JP7298681B2 - 加工システム、加工方法、ロボットシステム、接続装置及びエンドエフェクタ装置 - Google Patents

加工システム、加工方法、ロボットシステム、接続装置及びエンドエフェクタ装置 Download PDF

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Publication number
JP7298681B2
JP7298681B2 JP2021513135A JP2021513135A JP7298681B2 JP 7298681 B2 JP7298681 B2 JP 7298681B2 JP 2021513135 A JP2021513135 A JP 2021513135A JP 2021513135 A JP2021513135 A JP 2021513135A JP 7298681 B2 JP7298681 B2 JP 7298681B2
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processing
irradiation device
processing system
light
coating film
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JPWO2020208808A1 (https=
JPWO2020208808A5 (https=
Inventor
真路 佐藤
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Nikon Corp
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Nikon Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
    • B23K37/02—Carriages for supporting the welding or cutting element
    • B23K37/0247—Driving means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1628—Program controls characterised by the control loop
    • B25J9/1641—Program controls characterised by the control loop compensation for backlash, friction, compliance, elasticity in the joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least three axial directions, e.g. manipulators, robots
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00—Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
    • B23K37/02—Carriages for supporting the welding or cutting element
    • B23K37/0205—Carriages for supporting the welding or cutting element guided by hand
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0075—Manipulators for painting or coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/16—Program controls
    • B25J9/1656—Program controls characterised by programming, planning systems for manipulators
    • B25J9/1664—Program controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/006—Vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/18—Sheet panels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/34—Coated articles ; Surface treated articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic materials
    • B23K2103/42—Plastics other than composite materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Robotics (AREA)
  • Laser Beam Processing (AREA)
  • Manipulator (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
JP2021513135A 2019-04-12 2019-04-12 加工システム、加工方法、ロボットシステム、接続装置及びエンドエフェクタ装置 Active JP7298681B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023096872A JP7639851B2 (ja) 2019-04-12 2023-06-13 加工システム、加工方法、ロボットシステム、接続装置及びエンドエフェクタ装置
JP2025025341A JP2025081529A (ja) 2019-04-12 2025-02-19 加工システム、加工方法、ロボットシステム、接続装置及びエンドエフェクタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/015966 WO2020208808A1 (ja) 2019-04-12 2019-04-12 加工システム、加工方法、ロボットシステム、接続装置及びエンドエフェクタ装置

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JP2023096872A Division JP7639851B2 (ja) 2019-04-12 2023-06-13 加工システム、加工方法、ロボットシステム、接続装置及びエンドエフェクタ装置

Publications (3)

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JPWO2020208808A1 JPWO2020208808A1 (https=) 2020-10-15
JPWO2020208808A5 JPWO2020208808A5 (https=) 2022-03-14
JP7298681B2 true JP7298681B2 (ja) 2023-06-27

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JP2021513135A Active JP7298681B2 (ja) 2019-04-12 2019-04-12 加工システム、加工方法、ロボットシステム、接続装置及びエンドエフェクタ装置
JP2023096872A Active JP7639851B2 (ja) 2019-04-12 2023-06-13 加工システム、加工方法、ロボットシステム、接続装置及びエンドエフェクタ装置
JP2025025341A Pending JP2025081529A (ja) 2019-04-12 2025-02-19 加工システム、加工方法、ロボットシステム、接続装置及びエンドエフェクタ装置

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JP2025025341A Pending JP2025081529A (ja) 2019-04-12 2025-02-19 加工システム、加工方法、ロボットシステム、接続装置及びエンドエフェクタ装置

Country Status (6)

Country Link
US (1) US20220281104A1 (https=)
EP (2) EP4477349A3 (https=)
JP (3) JP7298681B2 (https=)
CN (1) CN113727804A (https=)
TW (1) TW202042987A (https=)
WO (1) WO2020208808A1 (https=)

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EP3960359B1 (en) * 2019-04-24 2025-01-08 Nikon Corporation Processing apparatus and method
DE102021109043A1 (de) 2021-04-12 2022-10-13 Jenoptik Automatisierungstechnik Gmbh Verfahren und Steuergerät zum Steuern eines Laser-Bearbeitungsprozesses einer Oberfläche eines Werkstücks und Bearbeitungssystem zum Bearbeiten einer Oberfläche eines Werkstücks mittels eines Laser-Bearbeitungsprozesses
JP7692396B2 (ja) * 2022-10-06 2025-06-13 三菱重工業株式会社 レーザ加工装置
CN117066711A (zh) * 2023-08-16 2023-11-17 海目星激光科技集团股份有限公司 一种产品装夹定位夹具
CN117102159A (zh) * 2023-09-25 2023-11-24 上海韵申新能源科技有限公司 一种还原炉底盘激光自动清洗机

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JP2018183853A (ja) 2017-04-27 2018-11-22 住友理工株式会社 接触検出装置

Also Published As

Publication number Publication date
WO2020208808A1 (ja) 2020-10-15
EP4477349A3 (en) 2025-10-15
JP2025081529A (ja) 2025-05-27
US20220281104A1 (en) 2022-09-08
JP2023116669A (ja) 2023-08-22
EP3954493A4 (en) 2023-01-04
JPWO2020208808A1 (https=) 2020-10-15
EP3954493A1 (en) 2022-02-16
EP3954493B1 (en) 2024-12-04
TW202042987A (zh) 2020-12-01
JP7639851B2 (ja) 2025-03-05
EP4477349A2 (en) 2024-12-18
CN113727804A (zh) 2021-11-30

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