of applications in which it is important to avoid a free flow at an overpressure at the pump inlet. Such applications, for which embodiments of pump assemblies according to the invention are suitable, include e.g. Methanol feed pumps in fuel cell systems, infusion pumps, implantable drug delivery systems, portable drug delivery systems, respiratory humidification systems, and anesthetic metering systems.
- a peristaltic micropump with normally open valves allows implementation of a high compression ratio pump, which in turn is advantageous in terms of bubble tolerant operation.
- a pump arrangement according to the invention could also comprise a peristaltic micropump with normally closed active valves at the pump inlet and / or pump outlet.
- two separate recesses could be provided in the upper surface of the third layer 114, wherein in a first recess a check valve module for a check valve is mounted on the pump inlet and in a second recess a second check valve module is mounted with a check valve for the pump outlet.
- inventions of the pump assembly according to the invention such as e.g. the second layer 12 and the third layer 14 may be interconnected using any known joining techniques, such as e.g. by gluing, clamping or bonding without bonding.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
Description
Claims
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2007/010198 WO2009065427A1 (de) | 2007-11-23 | 2007-11-23 | Pumpenanordnung mit sicherheitsventil |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2220371A1 true EP2220371A1 (de) | 2010-08-25 |
EP2220371B1 EP2220371B1 (de) | 2012-06-06 |
Family
ID=39027183
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP07846798A Active EP2220371B1 (de) | 2007-11-23 | 2007-11-23 | Pumpenanordnung mit sicherheitsventil |
Country Status (4)
Country | Link |
---|---|
US (1) | US8382452B2 (de) |
EP (1) | EP2220371B1 (de) |
JP (1) | JP5027930B2 (de) |
WO (1) | WO2009065427A1 (de) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7553295B2 (en) | 2002-06-17 | 2009-06-30 | Iradimed Corporation | Liquid infusion apparatus |
US8105282B2 (en) | 2007-07-13 | 2012-01-31 | Iradimed Corporation | System and method for communication with an infusion device |
FR2952628A1 (fr) * | 2009-11-13 | 2011-05-20 | Commissariat Energie Atomique | Procede de fabrication d'au moins une micropompe a membrane deformable et micropompe a membrane deformable |
DE102010028524A1 (de) * | 2010-05-04 | 2011-11-10 | Robert Bosch Gmbh | Mikrofluidisches Bauteil, insbesondere peristaltische Mikropumpe, und Verfahren zu dessen Herstellung |
JP5826009B2 (ja) * | 2011-12-05 | 2015-12-02 | 株式会社菊池製作所 | マイクロポンプ実装用の基板およびマイクロポンプ組立体 |
GB201201330D0 (en) * | 2012-01-26 | 2012-03-14 | Quanta Fluid Solutions Ltd | Dialysis machine |
JP5761455B2 (ja) * | 2012-05-09 | 2015-08-12 | 株式会社村田製作所 | 冷却装置、加熱冷却装置 |
WO2014019632A1 (en) | 2012-08-03 | 2014-02-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Apparatus for closing and opening a flow path having a flexible flow path wall |
JP5770391B2 (ja) * | 2012-12-21 | 2015-08-26 | フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー.ファオ | 安全弁装置を含むポンプ装置 |
WO2015022176A1 (en) * | 2013-08-12 | 2015-02-19 | Koninklijke Philips N.V. | Microfluidic device with valve |
JP5735690B1 (ja) * | 2014-08-15 | 2015-06-17 | 応研精工株式会社 | 急排弁一体型ダイヤフラムポンプ |
ES2846834T3 (es) * | 2015-02-17 | 2021-07-29 | Daiken Medical Co Ltd | Unidad de bomba y procedimiento para fabricar la misma |
DE102015224619A1 (de) * | 2015-12-08 | 2017-06-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Mikrodosiersystem |
DE102015224622A1 (de) | 2015-12-08 | 2017-06-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Freistrahldosiersystem |
US11268506B2 (en) * | 2017-12-22 | 2022-03-08 | Iradimed Corporation | Fluid pumps for use in MRI environment |
GB2577710B (en) | 2018-10-03 | 2022-12-14 | Lee Ventus Ltd | Methods and devices for driving a piezoelectric pump |
GB2576796B (en) * | 2018-12-07 | 2020-10-07 | Ttp Ventus Ltd | Improved valve |
EP3891398B1 (de) * | 2018-12-07 | 2023-01-04 | Lee Ventus Limited | Verbessertes ventil |
DE112020007236T5 (de) | 2020-05-26 | 2023-03-16 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Arzneimittelabgabesystem |
GB2597942B (en) | 2020-08-10 | 2022-08-03 | Ttp Ventus Ltd | Pump for microfluidic device |
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DE19719862A1 (de) | 1997-05-12 | 1998-11-19 | Fraunhofer Ges Forschung | Mikromembranpumpe |
US8052792B2 (en) * | 2001-04-06 | 2011-11-08 | California Institute Of Technology | Microfluidic protein crystallography techniques |
JP2001294483A (ja) * | 2000-04-12 | 2001-10-23 | Ngk Spark Plug Co Ltd | ジルコニア含有セラミックボールとその製造方法、セラミックボールベアリング及びチェックバルブ |
DE10048376C2 (de) * | 2000-09-29 | 2002-09-19 | Fraunhofer Ges Forschung | Mikroventil mit einem normalerweise geschlossenen Zustand |
US6514047B2 (en) * | 2001-05-04 | 2003-02-04 | Macrosonix Corporation | Linear resonance pump and methods for compressing fluid |
AU2003243305A1 (en) * | 2002-05-22 | 2003-12-12 | Medical Research Products-A, Inc. | Implantable medication delivery device |
DE10238600A1 (de) | 2002-08-22 | 2004-03-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Peristaltische Mikropumpe |
WO2004081390A1 (de) | 2003-03-11 | 2004-09-23 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V. | Normal doppelt geschlossenes mikroventil |
-
2007
- 2007-11-23 WO PCT/EP2007/010198 patent/WO2009065427A1/de active Application Filing
- 2007-11-23 US US12/743,831 patent/US8382452B2/en active Active
- 2007-11-23 EP EP07846798A patent/EP2220371B1/de active Active
- 2007-11-23 JP JP2010534371A patent/JP5027930B2/ja active Active
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Also Published As
Publication number | Publication date |
---|---|
US20100290935A1 (en) | 2010-11-18 |
JP5027930B2 (ja) | 2012-09-19 |
US8382452B2 (en) | 2013-02-26 |
EP2220371B1 (de) | 2012-06-06 |
WO2009065427A1 (de) | 2009-05-28 |
JP2011504560A (ja) | 2011-02-10 |
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